公开(公告)号：US06846600B2

公开(公告)日：2005-01-25

申请号：US10059139

申请日：2002-01-31

申请人： Toshiyuki Ehara ,  Junichiro Hashizume ,  Masaya Kawada ,  Tetsuya Karaki ,  Hironori Ohwaki ,  Kunimasa Kawamura ,  Ryuji Okamura ,  Kazuto Hosoi

发明人： Toshiyuki Ehara ,  Junichiro Hashizume ,  Masaya Kawada ,  Tetsuya Karaki ,  Hironori Ohwaki ,  Kunimasa Kawamura ,  Ryuji Okamura ,  Kazuto Hosoi

IPC分类号： G03G5/08 ,  G03G5/082 ,  G03G5/147 ,  H01L21/311

CPC分类号： G03G5/08221 ,  G03G5/08 ,  G03G5/08214 ,  G03G5/08235 ,  G03G5/08285 ,  G03G5/14704

摘要： A process for producing an electrophotographic photosensitive member comprising the steps of depositing a non-single crystal material composed basically of silicon atoms, on a cylindrical substrate in a deposition chamber, thereafter once taking the substrate with film out of the deposition chamber, then returning it to the deposition chamber, and thereafter again depositing thereon a non-single-crystal material composed basically of carbon atoms. In another embodiment, the process comprises the steps of depositing on a cylindrical substrate a photoconductive layer formed of a non-single crystal material, subjecting to surface processing the deposited film having protrusions present at its surface, and depositing on the processed surface a surface protective layer formed of a non-single-crystal material. Also disclosed is the electrophotographic photosensitive member thus obtained, and an electrophotographic apparatus having that member.

摘要翻译： 一种用于制造电子照相感光构件的方法，包括以下步骤：将沉积室中的基本上由硅原子组成的非单晶材料沉积在圆柱形衬底上，然后一次将基片用薄膜从沉积室中取出，然后返回 然后再沉积到基本上由碳原子组成的非单晶材料上。 在另一个实施方案中，该方法包括以下步骤：在圆柱形基材上沉积由非单晶材料形成的光电导层，对其表面具有突起的沉积膜进行表面处理，并在处理表面上沉积表面 由非单晶材料形成的保护层。 还公开了如此获得的电子照相感光构件和具有该构件的电子照相设备。

公开(公告)号：US20050153223A1

公开(公告)日：2005-07-14

申请号：US10630772

申请日：2003-07-31

申请人： Satoshi Kojima ,  Toshiyuki Ehara ,  Hideaki Matsuoka ,  Junichiro Hashizume ,  Ryuji Okamura ,  Koji Hitsuishi ,  Hironori Ohwaki ,  Kazuto Hosoi

发明人： Satoshi Kojima ,  Toshiyuki Ehara ,  Hideaki Matsuoka ,  Junichiro Hashizume ,  Ryuji Okamura ,  Koji Hitsuishi ,  Hironori Ohwaki ,  Kazuto Hosoi

IPC分类号： G03G5/082 ,  G03G15/04

CPC分类号： G03G5/08221 ,  G03G5/08278

摘要： An electrophotographic photosensitive member production process is provided having the steps of placing a cylindrical substrate having a conductive surface in a first film-forming chamber, and decomposing a source gas with high-frequency power to deposit on the cylindrical substrate a first layer formed of a non-single-crystal material, taking out of the first film-forming chamber the cylindrical substrate with the first layer deposited thereon, and placing the cylindrical substrate with the first layer deposited thereon in a second film-forming chamber, and decomposing a source gas with a high-frequency power to deposit on the first layer a second layer having an upper-part blocking layer formed of a non-single-crystal material. Even where abnormal growth portions called spherical protuberances are present on the photosensitive member surface, they can be made not to appear on images, and image defects can vastly be remedied.

摘要翻译： 提供一种电子照相感光构件制造方法，其具有以下步骤：将具有导电表面的圆柱形基材放置在第一成膜室中，并且以高频电力分解源气体以沉积在圆柱形基板上，形成第一层 非单晶材料，从第一成膜室取出其上沉积有第一层的圆柱形基板，并将其上沉积有第一层的圆柱形基板放置在第二成膜室中，并将源气体 具有高频功率以在第一层上沉积具有由非单晶材料形成的上部阻挡层的第二层。 即使在感光构件表面上存在称为球形隆起物的异常生长部分，也可以使其不会出现在图像上，并且可以大大地补救图像缺陷。

公开(公告)号：US06753123B2

公开(公告)日：2004-06-22

申请号：US10180049

申请日：2002-06-27

申请人： Ryuji Okamura ,  Junichiro Hashizume ,  Kazuto Hosoi

发明人： Ryuji Okamura ,  Junichiro Hashizume ,  Kazuto Hosoi

IPC分类号： G03G5082

CPC分类号： G03G5/08214 ,  G03G5/0433 ,  G03G5/08278 ,  G03G5/08285

摘要： A process for manufacturing an electrophotographic photosensitive member is disclosed in which a source gas is decomposed by the use of a high-frequency power in a rector to deposit sequentially on a conductive substrate i) a photoconductive layer comprised of an amorphous material composed chiefly of silicon atoms and ii) a surface layer comprised of an amorphous material composed chiefly of carbon atoms and containing hydrogen atoms. The process has the steps of forming the photoconductive layer in a first reactor, and forming the surface layer in a second reactor. This process can produce an electrophotographic photosensitive member having an a-Si photoconductive layer and a-C:H surface layer or a-C:H(Si) surface layer in a good efficiency and at a low cost. Also disclosed is an electrophotographic photosensitive member manufacturing apparatus which carries out the process.

摘要翻译： 公开了一种用于制造电子照相感光构件的方法，其中通过在反射器中使用高频电源来分解源气体以顺序地沉积在导电衬底上i）由主要由硅构成的非晶材料构成的光电导层 原子和ii）由主要由碳原子组成且含有氢原子的无定形材料构成的表面层。 该方法具有在第一反应器中形成光电导层并在第二反应器中形成表面层的步骤。 该方法可以以高效率和低成本生产具有a-Si光电导层和a-C：H表面层或a-C：H（Si）表面层的电子照相感光构件。 还公开了一种进行该方法的电照相感光构件制造装置。

公开(公告)号：US06645688B2

公开(公告)日：2003-11-11

申请号：US09987507

申请日：2001-11-15

申请人： Junichiro Hashizume ,  Ryuji Okamura ,  Kazuto Hosoi

发明人： Junichiro Hashizume ,  Ryuji Okamura ,  Kazuto Hosoi

IPC分类号： G03G1504

CPC分类号： G03G5/14704 ,  G03G5/08285 ,  G03G9/0827 ,  G03G9/0835 ,  G03G9/09708

摘要： In an image-forming apparatus having at least i) an electrophotographic photosensitive member having at least a photoconductive layer and a surface layer on a conductive substrate, ii) a developing means having a toner, and iii) a charging means, the photoconductive layer comprises a non-single-crystal material composed chiefly of silicon, the surface layer comprises a non-single-crystal carbon film containing at least hydrogen and has an arithmetic-mean roughness Ra ranging from 0 nm to 100 nm in an extent of 10 &mgr;m×10 &mgr;m of the surface layer, the charging mean is a magnetic-brush charging assembly or an elastic-roller charging assembly holding thereon a conductive fine powder, and the toner is a magnetic toner having toner particles containing at least a binder resin and a magnetic material, and an inorganic fine powder, having an average circularity of from 0.950 to 1.000, and having a saturation magnetization of from 10 to 50 Am2/kg (emu/g) under application of a magnetic field of 79.6 kA/m (1,000 oersteds). Also disclosed is an image-forming method.

摘要翻译： 在具有至少i）至少具有光电导层和导电基底上的表面层的电子照相感光构件的图像形成装置中，ii）具有调色剂的显影装置，以及iii）充电装置，所述光电导层包括 主要由硅构成的非单晶材料，该表面层包含至少含有氢的非单晶碳膜，其运算平均粗糙度Ra为0nm至100nm，范围为10mum×10um 的充电装置是一个磁刷充电组件或一个保持导电细粉末的弹性辊充电组件，调色剂是具有至少含有粘合剂树脂和磁性材料的调色剂颗粒的磁性调色剂， 和平均圆形度为0.950〜1.000，在施加磁场时具有10〜50Am 2 / kg（emu / g）的饱和磁化强度的无机细粉末 为79.6 kA / m（1,000奥斯特）。 还公开了一种成像方法。

公开(公告)号：US06576387B2

公开(公告)日：2003-06-10

申请号：US09987228

申请日：2001-11-14

申请人： Junichiro Hashizume ,  Ryuji Okamura ,  Kazuto Hosoi

发明人： Junichiro Hashizume ,  Ryuji Okamura ,  Kazuto Hosoi

IPC分类号： G03G1504

CPC分类号： G03G9/0835 ,  G03G5/08214 ,  G03G5/08221 ,  G03G5/14704 ,  G03G9/0827

摘要： In an image-forming apparatus having at least i) an electrophotographic photosensitive member having at least a photoconductive layer and a surface layer on a conductive substrate, ii) a developing means having a toner, and iii) a charging means, the photoconductive layer comprises a non-single-crystal material composed chiefly of silicon, the surface layer comprises a non-single-crystal carbon film containing at least hydrogen and has a dynamic hardness in the range of from 4.90×109 to 1.76×1010 Pa (500 to 1,800 kgf/mm2), the charging means has a charging member kept in contact with the electrophotographic photosensitive member, forming a contact zone therewith, charges the electrophotographic photosensitive member electrostatically upon application of a voltage, and the toner is a magnetic toner having toner particles containing at least a binder resin and a magnetic material, and an inorganic fine powder, having an average circularity of from 0.950 to 1.000, and having a saturation magnetization of from 10 to 50 Am2/kg (emu/g) under application of a magnetic field of 79.6 kA/m (1,000 oersteds). Also disclosed is an image-forming method.

公开(公告)号：US07033717B2

公开(公告)日：2006-04-25

申请号：US10630772

申请日：2003-07-31

申请人： Satoshi Kojima ,  Toshiyuki Ehara ,  Hideaki Matsuoka ,  Junichiro Hashizume ,  Ryuji Okamura ,  Koji Hitsuishi ,  Hironori Ohwaki ,  Kazuto Hosoi

发明人： Satoshi Kojima ,  Toshiyuki Ehara ,  Hideaki Matsuoka ,  Junichiro Hashizume ,  Ryuji Okamura ,  Koji Hitsuishi ,  Hironori Ohwaki ,  Kazuto Hosoi

IPC分类号： G03G15/04

CPC分类号： G03G5/08221 ,  G03G5/08278

摘要： An electrophotographic photosensitive member production process is provided having the steps of placing a cylindrical substrate having a conductive surface in a first film-forming chamber, and decomposing a source gas with high-frequency power to deposit on the cylindrical substrate a first layer formed of a non-single-crystal material, taking out of the first film-forming chamber the cylindrical substrate with the first layer deposited thereon, and placing the cylindrical substrate with the first layer deposited thereon in a second film-forming chamber, and decomposing a source gas with a high-frequency power to deposit on the first layer a second layer having an upper-part blocking layer formed of a non-single-crystal material. Even where abnormal growth portions called spherical protuberances are present on the photosensitive member surface, they can be made not to appear on images, and image defects can vastly be remedied.

摘要翻译： 提供一种电子照相感光构件制造方法，其具有以下步骤：将具有导电表面的圆柱形基材放置在第一成膜室中，并且以高频电力分解源气体以沉积在圆柱形基板上，形成第一层 非单晶材料，从第一成膜室取出其上沉积有第一层的圆柱形基板，并将其上沉积有第一层的圆柱形基板放置在第二成膜室中，并将源气体 具有高频功率以在第一层上沉积具有由非单晶材料形成的上部阻挡层的第二层。 即使在感光构件表面上存在称为球形隆起物的异常生长部分，也可以使其不会出现在图像上，并且可以大大地补救图像缺陷。

公开(公告)号：US07033721B2

公开(公告)日：2006-04-25

申请号：US10630727

申请日：2003-07-31

申请人： Junichiro Hashizume ,  Toshiyuki Ehara ,  Hideaki Matsuoka ,  Ryuji Okamura ,  Koji Hitsuishi ,  Satoshi Kojima ,  Hironori Ohwaki ,  Kazuto Hosoi

发明人： Junichiro Hashizume ,  Toshiyuki Ehara ,  Hideaki Matsuoka ,  Ryuji Okamura ,  Koji Hitsuishi ,  Satoshi Kojima ,  Hironori Ohwaki ,  Kazuto Hosoi

IPC分类号： G03G5/082 ,  C23C16/22

CPC分类号： G03G5/08 ,  G03G5/08214 ,  G03G5/08221 ,  G03G5/08235 ,  G03G5/14704

摘要： The invention provides a method for producing an electrophotographic photosensitive member such that even if abnormal grown portions called spherical protrusions 203 exist on the surface of the photosensitive member, they do not appear on images, thus making it possible to considerably alleviate image defects. The method for producing the electrophotographic photosensitive member including layers each constituted by a non-single crystal material includes the steps of placing a substrate having a conductive surface in a film forming apparatus capable of being airtight-sealed under vacuum having evacuating means and raw material gas supplying means, and decomposing at least a raw material gas by a high frequency power to form a first layer constituted by at least a non-single crystal material on the substrate as a first step; exposing the substrate with the first layer formed thereon to a gas containing oxygen and water vapor as a second step; and decomposing at least a raw material gas by a high frequency power in the film forming apparatus to form on the first layer a second layer including an upper blocking layer constituted by a non-single crystal material as a third step.

摘要翻译： 本发明提供了一种用于制造电子照相感光构件的方法，即使在感光构件的表面上存在称为球形突起203的异常生长部分，它们也不会出现在图像上，从而可以显着地减轻图像缺陷。 用于制造包括由非单晶材料构成的电子照相感光构件的方法包括以下步骤：将具有导电表面的基底放置在能够在具有抽真空装置和原料气体的真空下气密密封的成膜装置中 供给装置，并且通过高频功率分解至少原料气体，以形成由至少非单晶材料构成的第一层作为第一步骤; 作为第二步，将其上形成有第一层的基板暴露于含有氧和水蒸汽的气体; 并且在成膜装置中通过高频功率分解至少一种原料气体，以在第一层上形成包括由非单晶材料构成的上阻挡层的第二层作为第三步骤。

公开(公告)号：US06635397B2

公开(公告)日：2003-10-21

申请号：US10127593

申请日：2002-04-23

申请人： Ryuji Okamura ,  Junichiro Hashizume ,  Kazuto Hosoi

发明人： Ryuji Okamura ,  Junichiro Hashizume ,  Kazuto Hosoi

IPC分类号： G03G508

CPC分类号： G03G5/102 ,  G03G5/08214 ,  G03G5/08235 ,  G03G5/0825 ,  G03G5/144 ,  G03G5/14704

摘要： A negative-charging electrophotographic photosensitive member comprising an aluminum-based substrate and a silicate film and a light-receiving layer in this order. The silicate film has a layer thickness of 0.5 nm to 15 nm and comprises at least aluminum atoms, silicon atoms and oxygen atoms. The light-receiving layer has at least a lower-part charge injection blocking layer formed of a non-single crystal silicon film comprising at least silicon atoms, nitrogen atoms and oxygen atoms, not doped with any impurities, a photoconductive layer formed of a non-single crystal silicon film comprising at least silicon atoms, an upper-part charge injection blocking layer formed of a non-single crystal silicon film comprising at least silicon atoms, carbon atoms and atoms belonging to the Group 13 of the periodic table, and a surface protective layer formed of a non-single crystal silicon film comprising at least silicon atoms and containing carbon atoms.

摘要翻译： 一种负电荷照相感光构件，其依次包括铝基基底和硅酸盐膜和光接收层。 硅酸盐膜具有0.5nm至15nm的层厚度，并且至少包含铝原子，硅原子和氧原子。 光接收层至少具有由不掺杂任何杂质的至少包含硅原子，氮原子和氧原子的非单晶硅膜形成的下部电荷注入阻挡层，由非 - - 至少包含硅原子的单晶硅膜，由至少包含硅原子，碳原子和属于周期表第13族的原子的非单晶硅膜形成的上部电荷注入阻挡层，以及 表面保护层由至少包含硅原子并含有碳原子的非单晶硅膜形成。

公开(公告)号：US06350497B1

公开(公告)日：2002-02-26

申请号：US09616989

申请日：2000-07-14

申请人： Hitoshi Murayama ,  Toshiyasu Shirasuna ,  Ryuji Okamura ,  Kazuyoshi Akiyama ,  Takashi Ohtsuka ,  Kazuto Hosoi

发明人： Hitoshi Murayama ,  Toshiyasu Shirasuna ,  Ryuji Okamura ,  Kazuyoshi Akiyama ,  Takashi Ohtsuka ,  Kazuto Hosoi

IPC分类号： H05H124

CPC分类号： H01J37/32082 ,  C23C16/4588 ,  C23C16/509 ,  H01J37/32532 ,  H01L31/202 ,  Y02E10/50 ,  Y02P70/521

摘要： For permitting increase in productivity and improvement in uniformity and reproducibility of characteristics of deposited films while maintaining good film characteristics, a plasma processing apparatus is constructed in such structure that a plurality of cylindrical substrates are set in a depressurizable reaction vessel and that a source gas supplied into the reaction vessel is decomposed by a high frequency power introduced from a high frequency power introducing means to generate a plasma to permit deposited film formation, etching, or surface modification on the cylindrical substrates, wherein the plurality of cylindrical substrates are placed at equal intervals on the same circumference and wherein the high frequency power introducing means is provided outside the placing circumference for the cylindrical substrates.

摘要翻译： 为了在保持良好的膜特性的同时提高生产率和提高沉积膜的特性的均匀性和再现性，等离子体处理装置被构造成使得多个圆柱形基板被设置在可降压反应容器中并且提供源气体 通过从高频功率引入装置引入的高频功率分解到反应容器中以产生等离子体以允许在圆柱形基板上沉积膜形成，蚀刻或表面改性，其中多个圆柱形基板以等间隔放置 并且其中高频功率引入装置设置在用于圆柱形基板的放置圆周的外侧。

公开(公告)号：US6155201A

公开(公告)日：2000-12-05

申请号：US157933

申请日：1998-09-22

申请人： Hitoshi Murayama ,  Toshiyasu Shirasuna ,  Ryuji Okamura ,  Kazuyoshi Akiyama ,  Takashi Ohtsuka ,  Kazuto Hosoi

发明人： Hitoshi Murayama ,  Toshiyasu Shirasuna ,  Ryuji Okamura ,  Kazuyoshi Akiyama ,  Takashi Ohtsuka ,  Kazuto Hosoi

IPC分类号： G03G5/08 ,  C23C16/00 ,  C23C16/458 ,  C23C16/509 ,  H01J37/32 ,  H01L21/205 ,  H01L21/285 ,  H01L31/20

CPC分类号： H01J37/32082 ,  C23C16/4588 ,  C23C16/509 ,  H01J37/32532 ,  H01L31/202 ,  Y02E10/50 ,  Y02P70/521

摘要： For permitting increase in productivity and improvement in uniformity and reproducibility of characteristics of deposited films while maintaining good film characteristics, a plasma processing apparatus is constructed in such structure that a plurality of cylindrical substrates are set in a depressurizable reaction vessel and that a source gas supplied into the reaction vessel is decomposed by a high frequency power introduced from a high frequency power introducing means to generate a plasma to permit deposited film formation, etching, or surface modification on the cylindrical substrates, wherein the plurality of cylindrical substrates are placed at equal intervals on the same circumference and wherein the high frequency power introducing means is provided outside the placing circumference for the cylindrical substrates.

摘要翻译： 为了在保持良好的膜特性的同时提高生产率和提高沉积膜的特性的均匀性和再现性，等离子体处理装置被构造成使得多个圆柱形基板被设置在可降压反应容器中并且提供源气体 通过从高频功率引入装置引入的高频功率分解到反应容器中以产生等离子体以允许在圆柱形基板上沉积膜形成，蚀刻或表面改性，其中多个圆柱形基板以等间隔放置 并且其中高频功率引入装置设置在用于圆柱形基板的放置圆周的外侧。