公开(公告)号：US20250132117A1

公开(公告)日：2025-04-24

申请号：US18689842

申请日：2022-09-05

Applicant: PHOTO ELECTRON SOUL INC.

Inventor： Tomohiro NISHITANI

IPC: H01J37/073 ,  H01J37/244 ,  H01J37/28 ,  H01J37/285

Abstract: An object is to provide a creation method of detection data based on a novel principle. The creation method includes: an electron beam irradiation step of irradiating an irradiation region with an electron beam; a detection step of detecting an emission quantity data from the irradiation region and generating a detection signal; a quantity of light adjustment step of adjusting a quantity of light reaching a photocathode from a light source so that a signal intensity of the detection signal is a preset value; a step of repeating the electron beam irradiation step, the detection step, and the quantity of light adjustment step until the signal intensity of the detection signal becomes the preset value; and a detection data output step of outputting the quantity of light adjustment data where the signal intensity of the detection signal is the preset value as detection data on the irradiation region.

公开(公告)号：US20240212967A1

公开(公告)日：2024-06-27

申请号：US18556080

申请日：2022-03-25

Applicant: Photo electron Soul Inc.

Inventor： Tomohiro NISHITANI

IPC: H01J37/073

CPC classification number: H01J37/073 ,  H01J2237/0473 ,  H01J2237/06333 ,  H01J2237/0653 ,  H01J2237/0835 ,  H01J2237/30483

Abstract: Provided is an electron gun that can have a setting to make it possible to irradiate a desired location on an irradiation target with an electron beam having a desired electron beam parameter by using only the component included in the electron gun. This object can be achieved by an electron gun including: a light source; a photocathode configured to generate releasable electrons in response to receiving light from the light source; an anode configured to generate an electric field between the photocathode and the anode, extract the releasable electrons by the generated electric field, and form an electron beam; and a control unit, and the control unit sets the number of emission times of the electron beam and sets an electron beam parameter for each emitting electron beam, or sets an emission duration of the electron beam and sets an electron beam parameter of an emitting electron beam in association with the emission duration.

公开(公告)号：US20240222062A1

公开(公告)日：2024-07-04

申请号：US18556076

申请日：2022-03-25

Applicant: Photo electron Soul, Inc.

Inventor： Tomohiro NISHITANI

IPC: H01J37/147 ,  H01J1/34 ,  H01J37/073

CPC classification number: H01J37/1471 ,  H01J1/34 ,  H01J37/073 ,  H01J2201/3423 ,  H01J2237/0203

Abstract: Provided are an electron gun that can extend the lifetime of a photocathode, an electron beam applicator on which the electron gun is mounted, and an irradiation position moving method. This object can be achieved by an electron gun including: a light source; a photocathode that emits an electron beam in response to receiving light from the light source; an anode; a motion device that moves excitation light irradiating the photocathode; and a control unit, the control unit controls the motion device to move an irradiation position of the excitation light from a position Rn (n is a natural number) on the photocathode to a position Rn+1 outside an excitation light irradiation-caused deteriorated range associated with the position Rn, the excitation light irradiation-caused deteriorated range is a range where the photocathode is deteriorated due to irradiation with the excitation light, and the distance between the center of a spot of the excitation light at the position Rn and the center of a spot of the excitation light at the position Rn+1 is at least three or more times a spot diameter of the excitation light on the photocathode.

公开(公告)号：US20240412939A1

公开(公告)日：2024-12-12

申请号：US18702780

申请日：2022-10-17

Applicant: PHOTO ELECTRON SOUL INC.

Inventor： Tomohiro NISHITANI

IPC: H01J37/073 ,  H01J1/34 ,  H01J37/244 ,  H01J37/28

Abstract: This electron beam applicator includes: a light source; a photocathode; an anode; a detector; and a control unit. The photocathode receives two or more pulsed excitation light beams, and are emitted so that the excitation light beams are received by the photocathode at different timings, the control unit sets two or more irradiation regions and causes two or more pulsed electron beams formed in response to receiving the two or more pulsed excitation light beams of the different timings to be emitted to different irradiation regions, respectively, the detector generates detection signals by detecting, at different timings, pulsed emitted substances emitted from the different irradiation regions and outputs the generated detection signals in association with position information on the different irradiation regions, and the number of detectors is less than the number of electron beams emitted to the irradiation targets.

公开(公告)号：US20220199350A1

公开(公告)日：2022-06-23

申请号：US17604373

申请日：2020-10-13

Applicant: Photo electron Soul Inc.

Inventor： Tomohiro NISHITANI

IPC: H01J37/075 ,  H01J37/12 ,  H01J37/28

Abstract: An object is to provide an electron beam applicator suitable for an electron gun having a photocathode and an electron beam emission method in the electron beam applicator. The object can be achieved by an electron beam applicator including: an electron gun section; a main body section; and a control unit. The electron gun section includes a light source, a photocathode that emits an electron beam in response to receiving excitation light emitted from the light source, and an anode. The main body section includes an objective lens that converges an electron beam emitted from the electron gun section. The control unit controls at least convergence power of the objective lens in accordance with a size of an electron beam emitted from the photocathode.