公开(公告)号：US20230352319A1

公开(公告)日：2023-11-02

申请号：US18302287

申请日：2023-04-18

Applicant: SEMES CO., LTD.

Inventor： Jun Seok LEE ,  Beomjeong OH ,  Subeom JEON ,  Jeong Ho JO

IPC: H01L21/67 ,  H01L21/02

CPC classification number: H01L21/67051 ,  H01L21/6715 ,  H01L21/02052

Abstract: Provided is a treatment liquid ejection method and apparatus capable of significantly increasing productivity and quality by greatly reducing a maintenance time of a head unit, the treatment liquid ejection method including (a) obtaining test image information by test-photographing a treatment liquid test-printed by a head unit, (b) generating nozzle-specific characteristic information by using the test image information, (c) generating print file information to be printed, in consideration of the nozzle-specific characteristic information, (d) reflecting recipe information of a substrate or the head unit to prepare the print file information in an outputtable state, and (e) printing, on the substrate by the head unit, the print file information to which the recipe information is reflected.

公开(公告)号：US20240149599A1

公开(公告)日：2024-05-09

申请号：US18495494

申请日：2023-10-26

Applicant: SEMES CO., LTD.

Inventor： Beomjeong OH ,  Jong Nam NA

IPC: B41J29/393 ,  B41J2/045

CPC classification number: B41J29/393 ,  B41J2/04505

Abstract: Provided is a substrate processing apparatus control system and substrate processing apparatus control method, the substrate processing apparatus control system including an image generator for generating an image to be printed by a substrate processing apparatus including an inkjet head unit to print the image on a substrate in an inkjet printing manner, a jetting driver for receiving an image signal from the image generator and outputting a jetting signal to the inkjet head unit to allow the substrate processing apparatus to print the image on the substrate based on the image signal, and a motion controller for controlling operation of a stage unit for supporting and moving the substrate in the substrate processing apparatus.

公开(公告)号：US20240092082A1

公开(公告)日：2024-03-21

申请号：US18462581

申请日：2023-09-07

Applicant: SEMES CO., LTD.

Inventor： Chulwoo KIM ,  Beomjeong OH

IPC: B41J2/165 ,  B41J2/17 ,  B41J29/17

CPC classification number: B41J2/16517 ,  B41J2/1714 ,  B41J29/17

Abstract: A chemical liquid removing unit may remove a remaining chemical liquid from an ink jet head. The chemical liquid removing unit may include a surface tension providing part configured to remove the remaining chemical liquid from a nozzle face of the ink jet head using a surface tension, a driving part configured to move the surface tension providing part relative to the nozzle face the ink jet head, and a control part configured to control the driving part such that the surface tension providing part contacts the remaining chemical liquid whereas the surface tension providing part does not contact the nozzle face of the ink jet head.

公开(公告)号：US20210023836A1

公开(公告)日：2021-01-28

申请号：US16933029

申请日：2020-07-20

Applicant: Semes Co., Ltd.

Inventor： Chulwoo KIM ,  Sanghwa LEE ,  Beomjeong OH

IPC: B41J2/045

Abstract: In a printing method using an ink jet head, a chemical liquid may be discharged onto a substrate from a plurality of nozzles of the ink jet head. Discharging numbers of the chemical liquid from the plurality of nozzles may be identified and a cumulative discharging number of the chemical liquid from the plurality of nozzles may be calculated. The cumulative discharging number of the chemical liquid may be compared with a previously set limit discharging number of the ink jet head. A replacement time of the ink jet head may be determined if the cumulative discharging number of the chemical liquid exceeds the previously set limit discharging number.