Focus Height Repeatability Improvement in a Machine Vision Inspection System
    1.
    发明申请
    Focus Height Repeatability Improvement in a Machine Vision Inspection System 有权
    机器视觉检测系统中的焦点高度重复性改进

    公开(公告)号:US20150015696A1

    公开(公告)日:2015-01-15

    申请号:US13940224

    申请日:2013-07-11

    CPC classification number: H04N5/23212 H04N5/232

    Abstract: A method improves focus height repeatability in a machine vision inspection system. A region of interest is defined within a field of view imaged by a camera portion, wherein an aligned edge feature in the region of interest may introduce a focus height sensitivity that varies depending on the aligned edge feature offset relative to the image pixels. A first set of focus-determining operations determines a focus height for the region of interest, and comprise at least one of: (a) operations that reduce the sensitivity of the focus height determination to the offset of the aligned edge feature relative to the image pixels; and (b) operations that adjust the offset of the aligned edge feature relative to the image pixels according to a predetermined offset repeatability criteria, such that the image data used in the focus height determination fulfills the offset repeatability criteria.

    Abstract translation: 一种方法提高机器视觉检查系统中的焦点高度重复性。 在由照相机部分成像的视野内定义感兴趣的区域,其中感兴趣区域中的对准边缘特征可以引入根据相对于图像像素的对准边缘特征偏移而变化的焦点高度灵敏度。 第一组焦点确定操作确定感兴趣区域的焦点高度,并且包括以下中的至少一个:(a)降低焦点高度确定对对准边缘特征相对于图像的偏移的灵敏度的操作 像素; 以及(b)根据预定的偏移重复性准则来调整对准的边缘特征相对于图像像素的偏移的操作,使得在焦点高度确定中使用的图像数据满足偏移重复性标准。

    Workpiece inspection and defect detection system utilizing color channels

    公开(公告)号:US11756186B2

    公开(公告)日:2023-09-12

    申请号:US17476378

    申请日:2021-09-15

    Abstract: A workpiece inspection and defect detection system includes a light source configuration, a lens configuration, and a camera configuration for imaging workpieces. The system acquires training and run mode workpiece images for acquiring corresponding sets of training and run mode workpiece image data. Each set of image data includes at least first and second color channel workpiece image data corresponding to first and second color channels (e.g., for which ratios between the first and second color channel workpiece image data may be determined as part of synthetic image data to improve the ability of the system to detect defects). The defect detection portion is trained based at least in part on the image data, and is utilized to perform analysis to determine defect images that include workpieces with defects (e.g., for which metrology operations may be performed for measuring dimensions of defects, etc.).

    AUTOFOCUS SYSTEM FOR A HIGH SPEED PERIODICALLY MODULATED VARIABLE FOCAL LENGTH LENS

    公开(公告)号:US20170324895A1

    公开(公告)日:2017-11-09

    申请号:US15394194

    申请日:2016-12-29

    Abstract: A system for providing an automatically focused image comprises an imaging system including a high speed periodically modulated variable focal length (VFL) lens, a VFL lens controller, a VFL-projected light source, a focus determining portion, an exposure timing adjustment circuit, and an exposure strobe time controller. The focus determining portion comprises an optical detector that inputs reflected VFL-projected light that is projected to, and reflected from, a workpiece through the VFL lens, and provides a focus deviation signal. The exposure timing adjustment circuit provides an exposure timing adjustment signal based on the focus deviation signal, which indicates a time when the imaging system focus Z-height approximately coincides with the workpiece surface Z height. The exposure strobe time controller uses the exposure timing adjustment signal to adjust the image exposure time so the imaging system focus Z-height coincides with the workpiece surface Z height at the adjusted image exposure time.

    Structured illumination projection with enhanced exposure control
    4.
    发明授权
    Structured illumination projection with enhanced exposure control 有权
    结构化照明投影,增强曝光控制

    公开(公告)号:US09350921B2

    公开(公告)日:2016-05-24

    申请号:US13912116

    申请日:2013-06-06

    Abstract: A method for controlling a structured illumination pattern generating portion is provided for illuminating a workpiece during an image acquisition by a camera in a precision machine vision inspection system. A controllable spatial light modulator (e.g., a digital light processing projector) is part of the generating portion for generating the structured illumination pattern. The pattern may comprise an array of stripes including a sinusoidal gray level intensity variation across each stripe. An overall image exposure is increased by repeating a complete structured illumination pattern generation iteration, including gray level variation, a plurality of times during an image integration period. Structured illumination microscopy techniques for determining a workpiece surface profile may benefit, wherein multiple (e.g., 3 or 4) images are acquired at respective focus positions to be analyzed, by using the method to project a different phase of a structured light pattern for each of the multiple images.

    Abstract translation: 提供了一种用于控制结构化照明图案生成部分的方法,用于在精密机器视觉检查系统中通过照相机在图像采集期间照亮工件。 可控空间光调制器(例如,数字光处理投影仪)是用于生成结构化照明图案的生成部分的一部分。 该图案可以包括条纹阵列,其包括横跨每个条带的正弦灰度级强度变化。 通过在图像积分期间重复多次,包括灰度级变化,重复完整的结构化照明图案生成迭代来增加整体图像曝光。 用于确定工件表面轮廓的结构化照明显微镜技术可以受益,其中在要分析的各个焦点位置处获取多个(例如3或4)图像,通过使用该方法来投射每个的结构光图案的不同相位 多个图像。

    Edge measurement video tool parameter-setting user interface
    5.
    发明授权
    Edge measurement video tool parameter-setting user interface 有权
    边缘测量视频工具参数设置用户界面

    公开(公告)号:US08689127B1

    公开(公告)日:2014-04-01

    申请号:US13669333

    申请日:2012-11-05

    Abstract: A user interface for setting parameters for an edge location video tool is provided. The user interface includes a multi-dimensional parameter space representation that allows a user to adjust a single parameter combination indicator in order to adjust multiple edge detection parameters at once. One or more edge feature representation windows may be provided which indicate the edge features detectable by the current configuration of the edge detection parameters.

    Abstract translation: 提供用于设置边缘位置视频工具的参数的用户界面。 用户界面包括多维参数空间表示,其允许用户调整单个参数组合指示符,以便一次调整多个边缘检测参数。 可以提供一个或多个边缘特征表示窗口,其指示边缘检测参数的当前配置可检测的边缘特征。

    WORKPIECE INSPECTION AND DEFECT DETECTION SYSTEM UTILIZING COLOR CHANNELS

    公开(公告)号:US20230082268A1

    公开(公告)日:2023-03-16

    申请号:US17476378

    申请日:2021-09-15

    Abstract: A workpiece inspection and defect detection system includes a light source configuration, a lens configuration, and a camera configuration for imaging workpieces. The system acquires training and run mode workpiece images for acquiring corresponding sets of training and run mode workpiece image data. Each set of image data includes at least first and second color channel workpiece image data corresponding to first and second color channels (e.g., for which ratios between the first and second color channel workpiece image data may be determined as part of synthetic image data to improve the ability of the system to detect defects). The defect detection portion is trained based at least in part on the image data, and is utilized to perform analysis to determine defect images that include workpieces with defects (e.g., for which metrology operations may be performed for measuring dimensions of defects, etc.).

    Focus height repeatability improvement in a machine vision inspection system
    9.
    发明授权
    Focus height repeatability improvement in a machine vision inspection system 有权
    机器视觉检测系统中的对焦高度重复性提高

    公开(公告)号:US09456120B2

    公开(公告)日:2016-09-27

    申请号:US13940224

    申请日:2013-07-11

    CPC classification number: H04N5/23212 H04N5/232

    Abstract: A method improves focus height repeatability in a machine vision inspection system. A region of interest is defined within a field of view imaged by a camera portion, wherein an aligned edge feature in the region of interest may introduce a focus height sensitivity that varies depending on the aligned edge feature offset relative to the image pixels. A first set of focus-determining operations determines a focus height for the region of interest, and comprise at least one of: (a) operations that reduce the sensitivity of the focus height determination to the offset of the aligned edge feature relative to the image pixels; and (b) operations that adjust the offset of the aligned edge feature relative to the image pixels according to a predetermined offset repeatability criteria, such that the image data used in the focus height determination fulfills the offset repeatability criteria.

    Abstract translation: 一种方法提高机器视觉检查系统中的焦点高度重复性。 在由照相机部分成像的视野内定义感兴趣的区域,其中感兴趣区域中的对准边缘特征可以引入根据相对于图像像素的对准边缘特征偏移而变化的焦点高度灵敏度。 第一组焦点确定操作确定感兴趣区域的焦点高度,并且包括以下中的至少一个:(a)降低焦点高度确定对对准边缘特征相对于图像的偏移的灵敏度的操作 像素; 以及(b)根据预定的偏移重复性准则来调整对准的边缘特征相对于图像像素的偏移的操作,使得在焦点高度确定中使用的图像数据满足偏移重复性标准。

    Structured Illumination Projection With Enhanced Exposure Control
    10.
    发明申请
    Structured Illumination Projection With Enhanced Exposure Control 有权
    结构化照明投影与增强曝光控制

    公开(公告)号:US20140362203A1

    公开(公告)日:2014-12-11

    申请号:US13912116

    申请日:2013-06-06

    Abstract: A method for controlling a structured illumination pattern generating portion is provided for illuminating a workpiece during an image acquisition by a camera in a precision machine vision inspection system. A controllable spatial light modulator (e.g., a digital light processing projector) is part of the generating portion for generating the structured illumination pattern. The pattern may comprise an array of stripes including a sinusoidal gray level intensity variation across each stripe. An overall image exposure is increased by repeating a complete structured illumination pattern generation iteration, including gray level variation, a plurality of times during an image integration period. Structured illumination microscopy techniques for determining a workpiece surface profile may benefit, wherein multiple (e.g., 3 or 4) images are acquired at respective focus positions to be analyzed, by using the method to project a different phase of a structured light pattern for each of the multiple images.

    Abstract translation: 提供了一种用于控制结构化照明图案生成部分的方法,用于在精密机器视觉检查系统中通过照相机在图像采集期间照亮工件。 可控空间光调制器(例如,数字光处理投影仪)是用于生成结构化照明图案的生成部分的一部分。 该图案可以包括条纹阵列,其包括横跨每个条带的正弦灰度级强度变化。 通过在图像积分期间重复多次,包括灰度级变化,重复完整的结构化照明图案生成迭代来增加整体图像曝光。 用于确定工件表面轮廓的结构化照明显微镜技术可以受益,其中在要分析的各个焦点位置处获取多个(例如3或4)图像,通过使用该方法来投射每个的结构光图案的不同相位 多个图像。

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