公开(公告)号：US09093576B2

公开(公告)日：2015-07-28

申请号：US14056915

申请日：2013-10-17

Applicant: KOREA BASIC SCIENCE INSTITUTE

Inventor： Ki Soo Chang ,  Geon Hee Kim ,  Sun Cheol Yang ,  Hyo Sik Kim

IPC: H01L21/00 ,  H01L31/0232 ,  B29D11/00 ,  H01L27/146 ,  H01L31/18

CPC classification number: H01L31/0232 ,  B29D11/00365 ,  B29D11/00807 ,  H01L27/14627 ,  H01L27/14685 ,  H01L31/02327 ,  H01L31/18

Abstract: The present invention relates to an image sensor comprising a microlens array, and to a manufacturing method thereof. The method of the present invention includes gradually increasing the aluminum composition ratio of a compound semiconductor as the latter gradually gets farther from a substrate, to enable a microlens-forming layer to grow, and making the oxidation rate of the region adjacent to the substrate slower and the oxidation rate of the region farther from the substrate faster, making the interface between the oxidized region and the unoxidized region into a lens shape after the completion of oxidation. The thus-made lens is integrated into an image sensor. The present invention reduces costs for manufacturing image sensors in which a microlens is integrated, increases the signal-to-noise ratio and resolution of the image sensor, and achieves improved sensitivity.

Abstract translation: 本发明涉及一种包括微透镜阵列的图像传感器及其制造方法。 本发明的方法包括逐渐增加化合物半导体的铝组成比，随着后者从衬底逐渐变得越远，以使微透镜形成层生长，并且使与邻近衬底的区域的氧化速率变慢 并且距离衬底更远的区域的氧化速率更快，使氧化区域和未氧化区域之间的界面在氧化完成后成为透镜形状。 这样制成的镜头被集成到图像传感器中。 本发明降低了其中集成微透镜的图像传感器的制造成本，增加了图像传感器的信噪比和分辨率，并且实现了改进的灵敏度。

公开(公告)号：US20130146754A1

公开(公告)日：2013-06-13

申请号：US13708388

申请日：2012-12-07

Applicant: Korea Basic Science Institute

Inventor： Ki Soo Chang ,  Seon Young Ryu ,  Sun Cheol Yang ,  Geon Hee Kim ,  Hae Young Choi

IPC: G01J1/42 ,  G01J1/04

CPC classification number: G01J1/42 ,  A61B5/0062 ,  A61B5/0071 ,  A61B5/0084 ,  G01J1/0488 ,  G01J3/0218 ,  G01J3/4406 ,  G01N21/645 ,  G01N2021/6484 ,  G02B6/2552 ,  G02B6/262

Abstract: Provided is an imaging system using an optical fiber array probe integrated with lenses for emitting light transmitted from a light source to a sample, and guiding light generated from the sample. The imaging system includes an optical fiber array probe integrated with lenses including an optical fiber lens with a lens surface of a predetermined radius of curvature in which one ends of two optical fibers are integrally connected with each other by heating a predetermined region including the one ends of the two optical fibers using a heating means. Therefore, a compact imaging system may be realized while effectively improving optical coupling efficiency through a simple manufacturing process.

Abstract translation: 提供了一种使用与透镜集成的光纤阵列探针的成像系统，用于发射从光源向样本透射的光，并且引导从样品产生的光。 成像系统包括与透镜组合的光纤阵列探针，该透镜包括具有预定曲率半径的透镜表面的光纤透镜，其中两个光纤的一端通过加热包括一端的预定区域而彼此一体地连接 的两根光纤。 因此，可以通过简单的制造过程有效地提高光耦合效率，实现紧凑的成像系统。

公开(公告)号：US08700135B2

公开(公告)日：2014-04-15

申请号：US13708329

申请日：2012-12-07

Applicant: Korea Basic Science Institute

Inventor： Ki Soo Chang ,  Seon Young Ryu ,  Sun Cheol Yang ,  Geon Hee Kim ,  Hae Young Choi

IPC: A61B6/00

CPC classification number: A61B1/07 ,  A61B1/00096 ,  A61B1/0011 ,  A61B1/00167 ,  A61B5/0071

Abstract: Provided is an imaging system which includes an optical fiber array probe unit integrated with an endoscope unit, thereby simultaneously measuring structural information and functional information of a sample. The optical fiber array probe unit includes an optical fiber array probe integrated with lenses including an optical fiber lens with a lens surface of a predetermined radius of curvature in which one ends of optical fibers are integrally connected with each other by heating a predetermined region including the one ends of two of the optical fibers using a heating means, as an optical fiber array probe integrated lens on which the light transmitted from the light source is incident and which guides light reflected from the sample, and a detector for selectively detecting the light transmitted from the optical fiber array probe integrated with lenses in a predetermined range of wavelength.

Abstract translation: 提供了一种成像系统，其包括与内窥镜单元集成的光纤阵列探针单元，从而同时测量样品的结构信息和功能信息。 光纤阵列探针单元包括与透镜组合的光纤阵列探针，该透镜包括具有预定曲率半径的透镜表面的光纤透镜，其中光纤的一端通过加热包括 使用加热装置的两根光纤的一端作为光纤阵列探针集成透镜，其中从光源透射的光入射到该光纤阵列探针集成透镜，并且其引导从样品反射的光;以及检测器，用于选择性地检测透射的光 从与预定波长范围的透镜集成的光纤阵列探针。

公开(公告)号：US20140042579A1

公开(公告)日：2014-02-13

申请号：US14056915

申请日：2013-10-17

Applicant: KOREA BASIC SCIENCE INSTITUTE

Inventor： Ki Soo Chang ,  Geon Hee Kim ,  Sun Cheol Yang ,  Hyo Sik Kim

IPC: H01L31/0232 ,  H01L31/18

CPC classification number: H01L31/0232 ,  B29D11/00365 ,  B29D11/00807 ,  H01L27/14627 ,  H01L27/14685 ,  H01L31/02327 ,  H01L31/18

Abstract: The present invention relates to an image sensor comprising a microlens array, and to a manufacturing method thereof. The method of the present invention includes gradually increasing the aluminum composition ratio of a compound semiconductor as the latter gradually gets farther from a substrate, to enable a microlens-forming layer to grow, and making the oxidation rate of the region adjacent to the substrate slower and the oxidation rate of the region farther from the substrate faster, making the interface between the oxidized region and the unoxidized region into a lens shape after the completion of oxidation. The thus-made lens is integrated into an image sensor. The present invention reduces costs for manufacturing image sensors in which a microlens is integrated, increases the signal-to-noise ratio and resolution of the image sensor, and achieves improved sensitivity.

Abstract translation: 本发明涉及一种包括微透镜阵列的图像传感器及其制造方法。 本发明的方法包括逐渐增加化合物半导体的铝组成比，随着后者从衬底逐渐变得越远，以使微透镜形成层生长，并且使与邻近衬底的区域的氧化速率变慢 并且距离衬底更远的区域的氧化速率更快，使氧化区域和未氧化区域之间的界面在氧化完成后成为透镜形状。 这样制成的镜头被集成到图像传感器中。 本发明降低了其中集成微透镜的图像传感器的制造成本，增加了图像传感器的信噪比和分辨率，并且实现了改进的灵敏度。

公开(公告)号：US20130150731A1

公开(公告)日：2013-06-13

申请号：US13708329

申请日：2012-12-07

Applicant: KOREA BASIC SCIENCE INSTITUTE

Inventor： Ki Soo Chang ,  Seon Young Ryu ,  Sun Cheol Yang ,  Geon Hee Kim ,  Hae Young Choi

IPC: A61B1/07 ,  A61B5/00

CPC classification number: A61B1/07 ,  A61B1/00096 ,  A61B1/0011 ,  A61B1/00167 ,  A61B5/0071

Abstract: Provided is an imaging system which includes an optical fiber array probe unit integrated with an endoscope unit, thereby simultaneously measuring structural information and functional information of a sample. The optical fiber array probe unit includes an optical fiber array probe integrated with lenses including an optical fiber lens with a lens surface of a predetermined radius of curvature in which one ends of optical fibers are integrally connected with each other by heating a predetermined region including the one ends of two of the optical fibers using a heating means, as an optical fiber array probe integrated lens on which the light transmitted from the light source is incident and which guides light reflected from the sample, and a detector for selectively detecting the light transmitted from the optical fiber array probe integrated with lenses in a predetermined range of wavelength.

Abstract translation: 提供了一种成像系统，其包括与内窥镜单元集成的光纤阵列探针单元，从而同时测量样品的结构信息和功能信息。 光纤阵列探针单元包括与透镜组合的光纤阵列探针，该透镜包括具有预定曲率半径的透镜表面的光纤透镜，其中光纤的一端通过加热包括 使用加热装置的两根光纤的一端作为光纤阵列探针集成透镜，其中从光源透射的光入射到该光纤阵列探针集成透镜，并且其引导从样品反射的光;以及检测器，用于选择性地检测透射的光 从与预定波长范围的透镜集成的光纤阵列探针。