公开(公告)号：US20230352319A1

公开(公告)日：2023-11-02

申请号：US18302287

申请日：2023-04-18

Applicant: SEMES CO., LTD.

Inventor： Jun Seok LEE ,  Beomjeong OH ,  Subeom JEON ,  Jeong Ho JO

IPC: H01L21/67 ,  H01L21/02

CPC classification number: H01L21/67051 ,  H01L21/6715 ,  H01L21/02052

Abstract: Provided is a treatment liquid ejection method and apparatus capable of significantly increasing productivity and quality by greatly reducing a maintenance time of a head unit, the treatment liquid ejection method including (a) obtaining test image information by test-photographing a treatment liquid test-printed by a head unit, (b) generating nozzle-specific characteristic information by using the test image information, (c) generating print file information to be printed, in consideration of the nozzle-specific characteristic information, (d) reflecting recipe information of a substrate or the head unit to prepare the print file information in an outputtable state, and (e) printing, on the substrate by the head unit, the print file information to which the recipe information is reflected.