DEVICE AND METHOD FOR ANALYZING DEFECTS BY USING HEAT DISTRIBUTION MEASUREMENT
    1.
    发明申请
    DEVICE AND METHOD FOR ANALYZING DEFECTS BY USING HEAT DISTRIBUTION MEASUREMENT 有权
    使用热分布测量分析缺陷的装置和方法

    公开(公告)号:US20150316496A1

    公开(公告)日:2015-11-05

    申请号:US14647772

    申请日:2013-11-26

    CPC classification number: G01N25/72 H01L22/12

    Abstract: The present invention provides a method for analyzing defects by using heat distribution measurement, comprising: a sample loading unit for loading a sample to check whether or not there is a defect through heat distribution characteristics; a light source for radiating visible light onto the sample; a power supply unit for generating a driving signal in order to periodically heat the sample; a detection unit for detecting reflected light from the surface of the sample; and a signal generator for synchronizing the detection unit with the driving signal of the power supply unit.

    Abstract translation: 本发明提供一种通过使用热分布测量来分析缺陷的方法,包括:样品加载单元,用于加载样品以通过热分布特性检查是否存在缺陷; 用于将可见光辐射到样品上的光源; 用于产生驱动信号以便周期性地加热样品的电源单元; 用于检测来自所述样品表面的反射光的检测单元; 以及用于使检测单元与电源单元的驱动信号同步的信号发生器。

    IMAGING SYSTEM USING OPTICAL FIBER ARRAY INTEGRATED WITH LENSES
    2.
    发明申请
    IMAGING SYSTEM USING OPTICAL FIBER ARRAY INTEGRATED WITH LENSES 审中-公开
    使用与镜片集成的光纤阵列的成像系统

    公开(公告)号:US20130146754A1

    公开(公告)日:2013-06-13

    申请号:US13708388

    申请日:2012-12-07

    Abstract: Provided is an imaging system using an optical fiber array probe integrated with lenses for emitting light transmitted from a light source to a sample, and guiding light generated from the sample. The imaging system includes an optical fiber array probe integrated with lenses including an optical fiber lens with a lens surface of a predetermined radius of curvature in which one ends of two optical fibers are integrally connected with each other by heating a predetermined region including the one ends of the two optical fibers using a heating means. Therefore, a compact imaging system may be realized while effectively improving optical coupling efficiency through a simple manufacturing process.

    Abstract translation: 提供了一种使用与透镜集成的光纤阵列探针的成像系统,用于发射从光源向样本透射的光,并且引导从样品产生的光。 成像系统包括与透镜组合的光纤阵列探针,该透镜包括具有预定曲率半径的透镜表面的光纤透镜,其中两个光纤的一端通过加热包括一端的预定区域而彼此一体地连接 的两根光纤。 因此,可以通过简单的制造过程有效地提高光耦合效率,实现紧凑的成像系统。

    Optical fiber array probe imaging system integrated with endoscope
    4.
    发明授权
    Optical fiber array probe imaging system integrated with endoscope 有权
    光纤阵列探头成像系统与内窥镜相结合

    公开(公告)号:US08700135B2

    公开(公告)日:2014-04-15

    申请号:US13708329

    申请日:2012-12-07

    Abstract: Provided is an imaging system which includes an optical fiber array probe unit integrated with an endoscope unit, thereby simultaneously measuring structural information and functional information of a sample. The optical fiber array probe unit includes an optical fiber array probe integrated with lenses including an optical fiber lens with a lens surface of a predetermined radius of curvature in which one ends of optical fibers are integrally connected with each other by heating a predetermined region including the one ends of two of the optical fibers using a heating means, as an optical fiber array probe integrated lens on which the light transmitted from the light source is incident and which guides light reflected from the sample, and a detector for selectively detecting the light transmitted from the optical fiber array probe integrated with lenses in a predetermined range of wavelength.

    Abstract translation: 提供了一种成像系统,其包括与内窥镜单元集成的光纤阵列探针单元,从而同时测量样品的结构信息和功能信息。 光纤阵列探针单元包括与透镜组合的光纤阵列探针,该透镜包括具有预定曲率半径的透镜表面的光纤透镜,其中光纤的一端通过加热包括 使用加热装置的两根光纤的一端作为光纤阵列探针集成透镜,其中从光源透射的光入射到该光纤阵列探针集成透镜,并且其引导从样品反射的光;以及检测器,用于选择性地检测透射的光 从与预定波长范围的透镜集成的光纤阵列探针。

    OPTICAL FIBER ARRAY PROBE IMAGING SYSTEM INTEGRATED WITH ENDOSCOPE
    5.
    发明申请
    OPTICAL FIBER ARRAY PROBE IMAGING SYSTEM INTEGRATED WITH ENDOSCOPE 有权
    光纤阵列探头成像系统与内窥镜整合

    公开(公告)号:US20130150731A1

    公开(公告)日:2013-06-13

    申请号:US13708329

    申请日:2012-12-07

    Abstract: Provided is an imaging system which includes an optical fiber array probe unit integrated with an endoscope unit, thereby simultaneously measuring structural information and functional information of a sample. The optical fiber array probe unit includes an optical fiber array probe integrated with lenses including an optical fiber lens with a lens surface of a predetermined radius of curvature in which one ends of optical fibers are integrally connected with each other by heating a predetermined region including the one ends of two of the optical fibers using a heating means, as an optical fiber array probe integrated lens on which the light transmitted from the light source is incident and which guides light reflected from the sample, and a detector for selectively detecting the light transmitted from the optical fiber array probe integrated with lenses in a predetermined range of wavelength.

    Abstract translation: 提供了一种成像系统,其包括与内窥镜单元集成的光纤阵列探针单元,从而同时测量样品的结构信息和功能信息。 光纤阵列探针单元包括与透镜组合的光纤阵列探针,该透镜包括具有预定曲率半径的透镜表面的光纤透镜,其中光纤的一端通过加热包括 使用加热装置的两根光纤的一端作为光纤阵列探针集成透镜,其中从光源透射的光入射到该光纤阵列探针集成透镜,并且其引导从样品反射的光;以及检测器,用于选择性地检测透射的光 从与预定波长范围的透镜集成的光纤阵列探针。

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