MASK ASSEMBLY AND METHOD OF MANUFACTURING THE SAME

    公开(公告)号:US20240110272A1

    公开(公告)日:2024-04-04

    申请号:US18340329

    申请日:2023-06-23

    CPC classification number: C23C14/042

    Abstract: A mask assembly includes an open mask including first and second open openings defined therethrough and alternately arranged in a first direction, first unit masks respectively corresponding to the first open openings, and second unit masks respectively corresponding to the second open openings. Each of the first unit masks includes a first deposition portion through which first deposition openings are defined and first and second welding portions extending from the first deposition portion to the first direction and a direction opposite to the first direction, respectively. Each of the second unit masks includes a second deposition portion through which second deposition openings are defined and third and fourth welding portions extending from the second deposition portion to a second direction and a direction opposite to the second direction.

    DEPOSITION APPARATUS INCLUDING MASK ASSEMBLY AND MASK ASSEMBLY MANUFACTURING METHOD

    公开(公告)号:US20240109092A1

    公开(公告)日:2024-04-04

    申请号:US18227206

    申请日:2023-07-27

    CPC classification number: B05B12/24

    Abstract: A mask assembly includes a frame including first to fourth lateral parts connected to define a frame opening, an open sheet including a body part in which sheet openings arranged in a first direction and a second direction are defined to overlap the frame opening and a connecting part protruding from the body part and at least partially overlapping the frame, and masks, each including a deposition part having deposition openings defined therein and coupling parts that protrude from the deposition part and that are spaced apart from each other with the deposition part therebetween. The connecting part includes a first connecting part and a second connecting part that overlap the frame and a third connecting part and a fourth connecting part that at least partially overlap the frame.

    MASK CHUCK AND MASK MANUFACTURING APPARATUS INCLUDING SAME

    公开(公告)号:US20220179322A1

    公开(公告)日:2022-06-09

    申请号:US17677188

    申请日:2022-02-22

    Abstract: A mask chuck may include a base plate including a central region and an edge region surrounding the central region, a head part including a first surface connected to the edge region of the base plate and configured to move on the edge region to be close to the central region or away from the central region, and a pad part disposed on a second surface of the head part opposite to the first surface of the head part. The edge region may include a first edge region extending in a first direction, a second edge region extending in the first direction and spaced apart from the first edge region in a second direction crossing the first direction, a third edge region extending in the second direction, and a fourth edge region extending in the second direction and spaced apart from the third edge region in the first direction.

    MASK, MASK ASSEMBLY HAVING THE SAME, AND METHOD OF MANUFACTURING THE MASK

    公开(公告)号:US20230118046A1

    公开(公告)日:2023-04-20

    申请号:US17889885

    申请日:2022-08-17

    Abstract: A mask includes a first sub-mask, a second sub-mask facing the first sub-mask in a first direction and including a boundary surface contacting a boundary surface of the first sub-mask at a boundary portion, and a coupling bar disposed on a lower surface of the first sub-mask and a lower surface of the second sub-mask to connect the first sub-mask to the second sub-mask. Each of the first sub-mask, the second sub-mask, and the coupling bar includes openings. The openings of the coupling bar are aligned with part of the openings of the first and second sub-masks in a thickness direction of the coupling bar.

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