公开(公告)号：US09176398B2

公开(公告)日：2015-11-03

申请号：US12996945

申请日：2009-05-20

申请人： Roger Wilhelmus Antonius Henricus Schmitz ,  Tjarko Adriaan Rudolf Van Empel ,  Marcel Johannus Elisabeth Hubertus Muitjens ,  Lun Cheng ,  Franciscus Johannes Joseph Janssen ,  Willem Arie Van Helden ,  Richard Versluis ,  Paulus Bartholomeus Johannes Schaareman ,  Axel Sebastiaan Lexmond ,  Evert Nieuwkoop ,  Charles William Barras Potts ,  Martinus Henricus Johannes Lemmen ,  Frederik Van Der Graaf ,  Mathilde Gertrudis Maria De Kroon ,  Johannes Fransiscus Maria Velthuis

发明人： Roger Wilhelmus Antonius Henricus Schmitz ,  Tjarko Adriaan Rudolf Van Empel ,  Marcel Johannus Elisabeth Hubertus Muitjens ,  Lun Cheng ,  Franciscus Johannes Joseph Janssen ,  Willem Arie Van Helden ,  Richard Versluis ,  Paulus Bartholomeus Johannes Schaareman ,  Axel Sebastiaan Lexmond ,  Evert Nieuwkoop ,  Charles William Barras Potts ,  Martinus Henricus Johannes Lemmen ,  Frederik Van Der Graaf ,  Mathilde Gertrudis Maria De Kroon ,  Johannes Fransiscus Maria Velthuis

IPC分类号： G02B7/02 ,  G02B7/18 ,  G03B27/32 ,  G03B27/52 ,  G03B27/58 ,  G03B27/62 ,  G03F7/20 ,  G02B7/00

CPC分类号： G03F7/70891 ,  G02B7/008 ,  G03F7/70875 ,  G03F7/709 ,  G03F7/70983 ,  G21K2201/067

摘要： A method for thermally conditioning an optical element includes irradiating the optical element with radiation, not-irradiating the optical element with the radiation, allowing heat flow between the optical element and a conditioning fluid that is held in a conditioning fluid reservoir, and providing a fluid flow of the conditioning fluid, to supply thermally conditioned fluid to the reservoir. A flow rate of the fluid during the irradiating of the optical element is lower than a flow rate of the fluid when the optical element is not-irradiated.

摘要翻译： 用于热调节光学元件的方法包括用辐射照射光学元件，不用辐射照射光学元件，允许光学元件和保持在调节液体储存器中的调节流体之间的热流动，并且提供流体 调节流体的流动，以将热调节的流体供应到储存器。 在光学元件的照射期间，流体的流量比不照射光学元件时的流体的流量低。

公开(公告)号：US20110310368A1

公开(公告)日：2011-12-22

申请号：US12996945

申请日：2009-05-20

申请人： Roger Wilhelmus Antonius Henricus Schmitz ,  Tjarko Adriaan Rudolf Van Empel ,  Marcel Johannus Elisabeth Hubertus Muitjens ,  Lun Cheng ,  Franciscus Johannes Joseph Janssen ,  William Arie Van Helden ,  Richard Versluis ,  Paulus Bartholomeus Johannes Schaareman ,  Axel Sebastiaan Lexmond ,  Evert Nieuwkoop ,  Charles William Barras Potts ,  Martinus Henricus Johannes Lemmen ,  Frederik Van Der Graaf ,  Mathilde Gertrudis Maria De Kroon ,  Johannes Fransiscus Maria Velthuis

发明人： Roger Wilhelmus Antonius Henricus Schmitz ,  Tjarko Adriaan Rudolf Van Empel ,  Marcel Johannus Elisabeth Hubertus Muitjens ,  Lun Cheng ,  Franciscus Johannes Joseph Janssen ,  William Arie Van Helden ,  Richard Versluis ,  Paulus Bartholomeus Johannes Schaareman ,  Axel Sebastiaan Lexmond ,  Evert Nieuwkoop ,  Charles William Barras Potts ,  Martinus Henricus Johannes Lemmen ,  Frederik Van Der Graaf ,  Mathilde Gertrudis Maria De Kroon ,  Johannes Fransiscus Maria Velthuis

IPC分类号： G03B27/42 ,  G03F7/20

CPC分类号： G03F7/70891 ,  G02B7/008 ,  G03F7/70875 ,  G03F7/709 ,  G03F7/70983 ,  G21K2201/067

摘要： A method for thermally conditioning an optical element includes irradiating the optical element with radiation, not-irradiating the optical element with the radiation, allowing heat flow between the optical element and a conditioning fluid that is held in a conditioning fluid reservoir, and providing a fluid flow of the conditioning fluid, to supply thermally conditioned fluid to the reservoir. A flow rate of the fluid during the irradiating of the optical element is lower than a flow rate of the fluid when the optical element is not-irradiated.

摘要翻译： 用于热调节光学元件的方法包括用辐射照射光学元件，不用辐射照射光学元件，允许光学元件和保持在调节液体储存器中的调节流体之间的热流动，并且提供流体 调节流体的流动，以将热调节的流体供应到储存器。 在光学元件的照射期间，流体的流量比不照射光学元件时的流体的流量低。

公开(公告)号：US20130063833A1

公开(公告)日：2013-03-14

申请号：US13519812

申请日：2010-12-29

申请人： Martinus Henricus Johannes Lemmen

发明人： Martinus Henricus Johannes Lemmen

IPC分类号： G02B7/195

CPC分类号： G02B7/1815 ,  G03F7/70316 ,  G03F7/70891

摘要： A mirror module is provided with comprising a reflective element, a supporting base element attached to the reflective element, and a heat exchange element for transferring heat to and/or from the mirror module. The mirror module, more in particular the reflective element, is stabilized against possible deformation due to a thermal load. The stabilized mirror module comprises heat pumps, for example Peltier elements, for transferring heat between the heat exchange element on one hand and the reflective element and the base element on the other hand, more in particular for cooling the reflective element. A method is provided to stabilize a mirror module wherein a heat flow is measured to stabilise the shape of a reflective element.

摘要翻译： 反射镜模块设置有反射元件，附接到反射元件的支撑基座元件和用于将热量传递到和/或从反射镜模块传递的热交换元件。 反射镜模块，更具体地说是反射元件，由于热负荷而被稳定以防止可能的变形。 稳定的反射镜模块包括热泵，例如珀尔帖（Peltier）元件，用于在一方面的热交换元件与反射元件和基底元件之间传递热量，特别是用于冷却反射元件。 提供了一种稳定反射镜模块的方法，其中测量热流以稳定反射元件的形状。