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公开(公告)号：US20050234672A1
公开(公告)日：2005-10-20
申请号：US11099688
申请日：2005-04-06
IPC分类号： H01L21/66 , G01N23/225 , G06F19/00
CPC分类号： G01N23/225
摘要： An electron beam inspection apparatus in which the order of inspection is determined to shorten the inspection time is disclosed. The order of inspection is determined by minimizing the total of the moving time and the inspection time as well as by simply optimizing the covered distance. At the time of preparing a recipe to determine the inspection points and the order of inspection, the sequence of a series of inspection points sequentially inspected is changed to optimize the order of inspection. Not only the sequence which minimizes the covered distance is determined but also the order of inspection of the inspection points is optimized in accordance with the charged state, warping of the wafer, the delivery position and other situations.
摘要翻译： 公开了其中确定检查顺序以缩短检查时间的电子束检查装置。 通过最小化移动时间和检查时间的总和以及简单地优化覆盖距离来确定检查顺序。 在准备确定检验点和检验顺序的配方时，顺序检查的一系列检查点的顺序进行了更改，以优化检验顺序。 不仅确定了覆盖距离最小化的顺序，还根据充电状态，晶圆翘曲，输送位置等情况优化了检查点的检查顺序。
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公开(公告)号：US07504627B2
公开(公告)日：2009-03-17
申请号：US11878361
申请日：2007-07-24
IPC分类号： H01J37/28 , G01N23/225
CPC分类号： G01N23/225
摘要： An electron beam inspection apparatus in which the order of inspection is determined to shorten the inspection time is disclosed. The order of inspection is determined by minimizing the total of the moving time and the inspection time as well as by simply optimizing the covered distance. At the time of preparing a recipe to determine the inspection points and the order of inspection, the sequence of a series of inspection points sequentially inspected is changed to optimize the order of inspection. Not only the sequence which minimizes the covered distance is determined but also the order of inspection of the inspection points is optimized in accordance with the charged state, warping of the wafer, the delivery position and other situations.
摘要翻译： 公开了其中确定检查顺序以缩短检查时间的电子束检查装置。 通过最小化移动时间和检查时间的总和以及简单地优化覆盖距离来确定检查顺序。 在准备确定检验点和检验顺序的配方时，顺序检查的一系列检查点的顺序进行了更改，以优化检验顺序。 不仅确定了覆盖距离最小化的顺序，还根据充电状态，晶圆翘曲，输送位置等情况优化了检查点的检查顺序。
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公开(公告)号：US20070272860A1
公开(公告)日：2007-11-29
申请号：US11878361
申请日：2007-07-24
IPC分类号： G01N23/00
CPC分类号： G01N23/225
摘要： An electron beam inspection apparatus in which the order of inspection is determined to shorten the inspection time is disclosed. The order of inspection is determined by minimizing the total of the moving time and the inspection time as well as by simply optimizing the covered distance. At the time of preparing a recipe to determine the inspection points and the order of inspection, the sequence of a series of inspection points sequentially inspected is changed to optimize the order of inspection. Not only the sequence which minimizes the covered distance is determined but also the order of inspection of the inspection points is optimized in accordance with the charged state, warping of the wafer, the delivery position and other situations.
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公开(公告)号：US07256400B2
公开(公告)日：2007-08-14
申请号：US11099688
申请日：2005-04-06
IPC分类号： H01J37/28 , G01N23/225
CPC分类号： G01N23/225
摘要： An electron beam inspection apparatus in which the order of inspection is determined to shorten the inspection time is disclosed. The order of inspection is determined by minimizing the total of the moving time and the inspection time as well as by simply optimizing the covered distance. At the time of preparing a recipe to determine the inspection points and the order of inspection, the sequence of a series of inspection points sequentially inspected is changed to optimize the order of inspection. Not only the sequence which minimizes the covered distance is determined but also the order of inspection of the inspection points is optimized in accordance with the charged state, warping of the wafer, the delivery position and other situations.
摘要翻译： 公开了其中确定检查顺序以缩短检查时间的电子束检查装置。 通过最小化移动时间和检查时间的总和以及简单地优化覆盖距离来确定检查顺序。 在准备确定检验点和检验顺序的配方时，顺序检查的一系列检查点的顺序进行了更改，以优化检验顺序。 不仅确定了覆盖距离最小化的顺序，还根据充电状态，晶圆翘曲，输送位置等情况优化了检查点的检查顺序。
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公开(公告)号：US07847249B2
公开(公告)日：2010-12-07
申请号：US12068417
申请日：2008-02-06
申请人： Noritsugu Takahashi , Muneyuki Fukuda , Hiroyuki Ito , Atsuko Fukada , Masashi Sakamoto , Satoshi Takada
发明人： Noritsugu Takahashi , Muneyuki Fukuda , Hiroyuki Ito , Atsuko Fukada , Masashi Sakamoto , Satoshi Takada
IPC分类号： H01J3/14
CPC分类号： G01N23/225 , H01J37/09 , H01J37/265 , H01J37/28 , H01J2237/14 , H01J2237/2817
摘要： A technology whereby removal of magnetic hysteresis is enabled in short time in parallel with a process for stage transfer, and so forth. There is executed a magnetic hysteresis removal sequence whereby current for exciting an electromagnetic coil prior to acquisition of an image is always set to a predetermined variation value against a target value, thereby obtaining information on an image, and so forth, when a diameter of a primary electron beam, converged on the specimen, becomes smaller than dimensions displayed by one pixel of an image to be acquired.
摘要翻译： 与阶段转移的过程并行地在短时间内实现磁滞的消除的技术等等。 执行磁滞去除序列，其中在获取图像之前激励电磁线圈的电流总是被设置为相对于目标值的预定变化值，从而获得关于图像的信息，等等 会聚在样本上的一次电子束变得小于要获取的图像的一个像素显示的尺寸。
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公开(公告)号：US07569116B2
公开(公告)日：2009-08-04
申请号：US11350090
申请日：2006-02-09
申请人： Yoshiki Ono , Masashi Sakamoto
发明人： Yoshiki Ono , Masashi Sakamoto
摘要： A Co—Cr—Mo-based alloy includes: 63 mass %≦Co
摘要翻译： Co-Cr-Mo基合金包括：63质量％<= Co <68质量％ 15质量％<= Cr <26质量％ 10质量％<= Mo <19质量％ 和不可避免的杂质的平衡，其中Cr和Mo的总量为32质量％至37％。 合金的质磁化率在室温下为7×4pi×10-9 m3 / kg或更低，合金的维氏硬度（Hv）为400以上。
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7.发明申请Fiber Treatment Agent, Fiber Treated With Such Fiber Treatment Agent, Fiber Fabric, Laminate And Method For Treating Fiber 有权纤维处理剂，纤维处理剂，纤维织物，层压材料及纤维处理方法公开(公告)号：US20090149095A1
公开(公告)日：2009-06-11
申请号：US11909851
申请日：2006-03-27
申请人： Masahiro Sano , Masashi Sakamoto , Shigeru Oyama , Takaharu Yasue
发明人： Masahiro Sano , Masashi Sakamoto , Shigeru Oyama , Takaharu Yasue
IPC分类号： D06M15/01 , D06M15/643
CPC分类号： D06N3/0056 , D06M11/78 , D06M15/00 , D06M15/01 , D06M15/263 , D06M15/564 , D06N3/042 , D06N3/14 , Y10T442/20
摘要： A fiber treatment agent contains components (a) and (b). A fiber treated with the fiber treatment agent and a fiber fabric including the fiber are also provided. The component (a) an insoluble egg-shell membrane fine powder with a mean particle size of 0.1 to 10 μm while the component (b) is a synthetic resin emulsion or a synthetic resin solution.
摘要翻译： 纤维处理剂含有（a）和（b）成分。 还提供了用纤维处理剂处理的纤维和包括纤维的纤维织物。 组分（a）组分（b）是合成树脂乳液或合成树脂溶液，平均粒径为0.1-10μm的不溶性蛋壳膜细粉末。
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公开(公告)号：US07080543B2
公开(公告)日：2006-07-25
申请号：US10409587
申请日：2003-04-09
申请人： Hideki Ishikawa , Yoshikuni Sato , Keigo Banno , Masashi Sakamoto , Noboru Ishida , Takafumi Oshima
发明人： Hideki Ishikawa , Yoshikuni Sato , Keigo Banno , Masashi Sakamoto , Noboru Ishida , Takafumi Oshima
IPC分类号： G01N29/02
CPC分类号： G01N29/223 , G01N2291/021 , G01N2291/02809 , G01N2291/02818 , G01N2291/02881
摘要： A detecting-element assembly (40) is configured such that a piezoelectric element (51) is housed in a casing body portion (43) of a casing (42), and is attached to a housing portion (22) of a flow path formation member (20) via a flange portion (41). Therefore, the path between the piezoelectric element (51) and the position of attachment of the detecting-element assembly (40) is elongated, whereby ultrasonic waves which leak into the interior of the detecting-element assembly (40) from the piezoelectric element (51) become unlikely to reflectively return from a joint. Thus, the influence of, for example, noise stemming from reflected waves is reduced, thereby enhancing the accuracy of detection. An average clearance of 1 millimeter or more is provided along the outer circumferential surface of the casing body portion (43) of the detecting-element assembly (40), whereby a problem of collected foreign matter is unlikely to occur.
摘要翻译： 检测元件组件（40）构造成使得压电元件（51）容纳在壳体（42）的壳体主体部分（43）中，并且附接到流路形成的壳体部分（22） 构件（20）经由凸缘部分（41）。 因此，压电元件（51）与检测元件组件（40）的安装位置之间的路径被拉长，从而从压电元件（...）泄漏到检测元件组件（40）的内部的超声波 51）变得不可能从联合反射回来。 因此，降低了例如由反射波产生的噪声的影响，从而提高了检测的准确性。 沿着检测元件组件（40）的壳体主体部（43）的外周面设置有1毫米以上的平均间隙，由此不可能发生收集的异物问题。
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公开(公告)号：US06892566B2
公开(公告)日：2005-05-17
申请号：US10393496
申请日：2003-03-21
IPC分类号： G01N29/024 , G01N29/22 , G01N29/44 , G01N29/02 , G01H5/00
CPC分类号： G01N29/222 , G01N29/024 , G01N2291/011 , G01N2291/015 , G01N2291/0212 , G01N2291/0217 , G01N2291/02809 , G01N2291/045 , G01N2291/101
摘要： A gas concentration sensor includes a measurement chamber for measuring a concentration of a specific gas component in a gas under measurement; an inflow path for allowing inflow of the gas under measurement thereinto and an outflow path for allowing outflow of the gas under measurement therefrom; a reflection wall for reflecting an acoustic wave; and an acoustic wave transmitting-receiving element having a transmitting-receiving surface adapted to transmit an acoustic wave toward the reflection wall and receive an acoustic wave reflected from the reflection wall. The concentration of the specific gas in the gas under measurement is detected on the basis of a propagation time between transmission of the acoustic wave and reception of the reflected acoustic wave. When a predetermined member having the sensor attached thereto is placed in a horizontal plane, the transmitting-receiving surface faces downward. A recess is formed in a peripheral portion of the reflection wall. The recess is receded toward a back surface of the reflection wall, namely, in a direction away from the transmitting-receiving surface.
摘要翻译： 气体浓度传感器包括用于测量被测气体中特定气体成分浓度的测量室; 用于允许在其中测量气体的流入的流入路径和用于允许从其测量的气体流出的流出路径; 用于反射声波的反射壁; 以及具有发射接收表面的声波发射接收元件，所述发射接收表面适于向反射壁传输声波并接收从反射壁反射的声波。 基于声波的发送和反射声波的接收之间的传播时间来检测被测气体中的比气体的浓度。 当安装有传感器的预定构件放置在水平面中时，发送接收表面向下。 在反射壁的周边部分形成有凹部。 凹部朝向反射壁的后表面，即远离发射接收表面的方向退回。
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公开(公告)号：US6159904A
公开(公告)日：2000-12-12
申请号：US276740
申请日：1999-03-26
IPC分类号： C07D409/06 , C07D495/10 , A01N43/56 , C07D335/06
CPC分类号： C07D409/06 , C07D495/10
摘要： Pyrazole derivatives of the general formula (I) or salts thereof, ##STR1## wherein each symbols are as defined in the specification, herbicides containing the above compounds as active ingredients, and aromatic carboxylic acid derivatives or salts thereof suitable as intermediates for the production of the above pyrazole derivatives.The above pyrazole derivatives or salts thereof, provided by the present invention, cause no phytotoxicity on upland field crops such as corn, etc., and can selectively control a broad range of upland weeds such as grass weeds and broad-leaved weeds at a low dosage in pre-emergence treatment and in post-emergence treatment.
摘要翻译： 通式（I）的吡唑衍生物或其盐，其中每个符号如本说明书中所定义，含有上述化合物作为活性成分的除草剂，以及适合作为制备上述吡唑的中间体的芳族羧酸衍生物或其盐 衍生品 本发明提供的上述吡唑衍生物或其盐对玉米等高田田间作物不产生植物毒性，能够低选择性地控制阔叶杂草，阔叶杂草等阔叶杂草 在出苗前治疗和出苗后治疗中的剂量。
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