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公开(公告)号：US20060099345A1
公开(公告)日：2006-05-11
申请号：US10984667
申请日：2004-11-09
申请人： Jeremy Grace , Michael Long , Michael Boroson , Jinmei Zhang , Bruce Koppe , Thomas Palone , Neil Redden
发明人： Jeremy Grace , Michael Long , Michael Boroson , Jinmei Zhang , Bruce Koppe , Thomas Palone , Neil Redden
CPC分类号： C23C14/542 , C23C14/12 , C23C14/24 , H01L51/001 , H01L51/56
摘要： A method for controlling the deposition of vaporized organic material onto a substrate surface, includes providing a heating device to produce vaporized organic material; providing a manifold having at least one aperture through which vaporized organic material passes for deposition onto the substrate surface; providing a controller operating independently of the heating device and effective in a first condition for limiting the passage of vaporized organic material through the aperture, and effective in a second condition for facilitating the passage of vaporized organic material through the aperture; and wherein the heating device, or the controller, or both are contiguous to the manifold.
摘要翻译： 一种用于控制蒸发的有机材料沉积到衬底表面上的方法，包括提供加热装置以产生蒸发的有机材料; 提供具有至少一个孔的歧管，蒸发的有机材料通过该孔通过以沉积到衬底表面上; 提供独立于所述加热装置操作的控制器，并且在第一条件下有效地限制汽化的有机材料通过所述孔的通道，并且在第二条件下有效地促进蒸发的有机材料通过所述孔; 并且其中所述加热装置或所述控制器或两者都与所述歧管邻接。
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公开(公告)号：US20060099344A1
公开(公告)日：2006-05-11
申请号：US10984095
申请日：2004-11-09
申请人： Michael Boroson , Michael Long , Jeremy Grace , Jinmei Zhang , Bruce Koppe , Thomas Palone , Neil Redden
发明人： Michael Boroson , Michael Long , Jeremy Grace , Jinmei Zhang , Bruce Koppe , Thomas Palone , Neil Redden
CPC分类号： C23C14/542 , C23C14/12 , C23C14/246 , H01L51/001
摘要： A method for controlling the deposition of vaporized organic material onto a substrate surface, includes providing a manifold having at least one aperture through which vaporized organic material passes for deposition onto the substrate surface; and providing a volume of organic material and maintaining the temperature of such organic material in a first condition so that its vapor pressure is below that needed to effectively form a layer on the substrate, and in a second condition heating a volume percentage of the initial volume of such organic material so that the vapor pressure of the heated organic material is sufficient to effectively form a layer.
摘要翻译： 一种用于控制蒸发的有机材料沉积到衬底表面上的方法，包括提供具有至少一个孔的歧管，蒸发的有机材料通过该孔通过以沉积到衬底表面上; 并且提供一定体积的有机材料并将这种有机材料的温度保持在第一状态，使得其蒸气压低于在衬底上有效形成层所需的蒸气压，而在第二条件下加热初始体积的体积百分数 的这种有机材料，使得加热的有机材料的蒸气压足以有效地形成层。
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公开(公告)号：US20060251811A1
公开(公告)日：2006-11-09
申请号：US11121242
申请日：2005-05-03
申请人： Michael Long , Neil Redden , Bruce Koppe , Thomas Palone
发明人： Michael Long , Neil Redden , Bruce Koppe , Thomas Palone
IPC分类号： C23C16/00
CPC分类号： C23C14/246 , C23C16/448
摘要： A method for metering powdered or granular material onto a heated surface to vaporize such material. The method comprises providing a rotatable auger d for receiving powdered or granular material and as the rotatable auger rotates, such rotatable auger translates such powdered or granular material along a feed path to a feeding location. The method also providing at least one opening at the feeding location such that the pressure produced by the rotating rotatable auger at the feeding location causes the powdered or granular material to be forced through the opening onto the heated surface in a controllable manner. The material is agitated or fluidized proximate to the feeding location.
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公开(公告)号：US20050208220A1
公开(公告)日：2005-09-22
申请号：US10805980
申请日：2004-03-22
申请人： Michael Long , David Strip , Jeremy Grace , Dennis Freeman , Neil Redden , Bruce Koppe
发明人： Michael Long , David Strip , Jeremy Grace , Dennis Freeman , Neil Redden , Bruce Koppe
CPC分类号： C23C14/12 , C23C14/228 , C23C14/246 , Y10S427/101
摘要： A method for vaporizing organic materials onto a surface, to form a film includes providing a quantity of organic material in a fluidized powdered form; metering the powdered organic material and directing a stream of such fluidized powder onto a first member; heating the first member so that as the stream of fluidized powder is vaporized; collecting the vaporized organic material in a manifold; and providing a second member formed with at least one aperture in communication with the manifold that permits the vaporized organic material to be directed onto the surface to form a film.
摘要翻译： 将有机材料蒸发到表面上以形成膜的方法包括提供一定量的以流化粉末形式的有机材料; 计量粉状有机材料并将这种流化粉末的流引导到第一构件上; 加热第一构件，使得随着流化粉末流的蒸发; 将蒸发的有机材料收集在歧管中; 以及提供形成有至少一个与歧管连通的孔的第二构件，其允许蒸发的有机材料被引导到表面上以形成膜。
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公开(公告)号：US20050186340A1
公开(公告)日：2005-08-25
申请号：US10784585
申请日：2004-02-23
申请人： Michael Long , Randolph Brost , Jeremy Grace , Dennis Freeman , Neil Redden , Bruce Koppe
发明人： Michael Long , Randolph Brost , Jeremy Grace , Dennis Freeman , Neil Redden , Bruce Koppe
CPC分类号： C23C14/243 , C23C14/12 , H01L51/001 , H01L51/0059 , H01L51/0077 , H01L51/0081
摘要： A method for vaporizing organic materials onto a substrate surface to form a film including providing a quantity of organic material into a vaporization apparatus and actively maintaining the organic material in a first heating region in the vaporization apparatus to be below the vaporization temperature. The method also includes heating a second heating region of the vaporization apparatus above the vaporization temperature of the organic material and metering, at a controlled rate, organic material from the first heating region into the second heating region so that a thin cross section of the organic material is heated at a desired rate-dependent vaporization temperature, whereby organic material vaporizes and forms a film on the substrate surface.
摘要翻译： 一种用于将有机材料蒸发到基板表面上以形成膜的方法，所述方法包括向蒸发装置中提供一定数量的有机材料并主动将所述蒸发装置中的第一加热区域中的有机材料维持在汽化温度以下。 该方法还包括将蒸发装置的第二加热区域加热到有机材料的蒸发温度以上，并以受控的速率将有机材料从第一加热区域计量到第二加热区域，使得有机物的薄截面 材料以所需的速率依赖的蒸发温度加热，由此有机材料在衬底表面上蒸发并形成膜。
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公开(公告)号：US20070207261A1
公开(公告)日：2007-09-06
申请号：US11745504
申请日：2007-05-08
申请人： Michael Long , Randolph Brost , Jeremy Grace , Dennis Freeman , Neil Redden , Bruce Koppe
发明人： Michael Long , Randolph Brost , Jeremy Grace , Dennis Freeman , Neil Redden , Bruce Koppe
CPC分类号： C23C14/243 , C23C14/12 , H01L51/001 , H01L51/0059 , H01L51/0077 , H01L51/0081
摘要： A method for vaporizing organic materials onto a substrate surface to form a film including providing a quantity of organic material into a vaporization apparatus and actively maintaining the organic material in a first heating region in the vaporization apparatus to be below the vaporization temperature. The method also includes heating a second heating region of the vaporization apparatus above the vaporization temperature of the organic material and metering, at a controlled rate, organic material from the first heating region into the second heating region so that a thin cross section of the organic material is heated at a desired rate-dependent vaporization temperature, whereby organic material vaporizes and forms a film on the substrate surface.
摘要翻译： 一种用于将有机材料蒸发到基板表面上以形成膜的方法，所述方法包括向蒸发装置中提供一定数量的有机材料并主动将所述蒸发装置中的第一加热区域中的有机材料维持在汽化温度以下。 该方法还包括将蒸发装置的第二加热区域加热到有机材料的蒸发温度以上，并以受控的速率将有机材料从第一加热区域计量到第二加热区域，使得有机物的薄截面 材料以所需的速率依赖的蒸发温度被加热，由此有机材料在衬底表面上蒸发并形成膜。
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公开(公告)号：US20050208216A1
公开(公告)日：2005-09-22
申请号：US10805847
申请日：2004-03-22
申请人： Michael Long , Jeremy Grace , Bruce Koppe , Dennis Freeman , Neil Redden , Robert Zwaap
发明人： Michael Long , Jeremy Grace , Bruce Koppe , Dennis Freeman , Neil Redden , Robert Zwaap
CPC分类号： C23C14/24 , C23C14/12 , C23C14/243 , C23C14/26
摘要： A vapor deposition source for use in vacuum chamber for coating an organic layer on a substrate of an OLED device, includes a manifold including side and bottom walls defining a chamber for receiving organic material, and an aperture plate disposed between the side walls, the aperture plate having a plurality of spaced apart apertures for emitting vaporized organic material; the aperture plate including conductive material which in response to an electrical current produces heat; means for heating the organic material to a temperature which causes its vaporization, and heating the side walls of the manifold; and an electrical insulator coupling the aperture plate to the side walls for concentrating heat in the unsupported region of the aperture plate adjacent to the apertures, whereby the distance between the aperture plate and the substrate can be reduced to provide high coating thickness uniformity on the substrate.
摘要翻译： 用于在OLED器件的衬底上涂覆有机层的真空室中的气相沉积源包括：歧管，其包括限定用于接收有机材料的腔室的侧壁和底壁;以及设置在侧壁之间的孔板， 板具有多个间隔开的孔，用于发射蒸发的有机材料; 包括响应于电流的导电材料的孔板产生热量; 用于将有机材料加热到导致其蒸发的温度并加热歧管的侧壁的装置; 以及将孔板连接到侧壁上的电绝缘体，用于将热量集中在邻近孔的孔板的未支撑区域中，由此可以减小孔板和基板之间的距离，以在基板上提供高的涂层厚度均匀性 。
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公开(公告)号：US20060177578A1
公开(公告)日：2006-08-10
申请号：US11153066
申请日：2005-06-15
申请人： Michael Long , Bruce Koppe , Thomas Palone
发明人： Michael Long , Bruce Koppe , Thomas Palone
IPC分类号： C23C16/00
CPC分类号： C23C14/12 , C23C14/24 , C23C14/246 , H01L51/001 , H01L51/56
摘要： A method for the vaporization of particulate material includes providing one or more containers each containing possibly distinct particulate materials each having at least one component, fluidizing the particulate material in at least one of the containers, and providing a vaporization zone that is thermally isolated from at least one of the containers. The method further includes delivering particulate material received from each container to the vaporization zone, and applying heat to vaporize the delivered particulate materials at the vaporization zone.
摘要翻译： 一种用于蒸发颗粒材料的方法包括提供一个或多个容器，每个容器各自含有不同的颗粒材料，每个容器具有至少一种组分，使至少一个容器中的颗粒材料流化，并且提供与之热隔离的蒸发区 至少一个容器。 该方法还包括将从每个容器接收的颗粒材料输送到蒸发区域，并且在蒸发区域施加热量以蒸发输送的颗粒材料。
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公开(公告)号：US20060062920A1
公开(公告)日：2006-03-23
申请号：US11134654
申请日：2005-05-20
申请人： Michael Long , Jeremy Grace , Bruce Koppe
发明人： Michael Long , Jeremy Grace , Bruce Koppe
CPC分类号： C23C14/246 , C23C14/12
摘要： A method for vaporizing particulate materials and condensing them onto a surface to form a layer provides a quantity of particulate material in a first container having an opening, dimensioned to allow free flow of the particulate material through the opening. The particulate material is transferred through the opening to an auger. At least a portion of the auger is rotated to transfer the particulate material from the first container along a feeding path to a vaporization zone where at least a component portion of the particulate material is vaporized and delivered to the surface to form the layer. The auger size is selected to facilitate the free flow of the particulate material through the opening.
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公开(公告)号：US20060062918A1
公开(公告)日：2006-03-23
申请号：US10945940
申请日：2004-09-21
申请人： Michael Long , Jeremy Grace , Bruce Koppe
发明人： Michael Long , Jeremy Grace , Bruce Koppe
IPC分类号： C23C16/00
CPC分类号： C23C14/246 , C23C14/12 , C23C14/26
摘要： A method for vaporizing organic materials and condensing them onto a surface to form a layer, comprising: providing a quantity of organic material in a powdered form in a first container; fluidizing the organic material in the first container and transferring such fluidized material to an auger structure; and rotating at least a portion of the auger structure to transfer fluidized powder from the first container along a feeding path to a vaporization zone where such powder is vaporized and delivered to the substrate to form the layer.
摘要翻译： 一种用于蒸发有机材料并将其冷凝到表面上以形成层的方法，包括：在第一容器中提供一定数量的粉末形式的有机材料; 使第一容器中的有机材料流化，并将这种流化材料转移到螺旋钻结构; 以及旋转所述螺旋推进器结构的至少一部分，以将来自所述第一容器的流化粉末沿着进料路径转移到蒸发区域，在所述蒸发区域将所述粉末蒸发并输送到所述基底以形成所述层。
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