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1.发明授权公开(公告)号：US07010451B2
公开(公告)日：2006-03-07
申请号：US10417640
申请日：2003-04-17
CPC分类号： G01R31/2894 , G01R31/2831
摘要： Methods, systems, and apparatuses provide dynamic creation and modification of wafer test maps. Test plans are defined for a testing session of a wafer lot. The test plan is associated with a number of seed map patterns. During a wafer lot testing session, test results are dynamically obtained and examined at run-time of a test. Moreover, the seed map patterns are overlaid on the test sites defined in the test plan. If the test result statistics are outside of defined threshold tolerance levels, then a new wafer test map is created or modified at run-time, according to corresponding seed map patterns. If seed map patterns are within the intersection of valid test sites, then seed map patterns are created at run-time.
摘要翻译： 方法，系统和装置提供晶片测试图的动态创建和修改。 测试计划是针对晶圆批次的测试会议定义的。 测试计划与许多种子图模式相关联。 在晶圆批测试期间，测试结果在测试运行时动态获取并进行检查。 此外，种子地图模式覆盖在测试计划中定义的测试站点上。 如果测试结果统计信息超出定义的阈值容限级别，则根据相应的种子图模式，在运行时创建或修改新的晶圆测试图。 如果种子地图模式位于有效测试站点的交叉点内，则在运行时创建种子地图模式。
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公开(公告)号：US07162386B2
公开(公告)日：2007-01-09
申请号：US10133685
申请日：2002-04-25
IPC分类号： G06F19/00
CPC分类号： G01R31/2831
摘要： An apparatus, method, system, and signal-bearing medium may provide multiple maps, which may include multiple probing sequences to be called upon at run-time based on statistical thresholds or other selected criteria. Each map may include a series of locations on a wafer, the tests to perform at each location, and the measured results of each test. A parametric test system may perform the test at the associated location on the wafer. If the statistical threshold is exceeded or the selected criteria is met, the current map may be abandoned in favor of a different map.
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公开(公告)号：US07165004B2
公开(公告)日：2007-01-16
申请号：US11342419
申请日：2006-01-30
IPC分类号： G06F19/00
CPC分类号： G01R31/2831
摘要： An apparatus, method, system, and signal-bearing medium may provide multiple maps, which may include multiple probing sequences to be called upon at run-time based on statistical thresholds or other selected criteria. Each map may include a series of locations on a wafer, the tests to perform at each location, and the measured results of each test. A parametric test system may perform the test at the associated location on the wafer. If the statistical threshold is exceeded or the selected criteria is met, the current map may be abandoned in favor of a different map.
摘要翻译： 装置，方法，系统和信号承载介质可以提供多个映射，其可以包括在运行时基于统计阈值或其他选择的标准来调用的多个探测序列。 每个地图可以包括晶片上的一系列位置，在每个位置执行的测试以及每个测试的测量结果。 参数测试系统可以在晶片上的相关位置执行测试。 如果超过统计阈值或满足所选择的标准，则可能会放弃当前地图，以利于不同的地图。
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公开(公告)号：US07139672B2
公开(公告)日：2006-11-21
申请号：US10924695
申请日：2004-08-24
IPC分类号： G01R31/00
CPC分类号： G01R31/2831
摘要： An apparatus, method, system, and signal-bearing medium may provide multiple maps, which may include multiple probing sequences to be called upon at run-time based on statistical thresholds or other selected criteria. Each map may include a series of locations on a wafer, the tests to perform at each location, and the measured results of each test. A parametric test system may perform the test at the associated location on the wafer. If the statistical threshold is exceeded or the selected criteria is met, the current map may be abandoned in favor of a different map.
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公开(公告)号：US07383147B2
公开(公告)日：2008-06-03
申请号：US11342425
申请日：2006-01-30
IPC分类号： G06F19/00
CPC分类号： G01R31/2831
摘要： An apparatus, method, system, and signal-bearing medium may provide multiple maps, which may include multiple probing sequences to be called upon at run-time based on statistical thresholds or other selected criteria. Each map may include a series of locations on a wafer, the tests to perform at each location, and the measured results of each test. A parametric test system may perform the test at the associated location on the wafer. If the statistical threshold is exceeded or the selected criteria is met, the current map may be abandoned in favor of a different map.
摘要翻译： 装置，方法，系统和信号承载介质可以提供多个映射，其可以包括在运行时基于统计阈值或其他选择的标准来调用的多个探测序列。 每个地图可以包括晶片上的一系列位置，在每个位置执行的测试以及每个测试的测量结果。 参数测试系统可以在晶片上的相关位置执行测试。 如果超过统计阈值或满足所选择的标准，则可能会放弃当前地图，以利于不同的地图。
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公开(公告)号：US07337088B2
公开(公告)日：2008-02-26
申请号：US10131934
申请日：2002-04-25
IPC分类号： G06F19/00
CPC分类号： H01L21/67276 , G01R1/025 , G01R31/2831
摘要： An intelligent measurement modular semiconductor parametric test system comprises an engine control module. The engine control module is operable to communicate with a user via a user interface, and is further operable to communicate with and to control the state of at least one other module in the semiconductor parametric test system including pluggable modules. The engine control module is further operable to control test flow via a test monitor module based on data and control events received from an intelligent measurement module. Other modules in various embodiments comprise prober monitor modules.
摘要翻译： 智能测量模块化半导体参数测试系统包括发动机控制模块。 发动机控制模块可操作以经由用户界面与用户通信，并且还可操作以与包括可插拔模块的半导体参数测试系统中的至少一个其他模块通信并控制其状态。 发动机控制模块还可操作以基于从智能测量模块接收的数据和控制事件，经由测试监视器模块来控制测试流程。 各种实施例中的其他模块包括探测器监视器模块。
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公开(公告)号：US06859760B2
公开(公告)日：2005-02-22
申请号：US10441703
申请日：2003-05-20
申请人： Michael J. Dorough
发明人： Michael J. Dorough
CPC分类号： G02B21/365 , H01J2237/2817 , H04N7/181 , Y10S977/854
摘要： A method and apparatus are described for remote semiconductor microscopy whereby video signals are broadcast from one or more microscopes to remote viewers. A live video signal is broadcast from the microscope over a network to remote personal computers located in the offices of process engineers. The office-based process engineers are provided real-time, or substantially real-time, views of a wafer, including peripheral views of the wafer outside cell array boundaries. The process engineer, in his office, can direct a technician, operating the microscope in the clean room complex, to display a desired cell region-of-interest with the microscope. As a result, the process engineers can more efficiently collaborate to solve process problems or even develop new process techniques.
摘要翻译： 描述了用于远程半导体显微镜的方法和装置，由此将视频信号从一个或多个显微镜广播到远程观察者。 实时视频信号通过网络从显微镜广播到位于过程工程师的办公室的远程个人计算机。 基于办公室的过程工程师提供晶片的实时或实时实时视图，包括晶片外部单元阵列边界的周边视图。 过程工程师在他的办公室可以指导技术人员将显微镜操作在洁净室综合体中，用显微镜显示所需的细胞区域。 因此，流程工程师可以更有效地协作解决流程问题，甚至开发新的流程技术。
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公开(公告)号：US06567770B2
公开(公告)日：2003-05-20
申请号：US10118844
申请日：2002-04-09
申请人： Michael J. Dorough
发明人： Michael J. Dorough
IPC分类号： G06F1900
CPC分类号： G02B21/365 , H01J2237/2817 , H04N7/181 , Y10S977/854
摘要： A method and apparatus are described for remote semiconductor microscopy whereby video signals are broadcast from one or more microscopes to remote viewers. A live video signal is broadcast from the microscope over a network to remote personal computers located in the offices of process engineers. The office-based process engineers are provided real-time, or substantially real-time, views of a wafer, including peripheral views of the wafer outside cell array boundaries. The process engineer, in his office, can direct a technician, operating the microscope in the clean room complex, to display a desired cell region-of-interest with the microscope. As a result, the process engineers can more efficiently collaborate to solve process problems or even develop new process techniques.
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公开(公告)号：US06370487B1
公开(公告)日：2002-04-09
申请号：US09298502
申请日：1999-04-23
申请人： Michael J. Dorough
发明人： Michael J. Dorough
IPC分类号： H01J3700
CPC分类号： G02B21/365 , H01J2237/2817 , H04N7/181 , Y10S977/854
摘要： A method and apparatus are described for remote semiconductor microscopy whereby video signals are broadcast from one or more microscopes to remote viewers. A live video signal is broadcast from the microscope over a network to remote personal computers located in the offices of process engineers. The office-based process engineers are provided real-time, or substantially real-time, views of a wafer, including peripheral views of the wafer outside cell array boundaries. The process engineer, in his office, can direct a technician, operating the microscope in the clean room complex, to display a desired cell region-of-interest with the microscope. As a result, the process engineers can more efficiently collaborate to solve process problems or even develop new process techniques.
摘要翻译： 描述了用于远程半导体显微镜的方法和装置，由此将视频信号从一个或多个显微镜广播到远程观察者。 实时视频信号通过网络从显微镜广播到位于过程工程师的办公室的远程个人计算机。 基于办公室的过程工程师提供晶片的实时或实时实时视图，包括晶片外部单元阵列边界的周边视图。 过程工程师在他的办公室可以指导技术人员将显微镜操作在洁净室综合体中，用显微镜显示所需的细胞区域。 因此，流程工程师可以更有效地协作解决流程问题，甚至开发新的流程技术。
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