METHOD OF MANUFACTURING NANOSTRUCTURE SEMICONDUCTOR LIGHT EMITTING DEVICE
    2.
    发明申请
    METHOD OF MANUFACTURING NANOSTRUCTURE SEMICONDUCTOR LIGHT EMITTING DEVICE 审中-公开
    制造纳米结构半导体发光器件的方法

    公开(公告)号:US20160118533A1

    公开(公告)日:2016-04-28

    申请号:US14887466

    申请日:2015-10-20

    CPC classification number: H01L33/005 H01L33/007 H01L33/08 H01L33/18 H01L33/24

    Abstract: A method of manufacturing a nanostructure semiconductor light emitting device may include: stacking a mask layer on a conductive base layer and forming a through hole penetrating the mask layer; growing a nanocore through the through hole from the conductive base layer using precursor gas including indium-containing precursor gas in a mixed gas atmosphere of nitrogen and hydrogen; removing the mask layer; and sequentially growing an active layer and a first conductivity type semiconductor layer on a surface of the nanocore.

    Abstract translation: 制造纳米结构半导体发光器件的方法可以包括:在导电基底层上堆叠掩模层并形成穿透掩模层的通孔; 在氮和氢的混合气体气氛中,使用包括含铟前体气体的前体气体,从导电性基底层通过通孔生长纳米孔; 去除掩模层; 并在纳米孔的表面上依次生长有源层和第一导电型半导体层。

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