Liquid drop discharge apparatus
    3.
    发明授权

    公开(公告)号:US11161337B2

    公开(公告)日:2021-11-02

    申请号:US16920359

    申请日:2020-07-02

    Abstract: A liquid drop discharge apparatus is proposed. The liquid drop discharge apparatus includes: an inkjet head discharging ink to each of pixels of a substrate; a laser emitter coupled to the inkjet head, and emitting an aiming laser beam by which a discharged position of a liquid drop from the inkjet head to each of the pixels is aimed; a camera capturing an emitted position of the aiming laser beam on the substrate; and a position alignment unit aligning a position of the inkjet head on the basis of image data obtained from the shooting unit.

    Meniscus measuring apparatus and method, substrate processing apparatus

    公开(公告)号:US12251944B2

    公开(公告)日:2025-03-18

    申请号:US17885552

    申请日:2022-08-11

    Abstract: A meniscus measuring method capable of quickly and accurately measuring meniscus positions in a plurality of nozzles of an inkjet head can be provided. The meniscus measuring method comprises providing a head unit capable of discharging ink through a plurality of nozzles, adhering ink remaining in the plurality of nozzles to a film to form a detection pattern on the film by bringing the film into close contact with the plurality of nozzles, measuring meniscus of ink remaining in the plurality of nozzles based on the detection pattern.

    FRINGE INFORMATION MEASURING APPARATUS AND SUBSTRATE TREATING SYSTEM INCLUDING THE SAME

    公开(公告)号:US20230134959A1

    公开(公告)日:2023-05-04

    申请号:US17958435

    申请日:2022-10-03

    Abstract: Provided are a fringe information measuring apparatus that measures information on a fringe region using a temperature sensor array and a substrate treating system including the same. The fringe information measuring apparatus comprises: a laser sensor configured to output a first laser light and a second laser light to intersect each other; a thermal sensor array configured to pass through a fringe region formed by the intersection of the first laser light and the second laser light; and a control module configured to measure a position of the fringe region based on information obtained when the thermal sensor array passes through the fringe region.

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