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    Heated electrostatic particle trap for in-situ vacuum line cleaning of a substrated processing
    3.
    发明授权
    Heated electrostatic particle trap for in-situ vacuum line cleaning of a substrated processing 有权
    加热静电颗粒捕集器，用于原位真空管线清洗的底层处理

    公开(公告)号：US06354241B1

    公开(公告)日：2002-03-12

    申请号：US09354925

    申请日：1999-07-15

    申请人： Tsutomu Tanaka ,  Chau Nguyen ,  Hari Ponnekanti ,  Kevin Fairbairn ,  Sébastien Raoux ,  Mark Fodor

    发明人： Tsutomu Tanaka ,  Chau Nguyen ,  Hari Ponnekanti ,  Kevin Fairbairn ,  Sébastien Raoux ,  Mark Fodor

    IPC分类号： C23C1600

    CPC分类号： C23C16/4412 ,  B01D49/00 ,  B01D51/02

    摘要： An apparatus and method for preventing particulate matter and residue build-up within a vacuum exhaust line of a semiconductor-processing device. The apparatus includes a vessel chamber having an inlet, an outlet and a fluid conduit between the two that fluidly couples the outlet with the inlet. The fluid conduit includes first and second collection sections. The first collection section includes a first plurality of electrodes aligned parallel to a first plane and the second collection section includes a second plurality of electrodes aligned parallel to a second plane that is substantially perpendicular to the first plane. The electrodes are connected to a voltage differential to form an electrostatic particle collector that traps electrically charged particles and particulate matter flowing through the fluid conduit. Particles are collected on the electrodes within the fluid conduit during substrate processing operations such as CVD deposition steps. Then, during a chamber clean operation, unreacted etchant gases used to clean the substrate processing chamber are exhausted through the foreline and into the apparatus of the present invention where they react with the collected particles and powder to convert the solid material into gaseous matter that can be pumped through the foreline without damaging the vacuum pump or other processing equipment.

    摘要翻译： 一种用于防止半导体处理装置的真空排气管线内的颗粒物质和残渣积聚的装置和方法。 该装置包括容器腔室，其具有入口，出口和两者之间的流体导管，以使出口与入口流体耦合。 流体导管包括第一和第二收集部分。 第一收集部分包括平行于第一平面排列的第一多个电极，第二收集部分包括平行于基本上垂直于第一平面的第二平面排列的第二多个电极。 电极连接到电压差以形成静电颗粒收集器，其捕获带电粒子和流过流体导管的颗粒物质。 在诸如CVD沉积步骤的衬底处理操作期间，将粒子收集在流体导管内的电极上。 然后，在室清洁操作期间，用于清洁基板处理室的未反应的蚀刻剂气体通过前级管线排出并进入本发明的装置中，它们与收集的颗粒和粉末反应，将固体材料转化成气态物质， 泵送通过前级管线，而不会损坏真空泵或其他加工设备。

    Sanitary seal design and vent using such seal
    4.
    发明授权
    Sanitary seal design and vent using such seal 有权
    卫生密封设计和排气口使用这种密封

    公开(公告)号：US06306191B1

    公开(公告)日：2001-10-23

    申请号：US09438451

    申请日：1999-11-12

    申请人： Kevin G. McInerney ,  Joseph M. Almasian ,  Chau Nguyen

    发明人： Kevin G. McInerney ,  Joseph M. Almasian ,  Chau Nguyen

    IPC分类号： B01D4600

    CPC分类号： B01D46/0004 ,  A61M39/223 ,  A61M2039/224 ,  B01D2271/02

    摘要： A seal, a vent for a filter housing and a system for using them. The seal is designed a first outer seal having a closed outer periphery that divides and isolates a first inner area from the outside environment and a second inner seal formed along a portion of the inner surface of the first outer seal and forming a second inner area within the first inner area and which is isolated from both the first inner area and the outside environment. The seal is incorporated into a vent for a filter housing having opening is contained within a vent area and the opening is offset from the center of the vent area. The opening establishes a fluid pathway from the interior to the exterior of the filter device. The inner seal surrounds the vent opening. The outer seal also surrounds the vent opening at one of its ends and surrounds the entire periphery of the vent area so as to isolate the vent area from the area outside of the vent area. A vent cap is secured at its outer periphery to the outer periphery of the vent area. The cap has an exhaust port which when in alignment with the vent allows fluid to flow out of the housing interior. The exhaust port is offset from the center of the cap and is designed to align with the offset opening of the vent. The cap is either moved in a linear or rotational motion and the vent opening and the cap opening are always contained within the area defined by the outer seal so as to form a sanitary seal. Also disclosed in a sanitary recovery system utilizing the seal and vent of the present invention.

    摘要翻译： 密封件，用于过滤器壳体的通风口和使用它们的系统。密封件被设计为具有封闭的外周边的第一外部密封件，该外部密封件将第一内部区域与外部环境分隔并隔离，并且沿着部分形成第二内部密封件 并且在第一内部区域内形成第二内部区域并且与第一内部区域和外部环境两者隔离。密封件被结合到用于具有开口的过滤器壳体的通风口中 在通气区域内，开口偏离通气区域的中心。 该开口形成从过滤装置的内部到外部的流体路径。 内部密封件围绕通风口。 外部密封件在其一端处围绕通气口，并且围绕通气区域的整个周边，从而将通气区域与通气区域外部区域隔离。 通气盖在其外周边固定到通气区域的外周。 盖具有排气口，当与排气口对准时允许流体流出壳体内部。 排气口从盖的中心偏移并被设计成与通气口的偏移开口对准。 盖子或者以线性或旋转运动移动，并且通风口和盖开口总是包含在由外部密封件限定的区域内，以便形成卫生密封件。还在使用密封件和通风口的卫生回收系统中公开 的本发明。

    APPLICATION OF DEGRADABLE FIBERS IN INVERT EMULSION FLUIDS FOR FLUID LOSS CONTROL
    6.
    发明申请
    APPLICATION OF DEGRADABLE FIBERS IN INVERT EMULSION FLUIDS FOR FLUID LOSS CONTROL 有权
    用于流体流失控制的反相乳液中的可降解纤维的应用

    公开(公告)号：US20100319915A1

    公开(公告)日：2010-12-23

    申请号：US12817977

    申请日：2010-06-17

    申请人： Oscar Bustos ,  Chau Nguyen ,  Syed Ali

    发明人： Oscar Bustos ,  Chau Nguyen ,  Syed Ali

    IPC分类号： E21B43/00 ,  E21B43/16 ,  E21B43/04 ,  E21B43/02 ,  C09K8/506

    CPC分类号： C09K8/502 ,  C09K8/516 ,  C09K2208/08 ,  C09K2208/18

    摘要： A method of treating a subterranean formation including emplacing in a wellbore a fluid, comprising an oleaginous continuous phase, a non-oleaginous discontinuous phase, an emulsifier, at least one degradable material, and at least one bridging material, and contacting the formation with the fluid. A method and apparatus related to an invert emulsion fluid loss pill including an oleaginous continuous phase, a non-oleaginous discontinuous phase, an emulsifier, at least one degradable material, wherein the degradable material hydrolyzes to release an organic acid, and at least one bridging material.

    摘要翻译： 一种处理地下地层的方法，包括在井眼中流体中的放置，包括油性连续相，非油性不连续相，乳化剂，至少一种可降解材料和至少一种桥接材料，并使地层与 流体。 一种与包含油性连续相，非油性不连续相，乳化剂，至少一种可降解材料的反相乳液流体损失丸相关的方法和装置，其中所述可降解材料水解以释放有机酸，以及至少一个桥连 材料。

    Sterile connector
    8.
    发明授权
    Sterile connector 有权
    无菌连接器

    公开(公告)号：US07137974B2

    公开(公告)日：2006-11-21

    申请号：US10626282

    申请日：2003-07-24

    申请人： Joseph M. Almasian ,  Brett M. Belongia ,  Frank Lentine ,  Martin Morrissey ,  Curtis Nauseda ,  Chau Nguyen ,  Stephen Proulx ,  Naren Renganath

    发明人： Joseph M. Almasian ,  Brett M. Belongia ,  Frank Lentine ,  Martin Morrissey ,  Curtis Nauseda ,  Chau Nguyen ,  Stephen Proulx ,  Naren Renganath

    IPC分类号： A61M1/00 ,  F16L37/28 ,  A61B19/00

    CPC分类号： F16L29/007 ,  A61M39/14 ,  A61M39/18 ,  A61M39/22 ,  F16L2201/44 ,  G01N1/2035 ,  G01N2001/205 ,  G01N2001/2071 ,  Y10S604/905 ,  Y10T137/87925

    摘要： A sterile to sterile connection device comprising a connector and one or more coupling devices. The connector has body portion which has two openings sealed from the environment so as to form a sterile environment within the connector. At least one of the openings being sealed from the environment by a sterile barrier plug. The connector also has a port capable movement within the body of the connector to at least an open and a closed position. The coupling device is formed of a body having two openings and a stem having a bore through at least a portion of the stem. The stem is contained within the body and capable of moving at least linearly through the body between a first and second stem position. One of the openings of the stem is sealed from the environment by a sterile barrier plug and the other is sealed to a presterilized component. The coupling device opening containing the sterile barrier plug is attached to either the inlet or outlet of the connector.

    摘要翻译： 一种无菌至无菌连接装置，包括连接器和一个或多个联接装置。 连接器具有主体部分，其具有与环境密封的两个开口，以便在连接器内形成无菌环境。 至少一个开口通过无菌隔离塞与环境密封。 连接器还具有能够在连接器主体内移动至少至少一个打开和关闭位置的端口。 联接装置由具有两个开口的主体和具有穿过杆的至少一部分的孔的杆构成。 杆体容纳在主体内并且能够至少在第一和第二杆位置之间线性移动通过主体。 杆的一个开口通过无菌阻塞塞与环境密封，另一个被密封到预先灭活的部件上。 包含无菌阻塞塞的联接装置开口连接到连接器的入口或出口。

    APPLICATION OF DEGRADABLE FIBERS IN INVERT EMULSION FLUIDS FOR FLUID LOSS CONTROL
    10.
    发明申请
    APPLICATION OF DEGRADABLE FIBERS IN INVERT EMULSION FLUIDS FOR FLUID LOSS CONTROL 审中-公开
    用于流体流失控制的反相乳液中的可降解纤维的应用

    公开(公告)号：US20120202717A1

    公开(公告)日：2012-08-09

    申请号：US13452141

    申请日：2012-04-20

    申请人： Oscar Bustos ,  Chau Nguyen ,  Syed Ali

    发明人： Oscar Bustos ,  Chau Nguyen ,  Syed Ali

    IPC分类号： C09K8/04

    CPC分类号： C09K8/502 ,  C09K8/516 ,  C09K2208/08 ,  C09K2208/18

    摘要： A method of treating a subterranean formation including emplacing in a wellbore a fluid, comprising an oleaginous continuous phase, a non-oleaginous discontinuous phase, an emulsifier, at least one degradable material, and at least one bridging material, and contacting the formation with the fluid. A method and apparatus related to an invert emulsion fluid loss pill including an oleaginous continuous phase, a non-oleaginous discontinuous phase, an emulsifier, at least one degradable material, wherein the degradable material hydrolyzes to release an organic acid, and at least one bridging material.

    摘要翻译： 一种处理地下地层的方法，包括在井眼中流体中的放置，包括油性连续相，非油性不连续相，乳化剂，至少一种可降解材料和至少一种桥接材料，并使地层与 流体。 一种与包含油性连续相，非油性不连续相，乳化剂，至少一种可降解材料的反相乳液流体损失丸相关的方法和装置，其中所述可降解材料水解以释放有机酸，以及至少一个桥连 材料。