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1.发明公开公开(公告)号：US20240279494A1
公开(公告)日：2024-08-22
申请号：US18560366
申请日：2022-03-28
Applicant: STELLA CHEMIFA CORPORATION
Inventor： Hiroya YAMAMOTO , Rui HASEBE , Megumi TOMISAKI , Masanori URAYA , Tetsuo NISHIDA , Keiichi NII , Keigo FUJIWARA
CPC classification number: C09D7/61 , C09D5/006 , C09D5/027 , C09D7/20 , C09D7/45 , C09D7/67 , G02B1/11
Abstract: Provided are a liquid dispersion of fluoride particles having a refractive index lower than that of, for example, magnesium fluoride, the liquid dispersion being excellent in dispersibility and suitable for production of an optical film such as an antireflection film; a composition for forming an optical film; and an optical film. A liquid dispersion of fluoride particles according to the present invention contains: fluoride particles; an anionic surfactant as a dispersant for the fluoride particles; and an organic solvent, wherein the fluoride particles contain at least aluminum, an alkali metal, and an alkaline earth metal as an optional element in a composition of the fluoride particles, and the fluoride particles are dispersed in the organic solvent.
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公开(公告)号：US20240240084A1
公开(公告)日：2024-07-18
申请号：US18559459
申请日：2021-06-11
Applicant: STELLA CHEMIFA CORPORATION
Inventor： Yosuke YAMAZAKI , Kenta HORIGAMI , Kazuya DATE , Rui HASEBE , Keiichi NII , Tetsuo NISHIDA
IPC: C09K13/08 , H01L21/311
CPC classification number: C09K13/08 , H01L21/31111
Abstract: Provided are a micromachining processing agent and a micromachining processing method that enable favorable micromachining while suppressing remaining of fine particles on an object to be processed having at least a silicon-containing insulating film. The micromachining processing agent according to the present invention is a micromachining processing agent for micromachining an object to be processed having at least a silicon-containing insulating film, the micromachining processing agent containing: a compound represented by a chemical formula (1) below; hydrogen fluoride; ammonium fluoride; and water,
wherein Rf represents perfluoroalkyl group having 1 to 4 carbon atoms, and M+ represents a hydrogen ion or an ammonium ion, wherein a content of the compound is 0.001 mass % or more and 0.5 mass % or less with respect to a total mass of the micromachining processing agent, a content of the hydrogen fluoride is 0.05 mass % or more and 25 mass % or less with respect to a total mass of the micromachining processing agent, a content of the ammonium fluoride is 0.5 mass % or more and 40 mass % or less with respect to a total mass of the micromachining processing agent, and the content of the hydrogen fluoride and the content of the ammonium fluoride satisfy a relational expression (1) below:
Y
≦
-
0
.
8
X
+
4
0
(
1
)
wherein X represents a concentration (mass %) of hydrogen fluoride and Y represents a concentration (mass %) of ammonium fluoride.-
公开(公告)号：US20230407178A1
公开(公告)日：2023-12-21
申请号：US18251334
申请日：2021-10-27
Applicant: STELLA CHEMIFA CORPORATION
Inventor： Kazuya DATE , Nodoka NAKATA , Rui HASEBE , Keiichi NII
IPC: C09K13/08 , H01L21/311
CPC classification number: C09K13/08 , H01L21/31111
Abstract: A micromachining processing agent and a micromachining processing method capable of selectively micromachining a silicon oxide film when a laminated film including at least a silicon nitride film, a silicon oxide film, and a silicon alloy film is micromachined. The micromachining processing agent is used for micromachining of a laminated film including at least a silicon oxide film, a silicon nitride film, and a silicon alloy film. The micromachining processing agent contains: (a) 0.01 to 50 mass % of hydrogen fluoride; (b) 0.1 to 40 mass % of ammonium fluoride; (c) 0.001 to 10 mass % of a water-soluble polymer; (d) 0.001 to 1 mass % of an organic compound having a carboxyl group; and (e) water as an optional component, in which the water-soluble polymer is at least one selected from a group consisting of acrylic acid, ammonium acrylate, acrylamide, styrenesulfonic acid, ammonium styrenesulfonate, and styrenesulfonic acid ester.
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公开(公告)号：US20230038554A1
公开(公告)日：2023-02-09
申请号：US17788140
申请日：2020-11-11
Applicant: STELLA CHEMIFA CORPORATION
Inventor： Masanori URAYA , Hiroya YAMAMOTO , Rui HASEBE , Megumi TOMISAKI , Tetsuo NISHIDA
Abstract: Provided are a liquid dispersion of fluoride particles, which has low viscosity and excellent dispersibility, and is suitable for producing an optical film such as an antireflection film; a method for producing the same; and an optical film using the same. The liquid dispersion of fluoride particles according to the present invention is that in which particles of a fluoride represented by the chemical formula AxCFy (wherein A represents sodium or potassium, C represents silicon or boron, x is 1 or 2, and y is 4 or 6) are dispersed in an aprotic organic solvent having a relative permittivity of 5 to 40, and the optical film according to the present invention is produced by using the liquid dispersion of fluoride particles.
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