公开(公告)号：US20150077751A1

公开(公告)日：2015-03-19

申请号：US14144284

申请日：2013-12-30

Applicant: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE

Inventor： Yi-Chen HSIEH ,  Fu-Cheng YANG ,  Chih-Jung CHIANG

IPC: G01N21/21

CPC classification number: G01N21/8422 ,  G01N21/211 ,  G01N2021/213 ,  G01N2021/214

Abstract: An optical inspection system suitable for inspecting a thin film is provided, in which a computer controls a controller to rotate angles of at least two of a polarization device, a phase compensation device and an analyzer at various incident wavelengths and incident angles of a light source, such that the intensities of a first image corresponding to the incident wavelengths and the incident angles of the light source are zero. The computer further records the rotated angles of at least two of the polarization device, the phase compensation device and the analyzer and intensities of a second image corresponding to the incident wavelengths and the incident angles when the intensities of the first image are zero, thereby obtaining a profiling diagram and a maximum intensity of the second images, in which the maximum intensity corresponds to a maximum grey level.

Abstract translation: 提供了一种适用于检查薄膜的光学检查系统，其中计算机控制控制器以偏振装置，相位补偿装置和分析器中的至少两个角度旋转光源的各种入射波长和入射角 使得对应于光源的入射波长和入射角的第一图像的强度为零。 当第一图像的强度为零时，计算机还记录至少两个偏振装置，相位补偿装置和分析器的旋转角度和对应于入射波长和入射角度的第二图像的强度，从而获得 第二图像的分析图和最大强度，其中最大强度对应于最大灰度级。

公开(公告)号：US20250137773A1

公开(公告)日：2025-05-01

申请号：US18539069

申请日：2023-12-13

Applicant: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE

Inventor： Shih-Hsiang LAI ,  Fu-Cheng YANG ,  Fu-Ching TUNG ,  Hsuan-Fu WANG ,  Po-Chun YEH

IPC: G01B11/06 ,  G01N21/21 ,  G01N21/84

Abstract: A film thickness measurement device includes a spectroscopic ellipsometer, and the spectroscopic ellipsometer includes a projection module and a light receiving module. The projection module is configured to project a multi-wavelength polarized light onto a thin film. The projection module includes a light source and a polarization state generator. The light receiving module includes a polarization analyzer and an optical detector. The polarization analyzer is configured to screen out a multi-wavelength polarized reflection light according to reflection of the multi-wavelength polarized light by the thin film. The optical detector is configured to receive the multi-wavelength polarized reflection light. The optical detector includes at least one optical splitting unit, at least two optical filtering units and at least two optical detection units.

公开(公告)号：US20210080252A1

公开(公告)日：2021-03-18

申请号：US16717425

申请日：2019-12-17

Applicant: Industrial Technology Research Institute

Inventor： Chia-Hung CHO ,  Po-Yi CHANG ,  Yi-Sha KU ,  Kai-Ping CHUANG ,  Chih-Hsiang LIU ,  Fu-Cheng YANG

IPC: G01B11/25 ,  G06K9/32 ,  G06T7/521

Abstract: A three-dimension measurement device includes a moving device, a projecting device, a surface-type image-capturing device and a processing device. The moving device carries an object, and moves the object to a plurality of positions. The projecting device generates a first light to the object. The surface-type image-capturing device senses a second light generated by the object in response to the first light to generate a phase image on each of the positions. The processing device is coupled to the surface-type image-capturing device and receives the phase images. The processing device performs a region-of-interest (ROI) operation for the phase images to generate a plurality of ROI images. The processing device performs a multi-step phase-shifting operation for the ROI images to calculate the surface height distribution of the object.