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公开(公告)号：US12080507B2
公开(公告)日：2024-09-03
申请号：US17763186
申请日：2020-09-04
Applicant: Photo electron Soul Inc.
Inventor： Hokuto Iijima
IPC: H01J3/02 , H01J1/34 , H01J1/52 , H01J3/10 , H01J37/073
CPC classification number: H01J3/021 , H01J1/34 , H01J1/52 , H01J3/10 , H01J37/073 , H01J2237/06333
Abstract: An object is to provide an electron gun that makes it possible to verify whether or not an electron beam emitted form a photocathode is misaligned from a designed emission center axis. The object can be achieved by an electron gun including: a light source; a photocathode; and an anode. The electron gun includes an intermediate electrode arranged between the photocathode and the anode, an electron beam shielding member configured to block a part of an electron beam, a measurement unit configured to measure an intensity of an electron beam blocked by the electron beam shielding member, and an electron beam emission direction deflector arranged between the anode and the electron beam shielding member and configured to change a position where an electron beam that passed through the anode reaches the electron beam shielding member. The intermediate electrode has an electron beam passage hole and a drift space.
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公开(公告)号：US11842879B2
公开(公告)日：2023-12-12
申请号：US17996213
申请日：2021-08-20
Applicant: PHOTO ELECTRON SOUL INC.
Inventor： Tomohiro Nishitani
IPC: H01J37/073
CPC classification number: H01J37/073 , H01J2237/024 , H01J2237/06333 , H01J2237/06375
Abstract: Provided are an electron gun, an electron gun component, an electron beam applicator, and an alignment method that can align the emission axis of an electron beam with the optical axis of the electron optical system of the counterpart device even when misalignment of a mounted position of the electron gun being mounted to the counterpart device is larger. The electron gun includes: a light source; a vacuum chamber; a photocathode that emits an electron beam in response to receiving light from the light source; an electrode kit; and an electrode kit drive device, the electrode kit includes a photocathode supporting part, and an anode arranged spaced apart from the photocathode supporting part, the photocathode is placed on the photocathode supporting part, and the electrode kit drive device moves the electrode kit in an X-Y plane, where one direction is defined as an X direction, a direction orthogonal to the X direction is defined as a Y direction, and a plane including the X direction and the Y direction is defined as the X-Y plane.
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公开(公告)号：US20230395349A1
公开(公告)日：2023-12-07
申请号：US17830244
申请日：2022-06-01
Applicant: KLA Corporation
Inventor： Xinrong Jiang , Youfei Jiang , Michael Steigerwald , Ralph Nyffenegger
IPC: H01J37/073 , H01J37/28 , H01J37/147 , H01J37/22 , H01J37/12 , H01J37/14
CPC classification number: H01J37/073 , H01J37/28 , H01J37/1472 , H01J37/22 , H01J37/12 , H01J37/14 , H01J2237/103 , H01J2237/2448 , H01J2237/0492 , H01J2237/06333
Abstract: An electron-beam device includes a laser and a photocathode film. The photocathode film has a front side and a back side and emits a plurality of electron beamlets when illuminated from the back side using the laser. The electron-beam device also includes electrodes to extract the plurality of electron beamlets from the front side of the photocathode film and to control shapes of the plurality of electron beamlets.
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公开(公告)号：US09934926B2
公开(公告)日：2018-04-03
申请号：US14904945
申请日：2014-06-12
Inventor： Tomohiro Nishitani
IPC: H01J1/34 , H01J37/06 , H01J37/073
CPC classification number: H01J1/34 , H01J37/06 , H01J37/073 , H01J2237/06333 , H01J2237/2602
Abstract: The present disclosure provides a treatment device for lowering electron affinity. The treatment device is capable of performing an electron affinity (EA) surface treatment on a photocathode material or an EA surface retreatment on a photocathode. The present disclosure also provides an electron-beam device provided with the treatment device. An activation chamber is used in a treatment device for lowering electron affinity by vaporizing a surface-treatment material and uses the vaporized surface-treatment material to perform an electron-affinity lowering treatment on a photocathode material or an electron-affinity lowering retreatment on a photocathode. The activation chamber includes one or more holes through which electrons can pass.
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公开(公告)号：US09406479B1
公开(公告)日：2016-08-02
申请号：US14751087
申请日：2015-06-25
Applicant: Marian Mankos
Inventor： Marian Mankos
IPC: G21K5/04 , H01J37/147 , H01J37/285 , H01J37/28 , H01J37/20 , H01J37/14
CPC classification number: H01J37/28 , G01R31/307 , G01R31/44 , H01J37/045 , H01J37/153 , H01J2237/0432 , H01J2237/06333 , H01J2237/065 , H01J2237/1523 , H01J2237/1534 , H01J2237/2802 , H01J2237/2803
Abstract: One embodiment pertains to an apparatus for compressing an electron pulse. An electron source is illuminated by a pulsed laser and generates a pulse of electrons. The pulse enters a beam separator which deflects the electrons by 90 degrees into an electron mirror. The faster, higher energy electrons form the leading edge of the pulse and penetrate more deeply into the retarding field of the electron mirror than the lower energy electrons. After reflection, the lower energy electrons exit the electron mirror before the higher energy electrons and form the leading edge of the pulse. The reflected pulse reenters the separator and is deflected by 90 degrees towards the specimen. The fast, higher energy electrons catch up with the slow, low energy electrons as the electrons strike the specimen. The electrons are scattered by the specimen and used to form a two-dimensional image or diffraction pattern of the specimen.
Abstract translation: 一个实施例涉及一种用于压缩电子脉冲的装置。 电子源被脉冲激光照射并产生电子脉冲。 脉冲进入光束分离器，将电子偏转90度，使其成为电子反射镜。 更快，更高能量的电子形成脉冲的前沿，并且比较低能量电子更深入地进入电子反射镜的延迟场。 在反射之后，较低能量的电子在较高能量的电子之前离开电子反射镜并形成脉冲的前沿。 反射的脉冲重新进入分离器，并向样品偏转90度。 随着电子撞击样品，快速，高能量的电子赶上缓慢的低能电子。 电子被样品散射并用于形成样品的二维图像或衍射图案。
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Patent Agency Ranking
公开(公告)号：US09224571B2
公开(公告)日：2015-12-29
申请号：US13825918
申请日：2011-09-26
Applicant: Junji Urakawa , Nobuhiro Terunuma , Toshikazu Takatomi
Inventor： Junji Urakawa , Nobuhiro Terunuma , Toshikazu Takatomi
CPC classification number: H01J29/481 , H01J3/021 , H01J3/36 , H01J23/06 , H01J25/04 , H01J2237/0432 , H01J2237/04735 , H01J2237/062 , H01J2237/06333 , H05G2/00 , H05H7/08 , H05H2007/084
Abstract: A photocathode high-frequency electron-gun cavity apparatus of the present invention is provided with a high-frequency acceleration cavity (1), a photocathode (8, 15), a laser entering port (9), a high-frequency power input coupler port (10), and a high-frequency resonant tuner (16). Here, the apparatus adopts an ultra-small high-frequency accelerator cavity which contains a cavity cell formed only with a smooth and curved surface at an inner face thereof without having a sharp angle part for preventing discharging, obtaining higher strength of high-frequency electric field, and improving high-frequency resonance stability. Further, the photocathode is arranged at an end part of a half cell (5) of the high-frequency acceleration cavity for maximizing electric field strength at the photocathode face, perpendicular incidence of laser is ensured by arranging a laser entering port at a position facing to the photocathode behind an electron beam extraction port of the high-frequency acceleration cavity for maximizing quality of short-bunch photoelectrons, and a high-frequency power input coupler port is arranged at a side part of the cell of the high-frequency acceleration cavity for enhancing high-frequency electric field strength. According to the above, it is possible to provide a small photocathode high-frequency electron-gun cavity apparatus capable of generating a high-strength and high-quality electron beam.
Abstract translation: 本发明的光电阴极高频电子枪腔装置设置有高频加速腔（1），光电阴极（8,15），激光进入口（9），高频电力输入耦合器 端口（10）和高频谐振调谐器（16）。 这里，该装置采用超小型高频加速器腔，其包含在其内表面上仅形成有平滑且曲面的空腔，而不具有用于防止放电的锐角部，从而获得较高强度的高频电 场，提高高频共振稳定性。 此外，光电阴极被布置在高频加速腔的半电池（5）的端部，用于使光电阴极面的电场强度最大化，通过将激光进入端口布置在面对的位置来确保激光的垂直入射 到高频加速腔的电子束提取口后面的光电阴极，用于使短束光电子的质量最大化，并且高频电力输入耦合器端口布置在高频加速腔的单元的侧面 用于提高高频电场强度。 根据上述，可以提供能够产生高强度和高质量电子束的小型光电阴极高频电子枪腔装置。
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公开(公告)号：US09093243B2
公开(公告)日：2015-07-28
申请号：US14284128
申请日：2014-05-21
Applicant: NATIONAL UNIVERSITY OF SINGAPORE
Inventor： Anjam Khursheed
CPC classification number: H01J3/18 , H01J3/021 , H01J3/027 , H01J3/20 , H01J37/063 , H01J37/065 , H01J37/26 , H01J2237/06333 , H01J2237/0635 , H01J2237/1534
Abstract: A gun configured to generate charged particles, comprising a ring-cathode (200) electrically configured to generate a charged particle beam; a lens arranged to focus the charged particle beam on a specimen; and at least one correction focusing electrode (1406) arranged to generate at least one electrostatic/magnetic field to further divergently/convergently focus the charged particle beam for correcting in-plane geometric aberrations associated with the lens, the focusing being based on the in-plane geometric aberrations associated with the lens. A related method is also disclosed.
Abstract translation: 一种配置成产生带电粒子的枪，包括电气配置以产生带电粒子束的环形阴极（200）; 透镜，布置成将带电粒子束聚焦在样本上; 以及至少一个校正聚焦电极（1406），其布置成产生至少一个静电/磁场，以进一步发散/收敛地聚焦带电粒子束，用于校正与透镜相关联的面内几何像差， 与透镜相关的平面几何像差。 还公开了相关方法。
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公开(公告)号：US20130193342A1
公开(公告)日：2013-08-01
申请号：US13795291
申请日：2013-03-12
Applicant: ATTOLIGHT SA
Inventor： Jean Berney
IPC: G21K1/00
CPC classification number: G21K1/00 , G01N23/2254 , H01J37/222 , H01J37/28 , H01J2237/06333 , H01J2237/226 , H01J2237/2611 , H01J2237/2808 , H01J2237/30472
Abstract: A method for generating a cathodoluminescence map comprising the steps of: generating an intensity modulated charged particle beam; focusing said charged particle beam on a specimen; gating temporally the cathodoluminescence emitted by said specimen to provide time-gated cathodoluminescence; measuring the time-gated cathodoluminescence for different charged particle beam positions on the specimen to generate a cathodoluminescence map; deconvoluting the cathodoluminescence map to improve the resolution of said cathodoluminescence map. The invention further provides devices for carrying out such methods.
Abstract translation: 一种用于产生阴极发光图的方法，包括以下步骤：产生强度调制带电粒子束; 将所述带电粒子束聚焦在样品上; 定时地选择由所述样品发射的阴极发光，以提供时间门控的阴极发光; 测量样品上不同带电粒子束位置的时间门阴极发光以产生阴极发光图; 解卷积阴极发光图以改善所述阴极发光图的分辨率。 本发明还提供了用于执行这种方法的装置。
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公开(公告)号：US20130187541A1
公开(公告)日：2013-07-25
申请号：US13825918
申请日：2011-09-26
Applicant: Junji Urakawa , Nobuhiro Terunuma , Toshikazu Takatomi
Inventor： Junji Urakawa , Nobuhiro Terunuma , Toshikazu Takatomi
IPC: H01J29/48
CPC classification number: H01J29/481 , H01J3/021 , H01J3/36 , H01J23/06 , H01J25/04 , H01J2237/0432 , H01J2237/04735 , H01J2237/062 , H01J2237/06333 , H05G2/00 , H05H7/08 , H05H2007/084
Abstract: A photocathode high-frequency electron-gun cavity apparatus of the present invention is provided with a high-frequency acceleration cavity (1), a photocathode (8, 15), a laser entering port (9), a high-frequency power input coupler port (10), and a high-frequency resonant tuner (16). Here, the apparatus adopts an ultra-small high-frequency accelerator cavity which contains a cavity cell formed only with a smooth and curved surface at an inner face thereof without having a sharp angle part for preventing discharging, obtaining higher strength of high-frequency electric field, and improving high-frequency resonance stability. Further, the photocathode is arranged at an end part of a half cell (5) of the high-frequency acceleration cavity for maximizing electric field strength at the photocathode face, perpendicular incidence of laser is ensured by arranging a laser entering port at a position facing to the photocathode behind an electron beam extraction port of the high-frequency acceleration cavity for maximizing quality of short-bunch photoelectrons, and a high-frequency power input coupler port is arranged at a side part of the cell of the high-frequency acceleration cavity for enhancing high-frequency electric field strength. According to the above, it is possible to provide a small photocathode high-frequency electron-gun cavity apparatus capable of generating a high-strength and high-quality electron beam.
Abstract translation: 本发明的光电阴极高频电子枪腔装置设置有高频加速腔（1），光电阴极（8,15），激光进入口（9），高频电力输入耦合器 端口（10）和高频谐振调谐器（16）。 这里，该装置采用超小型高频加速器腔，其包含在其内表面上仅形成有平滑且曲面的空腔，而不具有用于防止放电的锐角部，从而获得较高强度的高频电 场，提高高频共振稳定性。 此外，光电阴极被布置在高频加速腔的半电池（5）的端部，用于使光电阴极面的电场强度最大化，通过将激光进入端口布置在面对的位置来确保激光的垂直入射 到高频加速腔的电子束提取口后面的光电阴极，用于使短束光电子的质量最大化，并且高频电力输入耦合器端口布置在高频加速腔的单元的侧面 用于提高高频电场强度。 根据上述，可以提供能够产生高强度和高质量电子束的小型光电阴极高频电子枪腔装置。
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公开(公告)号：US20130009058A1
公开(公告)日：2013-01-10
申请号：US13637227
申请日：2011-02-22
Applicant: Nobuo Tanaka , Tsutomu Nakanishi , Yoshikazu Takeda , Hidefumi Asano , Koh Saitoh , Toru Ujihara , Makoto Kuwahara
Inventor： Nobuo Tanaka , Tsutomu Nakanishi , Yoshikazu Takeda , Hidefumi Asano , Koh Saitoh , Toru Ujihara , Makoto Kuwahara
CPC classification number: H01J37/26 , H01J37/073 , H01J37/265 , H01J37/266 , H01J2237/06333 , H01J2237/06383 , H01J2237/24557
Abstract: An electron microscope which utilizes a polarized electron beam and can obtain a high contrast image of a sample is provided. The microscope includes: a laser; a polarization apparatus that polarizes a laser beam into a circularly polarized laser beam; a semiconductor photocathode that is provided with a strained superlattice semiconductor layer and generates a polarized electron beam when irradiated with the circularly polarized laser beam; a transmission electron microscope that utilizes the polarized electron beam; an electron beam intensity distribution recording apparatus arranged at a face reached by the polarized electron beam that has transmitted through the sample. An electron beam intensity distribution recording apparatus records an intensity distribution before and after the polarization of the electron beam is reversed, and a difference acquisition apparatus calculates a difference therebetween.
Abstract translation: 提供了利用偏振电子束并且可以获得样品的高对比度图像的电子显微镜。 显微镜包括：激光; 将激光束偏振成圆偏振激光束的偏振装置; 半导体光电阴极，其设置有应变超晶格半导体层，并且当被圆偏振激光束照射时产生偏振电子束; 利用偏振电子束的透射电子显微镜; 电子束强度分布记录装置，布置在透过样品的偏振电子束所达到的面上。 电子束强度分布记录装置记录电子束的偏振前后的强度分布，差分获取装置计算其间的差。
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