公开(公告)号：US20210149337A1

公开(公告)日：2021-05-20

申请号：US17028012

申请日：2020-09-22

Applicant: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE

Inventor： Hsiang-Chun WEI ,  Chung-Lun KUO ,  Chia-Hung CHO ,  Chun-Wei LO ,  Chih-Hsiang LIU

IPC: G03H1/04 ,  G06T15/08 ,  G01B9/02 ,  G03H1/00

Abstract: An optical measurement system comprises a polarization beam splitter for dividing an incident beam into a reference beam and a measurement beam, a first beam splitter for reflecting the measurement beam to form a first reflected measurement beam, a spatial light modulator for modulating the first reflected measurement beam to form a modulated measurement beam, a condenser lens for focusing the modulated measurement beam to an object to form a penetrating measurement beam, an objective lens for converting the penetrating measurement beam into a parallel measurement beam, a mirror for reflecting the parallel measurement beam to form an object beam, a second beam splitter for reflecting the reference beam to a path coincident with that of the object beam, and a camera for receiving an interference signal generated by the reference beam and the object beam to generate an image of the object.

公开(公告)号：US20230160879A1

公开(公告)日：2023-05-25

申请号：US17563701

申请日：2021-12-28

Applicant: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE

Inventor： Hsiang-Chun WEI ,  Chih-Hsiang LIU ,  Chung-Lun KUO ,  Chun-Wei LO ,  Chia-Hung CHO ,  Wei-Hsiung TSAI

IPC: G01N33/50 ,  G06T7/00 ,  G03H1/04 ,  G03H1/08 ,  G03H1/00 ,  G01N15/14

CPC classification number: G01N33/505 ,  G06T7/0012 ,  G03H1/0443 ,  G03H1/0866 ,  G03H1/0005 ,  G01N15/1475 ,  G06T2207/30024 ,  G06T2207/10064 ,  G06T2207/10056 ,  G03H2001/0033 ,  G03H2001/005 ,  G06T2207/20081 ,  G06T2207/20084

Abstract: A method of training AI for label-free cell viability determination includes a step of providing a cell sample, a step of obtaining a fluorescence image and a DHM image of the cell sample, a step of determining a first cell viability of the cell sample according to the fluorescence image of the cell sample, a step of labeling the DHM image of the cell sample as a model specifying the first cell viability, and a step of performing AI training by using the model containing the DHM image of the cell sample.

公开(公告)号：US20170146339A1

公开(公告)日：2017-05-25

申请号：US14983053

申请日：2015-12-29

Applicant: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE

Inventor： Hsiang-Chun WEI ,  Yi-Sha KU ,  Chia-Hung CHO ,  Chieh-Yu WU ,  Chun-Wei LO ,  Chih-Hsiang LIU

IPC: G01B11/22 ,  G01B11/06

CPC classification number: G01B11/22 ,  G01B11/0616 ,  G01B11/2441 ,  G01B2210/56 ,  H01L22/12

Abstract: A measurement system is configured to measure a surface structure of a sample. The surface of the sample has a thin film and a via, the depth of the via is larger than the thickness of the thin film. The measurement system includes a light source, a first light splitter, a first aperture stop, a lens assembly, a second aperture stop, a spectrum analyzer and an analysis module. The first light splitter disposed in the light emitting direction of the light source. The first aperture stop disposed between the light source and the first light splitter. The lens assembly is disposed between the first light splitter and the sample. The second aperture stop is disposed between the lens assembly and the first light splitter. The spectrum analyzer is disposed to at a side of the first light splitter opposite to the sample.