MEMS gyroscope control circuit
    1.
    发明授权

    公开(公告)号:US11662205B2

    公开(公告)日:2023-05-30

    申请号:US17504994

    申请日:2021-10-19

    CPC classification number: G01C19/5726 G01C19/5733 G01C25/005

    Abstract: A microelectromechanical system (MEMS) gyroscope includes a driving mass and a driving circuit that operates to drive the driving mass in a mechanical oscillation at a resonant drive frequency. An oscillator generates a system clock that is independent of and asynchronous to the resonant drive frequency. A clock generator circuit outputs a first clock and a second clock that are derived from the system clock. The drive loop of the driving circuit including an analog-to-digital converter (ADC) circuit that is clocked by the first clock and a digital signal processing (DSP) circuit that is clocked by the second clock.

    DAC with sub-DACs and related methods

    公开(公告)号:US09614542B2

    公开(公告)日:2017-04-04

    申请号:US14573083

    申请日:2014-12-17

    CPC classification number: H03M1/68

    Abstract: A DAC may include a decoder configured to receive a digital input signal, and first and second sub-DACs coupled in parallel to the decoder, each of the first and second sub-DACs having first and second LSB banks, and an MSB bank coupled between the first and second LSB banks. The decoder may be configured to selectively control the first and second LSB banks, and the MSB bank based upon the digital input signal. The DAC may include an output network coupled to the first and second sub-DACs and configured to generate an analog output signal related to the digital input signal.

    MEMS gyroscope control circuit
    3.
    发明授权

    公开(公告)号:US12111158B2

    公开(公告)日:2024-10-08

    申请号:US18136088

    申请日:2023-04-18

    CPC classification number: G01C19/5726 G01C19/5733 G01C25/005

    Abstract: A microelectromechanical system (MEMS) gyroscope includes a driving mass and a driving circuit that operates to drive the driving mass in a mechanical oscillation at a resonant drive frequency. An oscillator generates a system clock that is independent of and asynchronous to the resonant drive frequency. A clock generator circuit outputs a first clock and a second clock that are derived from the system clock. The drive loop of the driving circuit including an analog-to-digital converter (ADC) circuit that is clocked by the first clock and a digital signal processing (DSP) circuit that is clocked by the second clock.

    CANCELLATION OF NOISE DUE TO CAPACITANCE MISMATCH IN MEMS SENSORS

    公开(公告)号:US20170227569A1

    公开(公告)日:2017-08-10

    申请号:US15019453

    申请日:2016-02-09

    CPC classification number: G01P15/125 G01C19/5776 G01D5/2417 G01R27/2605

    Abstract: Disclosed herein is a device including a MEMS sensor configured to generate a first differential capacitance representing a change in capacitance from a first original sensing capacitance value and a second differential capacitance representing a change in capacitance from a second original sensing capacitance value, with the first and second original sensing capacitance values being mismatched. A compensation circuit is configured to generate outputs for compensating the first and second differential capacitances for the mismatch. A capacitance to voltage converter receives the first and second differential capacitances and the outputs of the compensation circuit as input and generates an output voltage as a function thereof.

    MEMS gyroscope control circuit
    5.
    发明授权

    公开(公告)号:US11175138B2

    公开(公告)日:2021-11-16

    申请号:US16452850

    申请日:2019-06-26

    Abstract: A microelectromechanical system (MEMS) gyroscope includes a driving mass and a driving circuit that operates to drive the driving mass in a mechanical oscillation at a resonant drive frequency. An oscillator generates a system clock that is independent of and asynchronous to the resonant drive frequency. A clock generator circuit outputs a first clock and a second clock that are derived from the system clock. The drive loop of the driving circuit including an analog-to-digital converter (ADC) circuit that is clocked by the first clock and a digital signal processing (DSP) circuit that is clocked by the second clock.

    Cancellation of noise due to capacitance mismatch in MEMS sensors

    公开(公告)号:US10274510B2

    公开(公告)日:2019-04-30

    申请号:US15019453

    申请日:2016-02-09

    Abstract: Disclosed herein is a device including a MEMS sensor configured to generate a first differential capacitance representing a change in capacitance from a first original sensing capacitance value and a second differential capacitance representing a change in capacitance from a second original sensing capacitance value, with the first and second original sensing capacitance values being mismatched. A compensation circuit is configured to generate outputs for compensating the first and second differential capacitances for the mismatch. A capacitance to voltage converter receives the first and second differential capacitances and the outputs of the compensation circuit as input and generates an output voltage as a function thereof.

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