公开(公告)号：US20080241360A1

公开(公告)日：2008-10-02

申请号：US12057079

申请日：2008-03-27

申请人： Junichi YOSHIDA ,  Seiichi Inoue ,  Jun Yamanobe ,  Manabu Katsumura

发明人： Junichi YOSHIDA ,  Seiichi Inoue ,  Jun Yamanobe ,  Manabu Katsumura

IPC分类号： B05D5/12 ,  B05C11/00

CPC分类号： H05K3/061 ,  H05K3/0079 ,  H05K2201/0129 ,  H05K2203/013 ,  H05K2203/058 ,  H05K2203/0783 ,  H05K2203/1476

摘要： A method forms a resin film on a substrate by depositing droplets of resin liquid by an inkjet method. The method includes: a first resin liquid arrangement step of arranging a plurality of droplets of a first resin liquid separately from each other on a substrate in such a manner that the droplets do not make contact with each other; a first resin liquid curing step of curing at least a surface of each of the droplets of the first resin liquid arranged on the substrate; a second resin liquid arrangement step of arranging a plurality of droplets of a second resin liquid at substantially central positions between the droplets of the first resin liquid on the substrate, after the at least the surface of each of the droplets of the first resin liquid is cured; and a second resin liquid curing step of curing the droplets of the second resin liquid arranged on the substrate.

摘要翻译： 一种方法是通过用喷墨方法沉积树脂液滴来在基片上形成树脂膜。 该方法包括：第一树脂液体排列步骤，以使液滴不彼此接触的方式在基板上彼此分离地排列第一树脂液体的多个液滴; 第一树脂液体固化步骤，固化布置在基板上的第一树脂液体的每个液滴的至少一个表面; 第二树脂液体配置步骤，在第一树脂液体的每个液滴的至少表面至少是第一树脂液体的至少表面之后，将第二树脂液体的多个液滴布置在基板上的第一树脂液体的液滴之间的大致中心位置处 治愈 以及第二树脂液体固化步骤，其固化布置在所述基板上的所述第二树脂液体的液滴。

公开(公告)号：US20080174619A1

公开(公告)日：2008-07-24

申请号：US11902910

申请日：2007-09-26

申请人： Manabu Katsumura

发明人： Manabu Katsumura

IPC分类号： B41J29/38

CPC分类号： B01F3/0807 ,  B01F3/0865 ,  B01F15/0203 ,  B01F15/0255 ,  B01F2215/0014

摘要： A dispersion liquid manufacturing apparatus manufactures a dispersion liquid in which fine droplets of a second liquid are dispersed in a first liquid. The dispersion liquid manufacturing apparatus includes: a first liquid accommodating device which accommodates the first liquid; and an ejection head which has an ejection face opposing the first liquid accommodating device, the ejection head being disposed so that the ejection face is separated from a surface of the first liquid in the first liquid accommodating device by a prescribed distance, the ejection head ejecting the fine droplets of the second liquid from the ejection face to the surface of the first liquid through a gas phase between the ejection face and the surface of the first liquid.

摘要翻译： 分散液制造装置制造分散液体，其中第二液体的微小液滴分散在第一液体中。 分散液制造装置包括：容纳第一液体的第一液体容纳装置; 以及喷射头，其具有与第一液体容纳装置相对的喷射面，喷射头被设置成使得喷射面与第一液体容纳装置中的第一液体的表面分离预定距离，喷射头喷射 通过喷射面和第一液体的表面之间的气相，第二液体从喷射面到第一液体的表面的细微液滴。

公开(公告)号：US06787407B2

公开(公告)日：2004-09-07

申请号：US10168139

申请日：2003-01-03

申请人： Osamu Nakamura ,  Manabu Katsumura ,  Shunpei Yamazaki

发明人： Osamu Nakamura ,  Manabu Katsumura ,  Shunpei Yamazaki

IPC分类号： H01L2100

CPC分类号： H01L21/02672 ,  H01L21/2022 ,  H01L21/3226 ,  H01L27/1277 ,  H01L29/4908 ,  H01L29/66757 ,  H01L29/78621 ,  H01L29/78627

摘要： The present invention relates to a method of manufacturing a semiconductor device having an excellent gettering effect. In this method, when phosphorus is added to a poly-Si film, which has been crystallized by the addition of a metal, to subject the resultant poly-Si film to the heat treatment to carry out gettering therefor, the device is performed for the shape of the island-like insulating film on the poly-Si film which is employed when implanting phosphorus. Thereby, the area of the boundary surface between the region to which phosphorus has been added and the region to which no phosphorus has been added is increased to enhance gettering efficiency.

公开(公告)号：US08304015B2

公开(公告)日：2012-11-06

申请号：US12057079

申请日：2008-03-27

申请人： Junichi Yoshida ,  Seiichi Inoue ,  Jun Yamanobe ,  Manabu Katsumura

发明人： Junichi Yoshida ,  Seiichi Inoue ,  Jun Yamanobe ,  Manabu Katsumura

IPC分类号： B28B19/00 ,  B29B15/10 ,  C23C18/00 ,  C23C20/00 ,  C23C24/00 ,  C23C26/00 ,  C23C28/00 ,  C23C30/00 ,  H01C17/06 ,  H05K3/00

CPC分类号： H05K3/061 ,  H05K3/0079 ,  H05K2201/0129 ,  H05K2203/013 ,  H05K2203/058 ,  H05K2203/0783 ,  H05K2203/1476

摘要： A method forms a resin film on a substrate by depositing droplets of resin liquid by an inkjet method. The method includes: a first resin liquid arrangement step of arranging a plurality of droplets of a first resin liquid separately from each other on a substrate in such a manner that the droplets do not make contact with each other; a first resin liquid curing step of curing at least a surface of each of the droplets of the first resin liquid arranged on the substrate; a second resin liquid arrangement step of arranging a plurality of droplets of a second resin liquid at substantially central positions between the droplets of the first resin liquid on the substrate, after the at least the surface of each of the droplets of the first resin liquid is cured; and a second resin liquid curing step of curing the droplets of the second resin liquid arranged on the substrate.

摘要翻译： 一种方法是通过用喷墨方法沉积树脂液滴来在基片上形成树脂膜。 该方法包括：第一树脂液体排列步骤，以使液滴不彼此接触的方式在基板上彼此分离地排列第一树脂液体的多个液滴; 第一树脂液体固化步骤，固化布置在基板上的第一树脂液体的每个液滴的至少一个表面; 第二树脂液体配置步骤，在第一树脂液体的每个液滴的至少表面至少是第一树脂液体的至少表面之后，将第二树脂液体的多个液滴布置在基板上的第一树脂液体的液滴之间的大致中心位置处 治愈 以及第二树脂液体固化步骤，其固化布置在所述基板上的所述第二树脂液体的液滴。

公开(公告)号：US07384860B2

公开(公告)日：2008-06-10

申请号：US10941000

申请日：2004-09-15

申请人： Osamu Nakamura ,  Manabu Katsumura ,  Shunpei Yamazaki

发明人： Osamu Nakamura ,  Manabu Katsumura ,  Shunpei Yamazaki

IPC分类号： H01L21/36 ,  H01L21/20 ,  H01L21/84

CPC分类号： H01L21/02672 ,  H01L21/2022 ,  H01L21/3226 ,  H01L27/1277 ,  H01L29/4908 ,  H01L29/66757 ,  H01L29/78621 ,  H01L29/78627

摘要： The present invention relates to a method of manufacturing a semiconductor device having an excellent gettering effect. In this method, when phosphorus is added to a poly-Si film, which has been crystallized by the addition of a metal, to subject the resultant poly-Si film to the heat treatment to carry out gettering therefor, the device is performed for the shape of the island-like insulating film on the poly-Si film which is employed when implanting phosphorus. Thereby, the area of the boundary surface between the region to which phosphorus has been added and the region to which no phosphorus has been added is increased to enhance gettering efficiency.

摘要翻译： 本发明涉及一种制造具有优异吸气效果的半导体器件的方法。 在这种方法中，当通过添加金属将已经结晶的多晶硅膜加入磷中时，为了进行吸热而使得到的多晶硅膜进行热处理，对于 在植入磷时使用的多晶硅膜上的岛状绝缘膜的形状。 由此，增加了添加了磷的区域与没有添加磷的区域之间的边界面的面积，以提高吸气效率。

公开(公告)号：US20070139483A1

公开(公告)日：2007-06-21

申请号：US11510576

申请日：2006-08-28

申请人： Manabu Katsumura ,  Shinya Sugimoto ,  Tsutomu Yokouchi

发明人： Manabu Katsumura ,  Shinya Sugimoto ,  Tsutomu Yokouchi

IPC分类号： B41J2/045

CPC分类号： B41J2/1433 ,  B41J2/1606 ,  B41J2002/14459 ,  B41J2202/20

摘要： The nozzle plate comprises: a nozzle through which liquid is ejected; a nozzle forming surface in which the nozzle is provided; and a liquid-repellency layer which is provided on the nozzle forming surface, the liquid-repellency layer including a carbon nanotube layer.

摘要翻译： 喷嘴板包括：喷嘴，喷射液体; 喷嘴形成表面，其中设置喷嘴; 以及设置在喷嘴形成表面上的拒水层，所述拒水层包括碳纳米管层。

公开(公告)号：US07607762B2

公开(公告)日：2009-10-27

申请号：US11510576

申请日：2006-08-28

申请人： Manabu Katsumura ,  Shinya Sugimoto ,  Tsutomu Yokouchi

发明人： Manabu Katsumura ,  Shinya Sugimoto ,  Tsutomu Yokouchi

IPC分类号： B41J2/045

CPC分类号： B41J2/1433 ,  B41J2/1606 ,  B41J2002/14459 ,  B41J2202/20

摘要： The nozzle plate comprises: a nozzle through which liquid is ejected; a nozzle forming surface in which the nozzle is provided; and a liquid-repellency layer which is provided on the nozzle forming surface, the liquid-repellency layer including a carbon nanotube layer.

摘要翻译： 喷嘴板包括：喷嘴，喷射液体; 喷嘴形成表面，其中设置喷嘴; 以及设置在喷嘴形成表面上的拒水层，所述拒水层包括碳纳米管层。

公开(公告)号：US20050054181A1

公开(公告)日：2005-03-10

申请号：US10941000

申请日：2004-09-15

申请人： Osamu Nakamura ,  Manabu Katsumura ,  Shunpei Yamazaki

发明人： Osamu Nakamura ,  Manabu Katsumura ,  Shunpei Yamazaki

IPC分类号： H01L21/20 ,  H01L21/322 ,  H01L21/336 ,  H01L29/49 ,  H01L29/786 ,  H01L21/00 ,  H01L21/84

CPC分类号： H01L21/02672 ,  H01L21/2022 ,  H01L21/3226 ,  H01L27/1277 ,  H01L29/4908 ,  H01L29/66757 ,  H01L29/78621 ,  H01L29/78627

摘要： The present invention relates to a method of manufacturing a semiconductor device having an excellent gettering effect. In this method, when phosphorus is added to a poly-Si film, which has been crystallized by the addition of a metal, to subject the resultant poly-Si film to the heat treatment to carry out gettering therefor, the device is performed for the shape of the island-like insulating film on the poly-Si film which is employed when implanting phosphorus. Thereby, the area of the boundary surface between the region to which phosphorus has been added and the region to which no phosphorus has been added is increased to enhance gettering efficiency.

摘要翻译： 本发明涉及一种制造具有优异吸气效果的半导体器件的方法。 在这种方法中，当通过添加金属将已经结晶的多晶硅膜加入磷中时，为了进行吸热而使得到的多晶硅膜进行热处理，对于 在植入磷时使用的多晶硅膜上的岛状绝缘膜的形状。 由此，增加了添加了磷的区域与没有添加磷的区域之间的边界面的面积，以提高吸气效率。

公开(公告)号：US06821827B2

公开(公告)日：2004-11-23

申请号：US09748121

申请日：2000-12-27

申请人： Osamu Nakamura ,  Manabu Katsumura ,  Shunpei Yamazaki

发明人： Osamu Nakamura ,  Manabu Katsumura ,  Shunpei Yamazaki

IPC分类号： H01L2100

CPC分类号： H01L21/02672 ,  H01L21/2022 ,  H01L21/3226 ,  H01L27/1277 ,  H01L29/4908 ,  H01L29/66757 ,  H01L29/78621 ,  H01L29/78627

摘要： The present invention relates to a method of manufacturing a semiconductor device having an excellent gettering effect. In this method, when phosphorus is added to a poly-Si film, which has been crystallized by the addition of a metal, to subject the resultant poly-Si film to the heat treatment to carry out gettering therefor, the device is performed for the shape of the island-like insulating film on the poly-Si film which is employed when implanting phosphorus. Thereby, the area of the boundary surface between the region to which phosphorus has been added and the region to which no phosphorus has been added is increased to enhance gettering efficiency.

摘要翻译： 本发明涉及一种制造具有优异吸气效果的半导体器件的方法。 在这种方法中，当通过添加金属将已经结晶的多晶硅膜加入磷中时，为了进行吸热而使得到的多晶硅膜进行热处理，对于 在植入磷时使用的多晶硅膜上的岛状绝缘膜的形状。 由此，增加了添加了磷的区域与没有添加磷的区域之间的边界面的面积，以提高吸气效率。

公开(公告)号：US20110284158A1

公开(公告)日：2011-11-24

申请号：US13067223

申请日：2011-05-18

申请人： Manabu Katsumura

发明人： Manabu Katsumura

IPC分类号： B32B38/14 ,  B05C5/02

CPC分类号： H05K3/4007 ,  H01L24/11 ,  H01L24/13 ,  H01L24/742 ,  H01L2224/05647 ,  H01L2224/11013 ,  H01L2224/11312 ,  H01L2224/11332 ,  H01L2224/11505 ,  H01L2224/11848 ,  H01L2224/13144 ,  H01L2224/13147 ,  H01L2224/16225 ,  H01L2224/16227 ,  H01L2224/32225 ,  H01L2224/73204 ,  H01L2224/94 ,  H01L2924/01005 ,  H01L2924/01006 ,  H01L2924/01024 ,  H01L2924/01029 ,  H01L2924/01033 ,  H01L2924/01047 ,  H01L2924/01072 ,  H01L2924/01078 ,  H01L2924/01079 ,  H01L2924/14 ,  H01L2924/15787 ,  H01L2924/181 ,  H05K3/125 ,  H05K2201/0367 ,  H05K2203/0285 ,  H05K2203/1476 ,  H01L2224/11 ,  H01L2924/00012 ,  H01L2924/00 ,  H01L2924/00014

摘要： A method of manufacturing a functionally gradient material having a gradient from a first material to a second material different to the first material by ejecting inks onto a base material from a plurality of inkjet heads, includes the steps of: supplying a first functional ink containing the first material to a first inkjet head; supplying a second functional ink containing the second material to a second inkjet head; specifying a ratio between a volume of the first functional ink ejected from the first inkjet head and a volume of the second functional ink ejected from the second inkjet head; causing the first inkjet head to eject the first functional ink and/or causing the second inkjet head to eject the second functional ink, in accordance with the specified ratio, so as to form one layer; and stacking a plurality of layers onto the base material by repeating the forming step, so as to obtain a laminated body, wherein in the control step, the ratio between the first functional ink and the second functional ink is specified in such a manner that respective layers of the plurality of layers progressively have a smaller ratio of the first functional ink and a larger ratio of the second functional ink, toward an upper layer.

摘要翻译： 通过从多个喷墨头喷射墨到基材上，制造具有从第一材料到与第一材料不同的第二材料的梯度的功能梯度材料的方法包括以下步骤：将含有 第一材料到第一喷墨头; 将含有第二材料的第二功能油墨供应到第二喷墨头; 指定从第一喷墨头喷射的第一功能墨水的体积与从第二喷墨头喷射的第二功能墨水的体积之间的比率; 使第一喷墨头按照规定的比例排出第一功能油墨和/或使第二喷墨头喷射第二功能油墨，形成一层; 并且通过重复形成步骤将多个层层叠到基材上，从而获得层压体，其中在控制步骤中，以如下方式指定第一功能油墨和第二功能油墨之间的比例： 多个层的层逐渐地具有较小的第一功能油墨的比例和较大的第二功能油墨的比例朝向上层。