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公开(公告)号:US20240047622A1
公开(公告)日:2024-02-08
申请号:US17879902
申请日:2022-08-03
Applicant: PALO ALTO RESEARCH CENTER INCORPORATED
Inventor: Thomas Wunderer , Max Batres , Chris Chua
CPC classification number: H01L33/465 , H01L33/007 , H01L33/06 , H01L33/24 , H01L33/32 , H01L33/38 , G02B27/0172
Abstract: A light emitting diode (LED) array includes bottom reflectors patterned as an array of closed shapes on a top plane of a base layer for III-N growth. A three-dimensional III-N structure is epitaxially grown around the array of closed shapes and extending above the bottom reflectors. The three-dimensional III-N structures is a contiguous crystalline structure extending across the array. A laterally grown III-N layer is formed in contact with both the reflectors and the three-dimensional III-N structures, and III-N LED layers are grown on the laterally grown layer. One or more top reflectors are grown or deposited on the III-N LED layers and located over the bottom reflectors.