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公开(公告)号：US20080062579A1
公开(公告)日：2008-03-13
申请号：US11845010
申请日：2007-08-24
IPC分类号： G11B5/33
CPC分类号： G11B5/3163 , G11B5/3169 , G11B5/3173 , G11B5/6011 , Y10T29/49021 , Y10T29/49032 , Y10T29/49041
摘要： Embodiments of the present invention provide a method of fabricating a magnetic head slider realizing high-recording density at high-yields by preventing formation of a short circuit on the air-bearing surface of a magnetic head slider and preventing formation of an oxidized layer with significant film thickness which increases the effective magnetic spacing, on the air-bearing surface of the magnetic head slider. According to one embodiment, after air-bearing surface mechanical lapping of a row bar or a magnetic head slider, cleaning is performed by ion beam bombardment to remove a conductive smear. Oxygen exposure is performed to recover a damaged region which was formed by ion beam bombardment at the end face of an intermediate layer of a magnetoresistive film 5. Thereafter, air-bearing surface protection films are formed and followed by rail formation. If the processes are performed on the row bar, the row bar is cut into individual separated magnetic head sliders.
摘要翻译： 本发明的实施例提供一种制造磁头滑块的方法，其通过防止在磁头滑块的空气轴承表面上形成短路而以高产率实现高记录密度，并且防止形成具有显着性的氧化层 在磁头滑块的空气轴承表面上增加有效磁间距的膜厚度。 根据一个实施例，在排杆或磁头滑块的空气轴承表面机械研磨之后，通过离子束轰击进行清洁以除去导电涂片。 进行氧曝光以回收在磁阻膜5的中间层的端面处通过离子束轰击形成的损伤区域。之后，形成空气轴承表面保护膜，然后形成轨道。 如果在行条上执行过程，则将行条切割成单独的分离的磁头滑块。
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公开(公告)号：US07735213B2
公开(公告)日：2010-06-15
申请号：US11845010
申请日：2007-08-24
IPC分类号： H04R31/00
CPC分类号： G11B5/3163 , G11B5/3169 , G11B5/3173 , G11B5/6011 , Y10T29/49021 , Y10T29/49032 , Y10T29/49041
摘要： Embodiments of the present invention provide a method of fabricating a magnetic head slider realizing high-recording density at high-yields by preventing formation of a short circuit on the air-bearing surface of a magnetic head slider and preventing formation of an oxidized layer with significant film thickness which increases the effective magnetic spacing, on the air-bearing surface of the magnetic head slider. According to one embodiment, after air-bearing surface mechanical lapping of a row bar or a magnetic head slider, cleaning is performed by ion beam bombardment to remove a conductive smear. Oxygen exposure is performed to recover a damaged region which was formed by ion beam bombardment at the end face of an intermediate layer of a magnetoresistive film 5. Thereafter, air-bearing surface protection films are formed and followed by rail formation. If the processes are performed on the row bar, the row bar is cut into individual separated magnetic head sliders.
摘要翻译： 本发明的实施例提供一种制造磁头滑块的方法，其通过防止在磁头滑块的空气轴承表面上形成短路而以高产率实现高记录密度，并且防止形成具有显着性的氧化层 在磁头滑块的空气轴承表面上增加有效磁间距的膜厚度。 根据一个实施例，在排杆或磁头滑块的空气轴承表面机械研磨之后，通过离子束轰击进行清洁以除去导电涂片。 进行氧曝光以回收在磁阻膜5的中间层的端面处通过离子束轰击形成的损伤区域。之后，形成空气轴承表面保护膜，然后形成轨道。 如果在行条上执行过程，则将行条切割成单独的分离的磁头滑块。
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公开(公告)号：US20080316656A1
公开(公告)日：2008-12-25
申请号：US12214748
申请日：2008-06-20
申请人： Kazuhito Miyata , Kentarou Namiki , Nobuto Yasui , Hideaki Tanaka , ATsuko Okawa , Akihiro Namba , Yoshiki Yonamoto
发明人： Kazuhito Miyata , Kentarou Namiki , Nobuto Yasui , Hideaki Tanaka , ATsuko Okawa , Akihiro Namba , Yoshiki Yonamoto
IPC分类号： G11B5/127
CPC分类号： G11B5/3163 , B82Y10/00 , B82Y25/00 , G11B5/3909 , G11B5/41 , G11B2005/3996 , Y10T29/49048
摘要： Embodiments of the present invention provide a magnetic head suitable for high density recording at a high yield by reducing the thickness of an air-bearing surface protection layer of a magnetic head and suppressing reduction in the signal-to-noise (S/N) ratio of a read element. According to one embodiment, a read element of a magnetic head has a magnetoresistive effect film (TMR film) between a lower magnetic shield layer and an upper magnetic shield layer, and has a refill film and a magnetic domain control film in both sides of the TMR film. The TMR film is configured by a lower metal layer, an antiferromagnetic layer, a ferromagnetic pinned layer, an intermediate layer, a ferromagnetic free layer, and an upper metal layer. An air-bearing surface protection layer, including a silicon nitride film about 2.0 nm in thickness, is formed on a recording medium facing surface of the TMR film. Since silicon in the silicon nitride film is inactivated by nitrogen, the silicon does not damage the TMR film. Therefore, noise of the read element can be controlled to be at a low level.
摘要翻译： 本发明的实施例通过减小磁头的空气轴承表面保护层的厚度并且抑制信噪比（S / N）比的降低来提供适于高收率地高密度记录的磁头 的读取元素。 根据一个实施例，磁头的读取元件在下磁屏蔽层和上磁屏蔽层之间具有磁阻效应膜（TMR膜），并且在该磁屏蔽的两侧具有补充膜和磁畴控制膜 TMR膜。 TMR膜由下金属层，反铁磁层，铁磁性钉扎层，中间层，铁磁性自由层和上金属层构成。 在TMR膜的面向记录介质的表面上形成包含厚度约为2.0nm的氮化硅膜的空气轴承表面保护层。 由于氮化硅膜中的硅被氮气灭活，因此硅不会损坏TMR膜。 因此，可以将读取元件的噪声控制在低水平。
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公开(公告)号：US08354034B2
公开(公告)日：2013-01-15
申请号：US12491741
申请日：2009-06-25
申请人： Nobuto Yasui , Shinji Sasaki , Kazuhito Miyata , Mineaki Kodama
发明人： Nobuto Yasui , Shinji Sasaki , Kazuhito Miyata , Mineaki Kodama
IPC分类号： B44C1/22
CPC分类号： G11B5/3163 , G11B5/102 , G11B5/3169 , G11B5/3173
摘要： A magnetic head suitable for high-density recording is provided at a high yield by a method that suppresses a reduction in reproducing output signal due to ion-beam irradiation. After an air-bearing surface of a read element, a magnetic-head element, or a row bar is mechanically polished, the air-bearing surface is irradiated with an ion beam, such that an orthographic projection of an ion-beam incidence direction onto the air-bearing surface forms an in-plane incidence angle of 30 degrees to 150 degrees or of 210 degrees to 330 degrees with respect to a track-width direction. Thereby, the formation of a short circuit due to ion-beam irradiation may be hindered.
摘要翻译： 通过抑制由离子束照射引起的再现输出信号的降低的方法，以高产率提供了适合于高密度记录的磁头。 在读取元件的空气轴承表面，磁头元件或行杆机械抛光之后，用离子束照射空气轴承表面，使得离子束入射方向的正投影到 空气轴承表面相对于轨道宽度方向形成30度至150度或210度至330度的面内入射角。 由此，可能妨碍由于离子束照射而形成的短路。
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公开(公告)号：US07805827B2
公开(公告)日：2010-10-05
申请号：US11486182
申请日：2006-07-12
申请人： Nobuto Yasui , Hiroshi Inaba , Shinji Sasaki , Kazuhito Miyata
发明人： Nobuto Yasui , Hiroshi Inaba , Shinji Sasaki , Kazuhito Miyata
CPC分类号： G11B5/3169 , G11B5/102 , G11B5/3106 , G11B5/6005 , G11B21/21 , Y10T29/49025 , Y10T29/49027 , Y10T29/4903 , Y10T29/49032 , Y10T29/49046 , Y10T29/49048
摘要： In one embodiment of the present invention, a method of producing a magnetic head slider comprises the steps of forming, on the air bearing surface of the slider, an air bearing surface overcoat, removing the surface region from a hard amorphous carbon film by the irradiation with an ion beam which is tilted with respect to a normal to the air bearing surface, and forming a rail in the air bearing surface on which the air bearing surface overcoat has been formed. A high density and covering performance are obtained when the angle of irradiating the ion beam is not smaller than about 60 degrees from a normal to the air bearing surface of the magnetic head slider and when the acceleration voltage for the ion beam is not higher than about 300 V in the step of removing part of the air bearing surface overcoat.
摘要翻译： 在本发明的一个实施例中，制造磁头滑块的方法包括以下步骤：在滑块的空气轴承表面上形成空气轴承表面外涂层，通过照射从硬的无定形碳膜上除去表面区域 具有相对于空气轴承表面的法线倾斜的离子束，并且在已经形成有空气轴承表面外涂层的空气轴承表面中形成轨道。 当照射离子束的角度与磁头滑块的空气轴承表面的法线不小于约60度时，并且当离子束的加速电压不高于约10度时，可获得高密度和覆盖性能 在去除部分空气轴承表面外套的步骤中为300V。
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公开(公告)号：US20090321389A1
公开(公告)日：2009-12-31
申请号：US12491741
申请日：2009-06-25
申请人： Nobuto Yasui , Shinji Sasaki , Kazuhito Miyata , Mineaki Kodama
发明人： Nobuto Yasui , Shinji Sasaki , Kazuhito Miyata , Mineaki Kodama
IPC分类号： B44C1/22
CPC分类号： G11B5/3163 , G11B5/102 , G11B5/3169 , G11B5/3173
摘要： A magnetic head suitable for high-density recording is provided at a high yield by a method that suppresses a reduction in reproducing output signal due to ion-beam irradiation. After an air-bearing surface of a read element, a magnetic-head element, or a row bar is mechanically polished, the air-bearing surface is irradiated with an ion beam, such that an orthographic projection of an ion-beam incidence direction onto the air-bearing surface forms an in-plane incidence angle of 30 degrees to 150 degrees or of 210 degrees to 330 degrees with respect to a track-width direction. Thereby, the formation of a short circuit due to ion-beam irradiation may be hindered.
摘要翻译： 通过抑制由离子束照射引起的再现输出信号的降低的方法，以高产率提供了适合于高密度记录的磁头。 在读取元件的空气轴承表面，磁头元件或行杆机械抛光之后，用离子束照射空气轴承表面，使得离子束入射方向的正投影到 空气轴承表面相对于轨道宽度方向形成30度至150度或210度至330度的面内入射角。 由此，可能妨碍由于离子束照射而形成的短路。
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公开(公告)号：US20070014050A1
公开(公告)日：2007-01-18
申请号：US11486182
申请日：2006-07-12
申请人： Nobuto Yasui , Hiroshi Inaba , Shinji Sasaki , Kazuhito Miyata
发明人： Nobuto Yasui , Hiroshi Inaba , Shinji Sasaki , Kazuhito Miyata
IPC分类号： G11B5/60
CPC分类号： G11B5/3169 , G11B5/102 , G11B5/3106 , G11B5/6005 , G11B21/21 , Y10T29/49025 , Y10T29/49027 , Y10T29/4903 , Y10T29/49032 , Y10T29/49046 , Y10T29/49048
摘要： A magnetic head slider having an air bearing surface overcoat that has excellent corrosion resistance and wear resistance despite its very small thickness is provided. In one embodiment, a method of producing a magnetic head slider comprises the steps of forming, on the air bearing surface of the slider, an air bearing surface overcoat which is a film stack of an amorphous silicon film and a hard amorphous carbon film, removing the surface region from the hard amorphous carbon film by the irradiation with an ion beam which is tilted with respect to a normal to the air bearing surface, and forming a rail in the air bearing surface on which the air bearing surface overcoat has been formed. The amount of the diamond component in the hard amorphous carbon film must not be smaller than about 45% and, desirably, in a range of about 60% to 85%. A high density and covering performance are obtained when the angle of irradiating the ion beam is not smaller than about 60 degrees from a normal to the air bearing surface of the magnetic head slider and when the acceleration voltage for the ion beam is not higher than about 300 V in the step of removing part of the air bearing surface overcoat.
摘要翻译： 提供具有空气轴承表面外涂层的磁头滑块，其具有优异的耐腐蚀性和耐磨性，尽管其非常小的厚度。 在一个实施例中，制造磁头滑动器的方法包括以下步骤：在滑块的空气轴承表面上形成空气轴承表面外涂层，其是非晶硅膜和硬质非晶碳膜的膜叠层，去除 通过照射相对于空气轴承表面的法线倾斜的离子束，并且在已经形成有空气轴承表面外涂层的空气轴承表面中形成轨道，来自硬非晶碳膜的表面区域。 硬质无定形碳膜中的金刚石成分的含量不得小于约45％，优选为约60％〜85％的范围。 当照射离子束的角度与磁头滑块的空气轴承表面的法线不小于约60度时，并且当离子束的加速电压不高于约10度时，可获得高密度和覆盖性能 在去除部分空气轴承表面外套的步骤中为300V。
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公开(公告)号：US20090123660A1
公开(公告)日：2009-05-14
申请号：US12288538
申请日：2008-10-20
申请人： Hiroshi Inaba , Hiroshi Kanai , Nobuto Yasui , Toshinori Ono
发明人： Hiroshi Inaba , Hiroshi Kanai , Nobuto Yasui , Toshinori Ono
CPC分类号： G11B5/855 , C23C14/042 , C23C14/048 , C23C14/0605 , C23C14/16 , C23C14/46
摘要： Embodiments of the present invention provide a manufacturing method that can form a track guide separation area of a magnetic disk substrate constituting a patterned medium represented by a discrete track medium or bit patterned medium suitable for high recording density, uniformly on the whole surface of the magnetic disk substrate, and accurately according to the mask. According to one embodiment, a soft magnetic film, an under coating film, and a magnetic film are formed on a substrate. A mask having an arbitrary pattern shape provided for forming the track guide separation area in the magnetic film is formed on the magnetic film, and the track guide separation area is formed by irradiating ions and electrons onto the surface of the magnetic film and applying an intermittent voltage to the substrate, thereby non-magnetizing the area irradiated.
摘要翻译： 本发明的实施例提供一种制造方法，其可以形成构成由适于高记录密度的离散轨道介质或位图案化介质表示的图案化介质的磁盘基板的导轨分离区域，均匀地在磁性的整个表面上 盘基片，并根据掩模准确。 根据一个实施例，在基板上形成软磁性膜，底涂层膜和磁性膜。 在磁性膜上形成设置用于形成磁性膜中的导轨分隔区域的具有任意图案形状的掩模，并且通过将离子和电子照射在磁性膜的表面上并施加间歇的方式形成轨道引导件分离区域 电压到基板，从而不使被照射的区域磁化。
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公开(公告)号：US08092560B2
公开(公告)日：2012-01-10
申请号：US11594080
申请日：2006-11-08
申请人： Hiroshi Inaba , Hiromu Chiba , Xudong Yang , Shinji Sasaki , Nobuto Yasui
发明人： Hiroshi Inaba , Hiromu Chiba , Xudong Yang , Shinji Sasaki , Nobuto Yasui
CPC分类号： B24D18/0054 , B24B37/12
摘要： Since structural portions of a device made of a plurality of materials are different from one another in mechanical hardness, it is very difficult to uniformly lap the structural portions. This is attributable to generation of machining recessions due to differences in lapped amount when large fixed abrasive grains are used, and generation of lapping marks caused by that the dropped abrasive grains rotate. Accordingly, in order to cope with the disadvantage, it is essential to surely grip abrasive grains of small size to a surface of a surface plate.[Solving Means]Abrasive grains are fixedly forced into a surface of a lapping tool with mechanical pressure and then the surface of the lapping tool including the abrasive grains is subjected to plasma processing, whereby an improvement in adhesion between the abrasive grains and a surface plate and reduction in the number of loose abrasive grains, which are dropped from the surface of the lapping tool, can be achieved, so that it is possible to realize lapping, in which a surface of a device made of a plurality of materials is made very plane.
摘要翻译： 由于由多种材料制成的装置的结构部分在机械硬度上彼此不同，所以很难均匀地研磨结构部分。 这是由于当使用大的固定磨粒时由于研磨量的差异而产生加工凹陷，并且由于下落的磨料颗粒旋转而产生研磨痕迹。 因此，为了应对这个缺点，必须将小尺寸的磨粒牢固地夹在表面板的表面上。 [解决方案]将研磨颗粒以机械压力固定地压入研磨工具的表面，然后对包含磨粒的研磨工具的表面进行等离子体处理，由此改善磨粒与表面板之间的粘合性 并且可以实现从研磨工具的表面落下的松散的磨粒的数量的减少，从而可以实现由多种材料制成的装置的表面非常成型的研磨 飞机
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公开(公告)号：US08993071B2
公开(公告)日：2015-03-31
申请号：US12288538
申请日：2008-10-20
申请人： Hiroshi Inaba , Hiroshi Kanai , Nobuto Yasui , Toshinori Ono
发明人： Hiroshi Inaba , Hiroshi Kanai , Nobuto Yasui , Toshinori Ono
CPC分类号： G11B5/855 , C23C14/042 , C23C14/048 , C23C14/0605 , C23C14/16 , C23C14/46
摘要： Embodiments of the present invention provide a manufacturing method that can form a track guide separation area of a magnetic disk substrate constituting a patterned medium represented by a discrete track medium or bit patterned medium suitable for high recording density, uniformly on the whole surface of the magnetic disk substrate, and accurately according to the mask. According to one embodiment, a soft magnetic film, an under coating film, and a magnetic film are formed on a substrate. A mask having an arbitrary pattern shape provided for forming the track guide separation area in the magnetic film is formed on the magnetic film, and the track guide separation area is formed by irradiating ions and electrons onto the surface of the magnetic film and applying an intermittent voltage to the substrate, thereby non-magnetizing the area irradiated.
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