公开(公告)号：US20120025333A1

公开(公告)日：2012-02-02

申请号：US13267004

申请日：2011-10-06

Applicant: Junichi YOSHIDA

Inventor： Junichi YOSHIDA

IPC: H01L29/84 ,  H01L21/02

CPC classification number: B81B3/0018 ,  B81B2201/0235 ,  B81B2201/0242 ,  B81B2203/053 ,  B81B2207/095 ,  B81B2207/096 ,  B81C1/00587 ,  B81C2201/0133 ,  B81C2203/0118 ,  G01P15/0802 ,  G01P15/125 ,  G01P2015/0828

Abstract: An acceleration sensor is formed using an etched layer sandwiched between first and second substrates. In this case, a structure including a movable portion which is displaceable in the thickness direction of the substrates, and a support frame are formed in the etched layer. In addition, first and second fixed electrodes are formed on the first and second substrates, respectively, at a position facing the movable portion. Further, a remaining sacrificial layer is provided on the substrate by leaving a portion of a second sacrificial layer when a first sacrificial layer is entirely etched away. Therefore, when the first sacrificial layer is etched away, corrosion of the structure and the support beams is prevented because the second sacrificial layer is preferentially corroded as compared to the structure.

Abstract translation: 使用夹在第一和第二基板之间的蚀刻层形成加速度传感器。 在这种情况下，在蚀刻层中形成有包括可在基板的厚度方向上移动的可动部分和支撑框架的结构。 此外，第一和第二固定电极分别在面对可动部分的位置上形成在第一和第二基板上。 此外，当第一牺牲层被完全蚀刻掉时，通过留下第二牺牲层的一部分，在衬底上提供剩余的牺牲层。 因此，当第一牺牲层被蚀刻掉时，由于与结构相比，第二牺牲层被优先腐蚀，所以防止了结构和支撑梁的腐蚀。

公开(公告)号：US20080241360A1

公开(公告)日：2008-10-02

申请号：US12057079

申请日：2008-03-27

Applicant: Junichi YOSHIDA ,  Seiichi Inoue ,  Jun Yamanobe ,  Manabu Katsumura

Inventor： Junichi YOSHIDA ,  Seiichi Inoue ,  Jun Yamanobe ,  Manabu Katsumura

IPC: B05D5/12 ,  B05C11/00

CPC classification number: H05K3/061 ,  H05K3/0079 ,  H05K2201/0129 ,  H05K2203/013 ,  H05K2203/058 ,  H05K2203/0783 ,  H05K2203/1476

Abstract: A method forms a resin film on a substrate by depositing droplets of resin liquid by an inkjet method. The method includes: a first resin liquid arrangement step of arranging a plurality of droplets of a first resin liquid separately from each other on a substrate in such a manner that the droplets do not make contact with each other; a first resin liquid curing step of curing at least a surface of each of the droplets of the first resin liquid arranged on the substrate; a second resin liquid arrangement step of arranging a plurality of droplets of a second resin liquid at substantially central positions between the droplets of the first resin liquid on the substrate, after the at least the surface of each of the droplets of the first resin liquid is cured; and a second resin liquid curing step of curing the droplets of the second resin liquid arranged on the substrate.

Abstract translation: 一种方法是通过用喷墨方法沉积树脂液滴来在基片上形成树脂膜。 该方法包括：第一树脂液体排列步骤，以使液滴不彼此接触的方式在基板上彼此分离地排列第一树脂液体的多个液滴; 第一树脂液体固化步骤，固化布置在基板上的第一树脂液体的每个液滴的至少一个表面; 第二树脂液体配置步骤，在第一树脂液体的每个液滴的至少表面至少是第一树脂液体的至少表面之后，将第二树脂液体的多个液滴布置在基板上的第一树脂液体的液滴之间的大致中心位置处 治愈 以及第二树脂液体固化步骤，其固化布置在所述基板上的所述第二树脂液体的液滴。