Peeling method, semiconductor device, and peeling apparatus

    公开(公告)号:US11355382B2

    公开(公告)日:2022-06-07

    申请号:US16850185

    申请日:2020-04-16

    摘要: To improve peelability, yield in a peeling step, and yield in manufacturing a flexible device. A peeling method is employed which includes a first step of forming a peeling layer containing tungsten over a support substrate; a second step of forming, over the peeling layer, a layer to be peeled formed of a stack including a first layer containing silicon oxynitride and a second layer containing silicon nitride in this order and forming an oxide layer containing tungsten oxide between the peeling layer and the layer to be peeled; a third step of forming a compound containing tungsten and nitrogen in the oxide layer by heat treatment; and a fourth step of peeling the peeling layer from the layer to be peeled at the oxide layer.

    Semiconductor device
    6.
    发明授权

    公开(公告)号:US11127732B2

    公开(公告)日:2021-09-21

    申请号:US16028992

    申请日:2018-07-06

    摘要: To solve a problem in that an antenna or a circuit including a thin film transistor is damaged due to discharge of electric charge accumulated in an insulator (a problem of electrostatic discharge), a semiconductor device includes a first insulator, a circuit including a thin film transistor provided over the first insulator, an antenna which is provided over the circuit and is electrically connected to the circuit, and a second insulator provided over the antenna, a first conductive film provided between the first insulator and the circuit, and a second conductive film provided between the second insulator and the antenna.

    Information processing device
    8.
    发明授权

    公开(公告)号:US10114450B2

    公开(公告)日:2018-10-30

    申请号:US15238888

    申请日:2016-08-17

    发明人: Shingo Eguchi

    IPC分类号: G06F3/01 G09G3/20 G02F1/1335

    摘要: A novel information processing device that is highly convenient or reliable is provided. For example, a configuration including a selection circuit which has a function of selecting image information or background information on the basis of sensing information on the illuminance of an environment in which the information processing device is used and a photograph or a moving image included in the image information and supplying the selected information to a reflective display element or a light-emitting element has been devised.