Method for producing a buried semiconductor layer
    2.
    发明授权
    Method for producing a buried semiconductor layer 有权
    掩埋半导体层的制造方法

    公开(公告)号:US07582531B2

    公开(公告)日:2009-09-01

    申请号:US11364882

    申请日:2006-02-28

    IPC分类号: H01L21/336

    摘要: A method for producing a region of increased doping in an n-doped semiconductor layer which is buried in a semiconductor body of a vertical power transistor and which is arranged between a p-doped body region facing the front side contact of the power transistor and an n-doped substrate facing the rear side contact of the power transistor has the following steps: a) irradiation of at least one part of the surface of the semiconductor body with protons, and b) heat treatment of the semiconductor body.

    摘要翻译: 一种在n掺杂半导体层中产生增加的掺杂区域的方法,该n掺杂半导体层被埋在垂直功率晶体管的半导体本体中并且被布置在面向功率晶体管的前侧接触的p掺杂体区域和 面向功率晶体管的后侧接触的n掺杂衬底具有以下步骤:a)用质子照射半导体主体的至少一部分表面,以及b)半导体本体的热处理。

    Transistor arrangement with a MOSFET
    7.
    发明授权
    Transistor arrangement with a MOSFET 有权
    具有MOSFET的晶体管布置

    公开(公告)号:US08587059B2

    公开(公告)日:2013-11-19

    申请号:US13092546

    申请日:2011-04-22

    IPC分类号: H01L29/66

    摘要: A semiconductor arrangement includes a MOSFET having a source region, a drift region and a drain region of a first conductivity type, a body region of a second conductivity type arranged between the source region and the drift region, a gate electrode arranged adjacent the body region and dielectrically insulated from the body region by a gate dielectric, and a source electrode contacting the source region and the body region. The semiconductor arrangement further includes a normally-off JFET having a channel region of the first conductivity type that is coupled between the source electrode and the drift region and extends adjacent the body region so that a p-n junction is formed between the body region and the channel region.

    摘要翻译: 半导体装置包括具有第一导电类型的源极区域,漂移区域和漏极区域的MOSFET,设置在源极区域和漂移区域之间的第二导电类型的体区域,邻近体区域布置的栅电极 并通过栅极电介质与体区电介质绝缘,以及与源区和身体区接触的源电极。 该半导体装置还包括常闭JFET,其具有第一导电类型的沟道区,该沟道区耦合在源电极和漂移区之间并且在身体区附近延伸,使得在体区和通道之间形成pn结 地区。