公开(公告)号：US10539420B2

公开(公告)日：2020-01-21

申请号：US15858909

申请日：2017-12-29

Applicant: STMICROELECTRONICS S.R.L.

Inventor： Daniele Prati ,  Carlo Valzasina ,  Luca Giuseppe Falorni ,  Matteo Fabio Brunetto

IPC: G01C19/5747 ,  G01C19/5733 ,  G01C19/5762

Abstract: A microelectromechanical gyroscope includes: a substrate; a stator sensing structure fixed to the substrate; a first mass elastically constrained to the substrate and movable with respect to the substrate in a first direction; a second mass elastically constrained to the first mass and movable with respect to the first mass in a second direction; and a third mass elastically constrained to the second mass and to the substrate and capacitively coupled to the stator sensing structure, the third mass being movable with respect to the substrate in the second direction and with respect to the second mass in the first direction.

公开(公告)号：US20170184400A1

公开(公告)日：2017-06-29

申请号：US15197414

申请日：2016-06-29

Applicant: STMICROELECTRONICS S.R.L. ,  STMICROELECTRONICS, INC. ,  STMICROELECTRONICS INTERNATIONAL N.V.

Inventor： Carlo Valzasina ,  Huantong Zhang ,  Matteo Fabio Brunetto ,  Gert Ingvar Andersson ,  Erik Daniel Svensson ,  Nils Einar Hedenstierna

IPC: G01C19/5776

CPC classification number: G01C19/5776 ,  G01C19/5719 ,  G01C19/574

Abstract: A gyroscope includes a substrate, a first structure, a second structure and a third structure elastically coupled to the substrate and movable along a first axis. The first and second structure are arranged at opposite sides of the third structure with respect to the first axis A driving system is configured to oscillate the first and second structure along the first axis in phase with one another and in phase opposition with the third structure. The first, second and third structure are provided with respective sets of sensing electrodes, configured to be displaced along a second axis perpendicular to the first axis in response to rotations of the substrate about a third axis perpendicular to the first axis and to the second axis.

公开(公告)号：US10180324B2

公开(公告)日：2019-01-15

申请号：US15197414

申请日：2016-06-29

Applicant: STMICROELECTRONICS S.R.L. ,  STMICROELECTRONICS, INC. ,  STMICROELECTRONICS INTERNATIONAL N.V.

Inventor： Carlo Valzasina ,  Huantong Zhang ,  Matteo Fabio Brunetto ,  Gert Ingvar Andersson ,  Erik Daniel Svensson ,  Nils Einar Hedenstierna

IPC: G01C19/56 ,  G01P9/04 ,  G01C19/574 ,  G01C19/5719 ,  G01C19/5776

Abstract: A gyroscope includes a substrate, a first structure, a second structure and a third structure elastically coupled to the substrate and movable along a first axis. The first and second structure are arranged at opposite sides of the third structure with respect to the first axis A driving system is configured to oscillate the first and second structure along the first axis in phase with one another and in phase opposition with the third structure. The first, second and third structure are provided with respective sets of sensing electrodes, configured to be displaced along a second axis perpendicular to the first axis in response to rotations of the substrate about a third axis perpendicular to the first axis and to the second axis.

公开(公告)号：US11808573B2

公开(公告)日：2023-11-07

申请号：US17728635

申请日：2022-04-25

Applicant: STMICROELECTRONICS S.R.L.

Inventor： Luca Guerinoni ,  Luca Giuseppe Falorni ,  Matteo Fabio Brunetto

IPC: G01C19/5712 ,  G01C19/5755 ,  G01C19/574 ,  B81B3/00

CPC classification number: G01C19/5712 ,  B81B3/0018 ,  G01C19/574 ,  G01C19/5755 ,  B81B2201/0242

Abstract: The MEMS gyroscope has a mobile mass carried by a supporting structure to move in a driving direction and in a first sensing direction, perpendicular to each other. A driving structure governs movement of the mobile mass in the driving direction at a driving frequency. A movement sensing structure is coupled to the mobile mass and detects the movement of the mobile mass in the sensing direction. A quadrature-injection structure is coupled to the mobile mass and causes a first and a second movement of the mobile mass in the sensing direction in a first calibration half-period and, respectively, a second calibration half-period. The movement-sensing structure supplies a sensing signal having an amplitude switching between a first and a second value that depend upon the movement of the mobile mass as a result of an external angular velocity and of the first and second quadrature movements. The first and second values of the sensing signal are subtracted from each other and compared with a stored difference value to supply information of variation of the scale factor.

公开(公告)号：US11340069B2

公开(公告)日：2022-05-24

申请号：US16898339

申请日：2020-06-10

Applicant: STMICROELECTRONICS S.R.L.

Inventor： Luca Guerinoni ,  Luca Giuseppe Falorni ,  Matteo Fabio Brunetto

IPC: G01C19/5712 ,  G01C19/5755 ,  G01C19/574 ,  B81B3/00

Abstract: The MEMS gyroscope has a mobile mass carried by a supporting structure to move in a driving direction and in a first sensing direction, perpendicular to each other. A driving structure governs movement of the mobile mass in the driving direction at a driving frequency. A movement sensing structure is coupled to the mobile mass and detects the movement of the mobile mass in the sensing direction. A quadrature-injection structure is coupled to the mobile mass and causes a first and a second movement of the mobile mass in the sensing direction in a first calibration half-period and, respectively, a second calibration half-period. The movement-sensing structure supplies a sensing signal having an amplitude switching between a first and a second value that depend upon the movement of the mobile mass as a result of an external angular velocity and of the first and second quadrature movements. The first and second values of the sensing signal are subtracted from each other and compared with a stored difference value to supply information of variation of the scale factor.

公开(公告)号：US11280611B2

公开(公告)日：2022-03-22

申请号：US16696709

申请日：2019-11-26

Applicant: STMICROELECTRONICS S.R.L.

Inventor： Daniele Prati ,  Carlo Valzasina ,  Luca Giuseppe Falorni ,  Matteo Fabio Brunetto

IPC: G01C19/5733 ,  G01C19/5747 ,  G01C19/5762

Abstract: A microelectromechanical gyroscope includes: a substrate; a stator sensing structure fixed to the substrate; a first mass elastically constrained to the substrate and movable with respect to the substrate in a first direction; a second mass elastically constrained to the first mass and movable with respect to the first mass in a second direction; and a third mass elastically constrained to the second mass and to the substrate and capacitively coupled to the stator sensing structure, the third mass being movable with respect to the substrate in the second direction and with respect to the second mass in the first direction.

公开(公告)号：US11085769B2

公开(公告)日：2021-08-10

申请号：US16243876

申请日：2019-01-09

Applicant: STMICROELECTRONICS S.R.L. ,  STMICROELECTRONICS, INC. ,  STMICROELECTRONICS INTERNATIONAL N.V.

Inventor： Carlo Valzasina ,  Huantong Zhang ,  Matteo Fabio Brunetto ,  Gert Ingvar Andersson ,  Erik Daniel Svensson ,  Nils Einar Hedenstierna

IPC: G01C19/5776 ,  G01C19/5719 ,  G01C19/574 ,  G01C19/5747

Abstract: A gyroscope includes a substrate, a first structure, a second structure and a third structure elastically coupled to the substrate and movable along a first axis. The first and second structure are arranged at opposite sides of the third structure with respect to the first axis A driving system is configured to oscillate the first and second structure along the first axis in phase with one another and in phase opposition with the third structure. The first, second and third structure are provided with respective sets of sensing electrodes, configured to be displaced along a second axis perpendicular to the first axis in response to rotations of the substrate about a third axis perpendicular to the first axis and to the second axis.

公开(公告)号：US20200025567A1

公开(公告)日：2020-01-23

申请号：US16243876

申请日：2019-01-09

Applicant: STMICROELECTRONICS S.R.L. ,  STMICROELECTRONICS, INC. ,  STMICROELECTRONICS INTERNATIONAL N.V.

Inventor： Carlo Valzasina ,  Huantong Zhang ,  Matteo Fabio Brunetto ,  Gert Ingvar Andersson ,  Erik Daniel Svensson ,  Nils Einar Hedenstierna

IPC: G01C19/5776 ,  G01C19/5719 ,  G01C19/574

Abstract: A gyroscope includes a substrate, a first structure, a second structure and a third structure elastically coupled to the substrate and movable along a first axis. The first and second structure are arranged at opposite sides of the third structure with respect to the first axis A driving system is configured to oscillate the first and second structure along the first axis in phase with one another and in phase opposition with the third structure. The first, second and third structure are provided with respective sets of sensing electrodes, configured to be displaced along a second axis perpendicular to the first axis in response to rotations of the substrate about a third axis perpendicular to the first axis and to the second axis.

公开(公告)号：US09869550B2

公开(公告)日：2018-01-16

申请号：US14964347

申请日：2015-12-09

Applicant: STMICROELECTRONICS S.R.L.

Inventor： Daniele Prati ,  Carlo Valzasina ,  Luca Giuseppe Falorni ,  Matteo Fabio Brunetto

IPC: G01C19/5747 ,  G01C19/5733

CPC classification number: G01C19/5733 ,  G01C19/5747 ,  G01C19/5762

Abstract: A microelectromechanical gyroscope includes: a substrate; a stator sensing structure fixed to the substrate; a first mass elastically constrained to the substrate and movable with respect to the substrate in a first direction; a second mass elastically constrained to the first mass and movable with respect to the first mass in a second direction; and a third mass elastically constrained to the second mass and to the substrate and capacitively coupled to the stator sensing structure, the third mass being movable with respect to the substrate in the second direction and with respect to the second mass in the first direction.