公开(公告)号：US11328946B2

公开(公告)日：2022-05-10

申请号：US17327783

申请日：2021-05-24

Applicant: Industrial Technology Research Institute

Inventor： Ding-Shiang Wang ,  Jia-Jen Chang ,  Ming-Sheng Leu ,  Tai-Sheng Chen ,  Chin-Te Shih

IPC: H01L21/673 ,  B65G47/74 ,  C23C14/02 ,  C23C14/14 ,  C23C14/08 ,  C23C14/00 ,  C23C14/32 ,  H05F3/04

Abstract: A manufacturing method of the ESD protection device includes the following steps. A surface treatment is performed on the substrate. A link layer is formed on the substrate after the surface treatment, wherein a material of the link layer includes a metal material. A progressive layer is formed on the link layer, wherein a material of the progressive layer includes a non-stoichiometric metal oxide material, and an oxygen concentration in the non-stoichiometric metal oxide material is increased gradually away from the substrate in a thickness direction of the progressive layer. A composite layer is formed on the progressive layer, wherein the composite layer includes a stoichiometric metal oxide material and a non-stoichiometric metal oxide material, and a ratio of the non-stoichiometric metal oxide material and the stoichiometric metal oxide material in the composite layer may make a sheet resistance value of the composite layer 1×107 to 1×108 Ω/sq.

公开(公告)号：US10680244B2

公开(公告)日：2020-06-09

申请号：US15379444

申请日：2016-12-14

Applicant: Industrial Technology Research Institute

Inventor： Ding-Shiang Wang ,  Ming-Sheng Leu

IPC: H01M4/587 ,  H01M4/133 ,  H01M10/0525 ,  H01M4/04 ,  H01M4/1393 ,  H01M4/62 ,  C01B32/205

Abstract: A method of fabricating a graphite composite structure includes the following steps. An amorphous carbon layer having a short-range ordered structure region in a range from 50% to 100% is provided. At least one force is locally applied on a surface of the amorphous carbon layer to form at least one stressed region. An annealing process is performed on the amorphous carbon layer so as to form at least one long-range ordered graphite structure in the at least one stressed region. The at least one long-range ordered graphite structure includes a stack structure including a plurality of (002) planes. An angle between an extension direction of the (002) planes and the surface of the amorphous carbon layer is in a range from 45 degrees or more to 90 degrees or less.

公开(公告)号：US20240217868A1

公开(公告)日：2024-07-04

申请号：US18090505

申请日：2022-12-29

Applicant: Industrial Technology Research Institute

Inventor： Hao-Wen Cheng ,  Ming-Huei Yen ,  Wen-Jin Li ,  Yu-Ting Guan ,  Ding-Shiang Wang

IPC: C03C15/00 ,  H01L21/3213

CPC classification number: C03C15/00 ,  H01L21/32134

Abstract: A method of performing a selective etch on an array substrate including the following is provided, and the array substrate includes a substrate and a component layer disposed on the substrate. Deionized water, hydrogen peroxide, and an acid are mixed to prepare a first solution, and the acid includes sulfuric acid, hydrochloric acid, oxalic acid or a combination thereof. An alkoxy silane compound is added to the first solution to prepare a second solution. The array substrate is placed into the second solution to remove the component layer, and an aging second solution is formed. The substrate is taken out from the aging second solution.

公开(公告)号：US20180069240A1

公开(公告)日：2018-03-08

申请号：US15379444

申请日：2016-12-14

Applicant: Industrial Technology Research Institute

Inventor： Ding-Shiang Wang ,  Ming-Sheng Leu

IPC: H01M4/587 ,  H01M4/133 ,  H01M4/36 ,  H01M10/0525 ,  H01M4/66

CPC classification number: H01M4/587 ,  C01B32/205 ,  H01M4/043 ,  H01M4/0471 ,  H01M4/133 ,  H01M4/1393 ,  H01M4/625 ,  H01M10/0525

Abstract: A method of fabricating a graphite composite structure includes the following steps. An amorphous carbon layer having a short-range ordered structure region in a range from 50% to 100% is provided. At least one force is locally applied on a surface of the amorphous carbon layer to form at least one stressed region. An annealing process is performed on the amorphous carbon layer so as to form at least one long-range ordered graphite structure in the at least one stressed region. The at least one long-range ordered graphite structure includes a stack structure including a plurality of (002) planes. An angle between an extension direction of the (002) planes and the surface of the amorphous carbon layer is in a range from 45 degrees or more to 90 degrees or less.

公开(公告)号：US20210282253A1

公开(公告)日：2021-09-09

申请号：US17327783

申请日：2021-05-24

Applicant: Industrial Technology Research Institute

Inventor： Ding-Shiang Wang ,  Jia-Jen Chang ,  Ming-Sheng Leu ,  Tai-Sheng Chen ,  Chin-Te Shih

IPC: H05F3/04 ,  H01L21/673 ,  B65G47/74 ,  C23C14/02 ,  C23C14/14 ,  C23C14/08 ,  C23C14/00 ,  C23C14/32

Abstract: A manufacturing method of the ESD protection device includes the following steps. A surface treatment is performed on the substrate. A link layer is formed on the substrate after the surface treatment, wherein a material of the link layer includes a metal material. A progressive layer is formed on the link layer, wherein a material of the progressive layer includes a non-stoichiometric metal oxide material, and an oxygen concentration in the non-stoichiometric metal oxide material is increased gradually away from the substrate in a thickness direction of the progressive layer. A composite layer is formed on the progressive layer, wherein the composite layer includes a stoichiometric metal oxide material and a non-stoichiometric metal oxide material, and a ratio of the non-stoichiometric metal oxide material and the stoichiometric metal oxide material in the composite layer may make a sheet resistance value of the composite layer 1×107 to 1×108 Ω/sq.

公开(公告)号：US11044798B2

公开(公告)日：2021-06-22

申请号：US16152425

申请日：2018-10-05

Applicant: Industrial Technology Research Institute

Inventor： Ding-Shiang Wang ,  Jia-Jen Chang ,  Ming-Sheng Leu ,  Tai-Sheng Chen ,  Chin-Te Shih

IPC: H05F3/04 ,  H01L21/673 ,  B65G47/74 ,  C23C14/02 ,  C23C14/14 ,  C23C14/08 ,  C23C14/00 ,  C23C14/32

Abstract: An ESD protection composite structure includes a link layer, a progressive layer, and a composite layer. The link layer is used for disposing the ESD protection composite structure on a substrate, wherein a material of the link layer includes a metal material. The progressive layer is disposed on the link layer, wherein the material of the progressive layer includes a non-stoichiometric metal oxide material, and an oxygen concentration in the non-stoichiometric metal oxide material is increased gradually away from the substrate in a thickness direction of the progressive layer. The composite layer is disposed on the progressive layer, wherein the composite layer includes a stoichiometric metal oxide material and a non-stoichiometric metal oxide material, and a ratio of the non-stoichiometric metal oxide material and the stoichiometric metal oxide material in the composite layer may make a sheet resistance value of the composite layer 1×107 Ω/sq to 1×108 Ω/sq.