公开(公告)号：US06316368B1

公开(公告)日：2001-11-13

申请号：US09286080

申请日：1999-04-05

申请人： Kwang-Ming Lin ,  Tzu-Min Peng ,  Chieh-Te Chen ,  Pang-Miao Liu

发明人： Kwang-Ming Lin ,  Tzu-Min Peng ,  Chieh-Te Chen ,  Pang-Miao Liu

IPC分类号： H01L21302

CPC分类号： H01L21/31144 ,  H01L21/0332 ,  H01L21/76804 ,  H01L21/76838

摘要： A method of fabricating a node contact opening is described. A dielectric layer is formed on a substrate. A first conductive layer is formed on the dielectric layer. The first conductive layer is etched to form a trapezoidally cross-sectioned opening exposing a portion of the dielectric layer. The dielectric layer exposed by the trapezoidally cross-sectioned opening is etched to form a node contact opening in the dielectric layer exposing a part the substrate. A second conductive layer is formed to fill the node contact opening and in contact with the conductive layer.

摘要翻译： 描述了制造节点接触开口的方法。 在基板上形成电介质层。 在介电层上形成第一导电层。 蚀刻第一导电层以形成暴露电介质层的一部分的梯形截面的开口。 蚀刻由梯形截面的开口暴露的电介质层，以在电介质层中形成露出衬底部分的节点接触开口。 形成第二导电层以填充节点接触开口并与导电层接触。

公开(公告)号：US08835324B2

公开(公告)日：2014-09-16

申请号：US13174875

申请日：2011-07-01

申请人： Chieh-Te Chen ,  Yi-Po Lin ,  Feng-Yih Chang ,  Chih-Wen Feng ,  Shang-Yuan Tsai

发明人： Chieh-Te Chen ,  Yi-Po Lin ,  Feng-Yih Chang ,  Chih-Wen Feng ,  Shang-Yuan Tsai

IPC分类号： H01L21/311 ,  H01L21/768

CPC分类号： H01L21/31144 ,  H01L21/76816

摘要： In an exemplary method for forming contact holes, a substrate overlaid with an etching stop layer and an interlayer dielectric layer in that order is firstly provided. A first etching process then is performed to form at least a first contact opening in the interlayer dielectric layer. A first carbon-containing dielectric layer subsequently is formed overlying the interlayer dielectric layer and filling into the first contact opening. After that, a first anti-reflective layer and a first patterned photo resist layer are sequentially formed in that order overlying the carbon-containing dielectric layer. Next, a second etching process is performed by using the first patterned photo resist layer as an etching mask to form at least a second contact opening in the interlayer dielectric layer.

摘要翻译： 在形成接触孔的示例性方法中，首先提供覆盖有蚀刻停止层和层间电介质层的基板。 然后执行第一蚀刻工艺以在层间电介质层中形成至少第一接触开口。 随后形成第一含碳介电层，覆盖层间电介质层并填充到第一接触开口中。 之后，依次形成第一抗反射层和第一图案化光致抗蚀剂层，以覆盖含碳电介质层的顺序。 接下来，通过使用第一图案化光致抗蚀剂层作为蚀刻掩模来进行第二蚀刻工艺，以在层间电介质层中形成至少第二接触开口。

公开(公告)号：US08728949B2

公开(公告)日：2014-05-20

申请号：US12853284

申请日：2010-08-09

申请人： Hung-Ling Shih ,  Shin-Chi Chen ,  Chieh-Te Chen ,  Wei-Hang Huang

发明人： Hung-Ling Shih ,  Shin-Chi Chen ,  Chieh-Te Chen ,  Wei-Hang Huang

IPC分类号： H01L21/302

CPC分类号： H01L21/31051 ,  H01L21/0337 ,  H01L21/82385

摘要： A method for forming a semiconductor device. A substrate having thereon at least one small pattern and at least one large pattern is provided. A sacrificial layer is deposited to cover the small pattern and the large pattern. A chemical mechanical polishing is performed to planarize the sacrificial layer. The sacrificial layer is then dry etched to a thickness that is smaller than a height of the small pattern and the large pattern, thereby revealing an oxide hard mask of the small pattern and the large pattern. The oxide hard mask is then selectively removed.

摘要翻译： 一种形成半导体器件的方法。 提供其上具有至少一个小图案和至少一个大图案的基板。 沉积牺牲层以覆盖小图案和大图案。 进行化学机械抛光以平坦化牺牲层。 然后将牺牲层干蚀刻成小于小图案和大图案的高度的厚度，由此显示小图案和大图案的氧化物硬掩模。 然后选择性地除去氧化物硬掩模。

公开(公告)号：US20130109151A1

公开(公告)日：2013-05-02

申请号：US13281459

申请日：2011-10-26

申请人： Ching-Pin Hsu ,  Yi-Po Lin ,  Jiunn-Hsiung Liao ,  Chieh-Te Chen ,  Feng-Yi Chang ,  Shang-Yuan Tsai ,  Li-Chiang Chen

发明人： Ching-Pin Hsu ,  Yi-Po Lin ,  Jiunn-Hsiung Liao ,  Chieh-Te Chen ,  Feng-Yi Chang ,  Shang-Yuan Tsai ,  Li-Chiang Chen

IPC分类号： H01L21/762

CPC分类号： H01L21/76232

摘要： A method for forming a dielectric layer free of voids is disclosed. First, a substrate, a first stressed layer including a recess, a second stressed layer disposed on the first stressed layer and covering the recess and a patterned photoresist embedded in the recess are provided. Second, a first etching step is performed to totally remove the photoresist so that the remaining second stressed layer forms at least one protrusion adjacent to the recess. Then, a trimming photoresist is formed without exposure to fill the recess and to cover the protrusion. Later, a trimming etching step is performed to eliminate the protrusion and to collaterally remove the trimming photoresist.

摘要翻译： 公开了一种形成没有空隙的电介质层的方法。 首先，提供基板，包括凹部的第一应力层，设置在第一应力层上并覆盖凹部的第二应力层和嵌入凹部中的图案化光致抗蚀剂。 第二，执行第一蚀刻步骤以完全去除光致抗蚀剂，使得剩余的第二应力层形成邻近凹部的至少一个突起。 然后，在不暴露的情况下形成修整光致抗蚀剂以填充凹部并覆盖突起。 然后，进行修整蚀刻步骤以消除突起并且顺利地移除修整光致抗蚀剂。

公开(公告)号：US09196524B2

公开(公告)日：2015-11-24

申请号：US13609213

申请日：2012-09-10

申请人： Chieh-Te Chen ,  Yi-Po Lin ,  Jiunn-Hsiung Liao ,  Feng-Yi Chang ,  Shang-Yuan Tsai

发明人： Chieh-Te Chen ,  Yi-Po Lin ,  Jiunn-Hsiung Liao ,  Feng-Yi Chang ,  Shang-Yuan Tsai

IPC分类号： H01L21/336 ,  H01L21/768 ,  H01L21/311

CPC分类号： H01L21/76816 ,  H01L21/31144 ,  H01L21/76895 ,  H01L2924/0002 ,  H01L2924/00

摘要： A manufacturing method of a semiconductor device is disclosed in the present invention. First, at least one gate structure and plurality of source/drain regions on a substrate are formed, a dielectric layer is then formed on the substrate, a first contact hole and a second contact hole are formed in the dielectric layer, respectively on the gate structure and the source/drain region, and a third contact hole is formed in the dielectric layer, wherein the third contact hole overlaps the first contact hole and the second contact hole.

摘要翻译： 在本发明中公开了一种半导体器件的制造方法。 首先，在衬底上形成至少一个栅极结构和多个源极/漏极区域，然后在衬底上形成电介质层，在电介质层中分别在栅极上形成第一接触孔和第二接触孔 结构和源极/漏极区，以及在电介质层中形成第三接触孔，其中第三接触孔与第一接触孔和第二接触孔重叠。

公开(公告)号：US08691659B2

公开(公告)日：2014-04-08

申请号：US13281459

申请日：2011-10-26

申请人： Ching-Pin Hsu ,  Yi-Po Lin ,  Jiunn-Hsiung Liao ,  Chieh-Te Chen ,  Feng-Yi Chang ,  Shang-Yuan Tsai ,  Li-Chiang Chen

发明人： Ching-Pin Hsu ,  Yi-Po Lin ,  Jiunn-Hsiung Liao ,  Chieh-Te Chen ,  Feng-Yi Chang ,  Shang-Yuan Tsai ,  Li-Chiang Chen

IPC分类号： H01L21/762

CPC分类号： H01L21/76232

摘要： A method for forming a dielectric layer free of voids is disclosed. First, a substrate, a first stressed layer including a recess, a second stressed layer disposed on the first stressed layer and covering the recess and a patterned photoresist embedded in the recess are provided. Second, a first etching step is performed to totally remove the photoresist so that the remaining second stressed layer forms at least one protrusion adjacent to the recess. Then, a trimming photoresist is formed without exposure to fill the recess and to cover the protrusion. Later, a trimming etching step is performed to eliminate the protrusion and to collaterally remove the trimming photoresist.

摘要翻译： 公开了一种形成没有空隙的电介质层的方法。 首先，提供基板，包括凹部的第一应力层，设置在第一应力层上并覆盖凹部的第二应力层和嵌入凹部中的图案化光致抗蚀剂。 第二，执行第一蚀刻步骤以完全去除光致抗蚀剂，使得剩余的第二应力层形成邻近凹部的至少一个突起。 然后，在不暴露的情况下形成修整光致抗蚀剂以填充凹部并覆盖突起。 然后，进行修整蚀刻步骤以消除突起并且顺利地移除修整光致抗蚀剂。

公开(公告)号：US20120034780A1

公开(公告)日：2012-02-09

申请号：US12853284

申请日：2010-08-09

申请人： Hung-Ling Shih ,  Shin-Chi Chen ,  Chieh-Te Chen ,  Wei-Hang Huang

发明人： Hung-Ling Shih ,  Shin-Chi Chen ,  Chieh-Te Chen ,  Wei-Hang Huang

IPC分类号： H01L21/306

CPC分类号： H01L21/31051 ,  H01L21/0337 ,  H01L21/82385

摘要： A method for forming a semiconductor device. A substrate having thereon at least one small pattern and at least one large pattern is provided. A sacrificial layer is deposited to cover the small pattern and the large pattern. A chemical mechanical polishing is performed to planarize the sacrificial layer. The sacrificial layer is then dry etched to a thickness that is smaller than a height of the small pattern and the large pattern, thereby revealing an oxide hard mask of the small pattern and the large pattern. The oxide hard mask is then selectively removed.

摘要翻译： 一种形成半导体器件的方法。 提供其上具有至少一个小图案和至少一个大图案的基板。 沉积牺牲层以覆盖小图案和大图案。 进行化学机械抛光以平坦化牺牲层。 然后将牺牲层干蚀刻成小于小图案和大图案的高度的厚度，由此显示小图案和大图案的氧化物硬掩模。 然后选择性地除去氧化物硬掩模。

公开(公告)号：US20090294927A1

公开(公告)日：2009-12-03

申请号：US12129656

申请日：2008-05-29

申请人： Shui-Yen Lu ,  Guang-Wei Ye ,  Shin-Chi Chen ,  Tsung-Wen Chen ,  Ching-Fang Chu ,  Chi-Horn Pai ,  Chieh-Te Chen

发明人： Shui-Yen Lu ,  Guang-Wei Ye ,  Shin-Chi Chen ,  Tsung-Wen Chen ,  Ching-Fang Chu ,  Chi-Horn Pai ,  Chieh-Te Chen

IPC分类号： H01L23/58 ,  H01L21/76

CPC分类号： H01L21/76232 ,  H01L21/823807 ,  H01L21/823878 ,  H01L29/7846 ,  H01L2924/0002 ,  H01L2924/00

摘要： A manufacturing method for a semiconductor-device isolation structure comprises providing a substrate with at least one shallow trench isolation structure, performing a salicide process that forms a recess on the surface of the shallow trench isolation structure, forming a cap film covering the substrate and filling the recess, performing an etching process to remove the cap film outside the recess, and forming a contact etch stop layer covering the substrate and filling the recess. Due to the filling recess with the cap film first, the contact etch stop layer covering the substrate and filling the recess does not have seams or voids.

摘要翻译： 一种用于半导体器件隔离结构的制造方法，包括：提供具有至少一个浅沟槽隔离结构的衬底，执行在浅沟槽隔离结构的表面上形成凹陷的自对准硅化物工艺，形成覆盖衬底的盖膜和填充 所述凹部执行蚀刻处理以去除所述凹部外部的所述盖膜，以及形成覆盖所述基板并填充所述凹部的接触蚀刻停止层。 由于首先具有盖膜的填充凹部，覆盖基板并填充凹部的接触蚀刻停止层不具有接缝或空隙。

公开(公告)号：US20060022663A1

公开(公告)日：2006-02-02

申请号：US10898944

申请日：2004-07-27

申请人： Chieh-Te Chen

发明人： Chieh-Te Chen

IPC分类号： G01R11/32

CPC分类号： H04Q9/00 ,  G01R13/00

摘要： The present invention discloses a wireless remote control measuring multipurpose meter, which comprises a signal transmitter, a signal receiver, and a signal converter for converting a measured signal into a readable digital signal. The digital signal is transmitted to the signal receiver by a wireless transmission method and then the digital signal is displayed to improve the convenience for the practical utility of the product and enhance the safety of the measuring operation.

摘要翻译： 本发明公开了一种无线遥控测量多用途仪表，其包括信号发射器，信号接收器和用于将测量信号转换为可读数字信号的信号转换器。 数字信号通过无线传输方式发送到信号接收机，然后显示数字信号，以提高产品实用性的便利性，提高测量操作的安全性。

公开(公告)号：US09318571B2

公开(公告)日：2016-04-19

申请号：US12391213

申请日：2009-02-23

申请人： I-Chang Wang ,  Ming-Tsung Chen ,  Ling-Chun Chou ,  Po-Chao Tsao ,  Tsung-Hung Chang ,  Hui-Ling Chen ,  Cheng-Yen Wu ,  Chieh-Te Chen ,  Shin-Chi Chen

发明人： I-Chang Wang ,  Ming-Tsung Chen ,  Ling-Chun Chou ,  Po-Chao Tsao ,  Tsung-Hung Chang ,  Hui-Ling Chen ,  Cheng-Yen Wu ,  Chieh-Te Chen ,  Shin-Chi Chen

IPC分类号： H01L21/64 ,  H01L29/49 ,  H01L29/66

CPC分类号： H01L29/4983 ,  H01L29/6653 ,  H01L29/6656

摘要： A gate structure includes a gate disposed on a substrate, a first spacer disposed on the substrate and surrounding the gate and a second spacer disposed on the first spacer and surrounding the gate, the second spacer is lower than the first spacer.

摘要翻译： 栅极结构包括设置在衬底上的栅极，设置在衬底上并包围栅极的第一间隔物和设置在第一间隔物上并围绕栅极的第二间隔物，第二间隔物低于第一间隔物。