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公开(公告)号:US20220336241A1
公开(公告)日:2022-10-20
申请号:US17543025
申请日:2021-12-06
Applicant: Samsung Electronics Co., Ltd.
Inventor: Young Wook Kim , Sang Min Kim , Ji Hun Kim , Gi-Nam Park , Chul-Jun Park , Yong-Jun Ahn , Youn Gon Oh , Byung Kook Yoo , Hyun Woo Lee , Jeong Hun Lim
IPC: H01L21/67 , H01L21/677
Abstract: A substrate transfer device includes a transfer unit configured to transfer, in a first direction, a carrier in which substrates are stored, an upper interface unit configured to move the transfer unit, a lower interface unit configured to receive the carrier from the transfer unit, and a controller configured to control the upper interface unit and the lower interface unit integrally such that the transfer unit and the carrier move in the first direction at the same time.
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公开(公告)号:US20230406623A1
公开(公告)日:2023-12-21
申请号:US18163588
申请日:2023-02-02
Applicant: Samsung Electronics Co., Ltd.
Inventor: Young Wook Kim , Seung Gyu Kang , Hyun Jae Kang , Sang Min Kim , Yong-Jun Ahn , Sang Kyung Lee , Hyun Woo Lee , Jeong Hun Lim , Jun Hyuk Chang
CPC classification number: B65G1/0457 , B65G1/0464 , B65G47/905 , B65G49/07
Abstract: Provided is a ceiling storage system for increasing storage capacity by utilizing a ceiling space inside a fab. The ceiling storage system includes a first overhead rack including a plurality of storage positions for storing a plurality of articles; first and second support rails above the first overhead rack and extending in one direction; a first driving rail above the first overhead rack and in parallel with the first and second support rails; a second driving rail coupled to the first and second support rails and the first driving rail and moving along the first and second support rails and the first driving rail; and a first transport vehicle including a carriage coupled to the second driving rail and moving along the second driving rail, and a hoist and a hand unit installed on the carriage and for loading and unloading the articles to and from the first overhead rack.
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公开(公告)号:US12283502B2
公开(公告)日:2025-04-22
申请号:US17543025
申请日:2021-12-06
Applicant: Samsung Electronics Co., Ltd.
Inventor: Young Wook Kim , Sang Min Kim , Ji Hun Kim , Gi-Nam Park , Chul-Jun Park , Yong-Jun Ahn , Youn Gon Oh , Byung Kook Yoo , Hyun Woo Lee , Jeong Hun Lim
IPC: G06F7/00 , H01L21/67 , H01L21/677
Abstract: A substrate transfer device includes a transfer unit configured to transfer, in a first direction, a carrier in which substrates are stored, an upper interface unit configured to move the transfer unit, a lower interface unit configured to receive the carrier from the transfer unit, and a controller configured to control the upper interface unit and the lower interface unit integrally such that the transfer unit and the carrier move in the first direction at the same time.
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公开(公告)号:US20240383679A1
公开(公告)日:2024-11-21
申请号:US18391759
申请日:2023-12-21
Applicant: Samsung Electronics Co., Ltd.
Inventor: Young Wook Kim , Seung Gyu Kang , Hyun Jae Kang , Sang Min Kim , Jae Sung Byun , Yong-Jun Ahn , Hyun Woo Lee , Jeong Hun Lim , Jun Hyuk Chang
Abstract: A ceiling storage system includes a first support rail and a second support rail that extend in a first direction; a first driving rail that extends in the first direction and is parallel to the first support rail and the second support rail; a second driving rail movably coupled to the first support rail, the second support rail, and the first driving rail, where the second driving rail is configured to move along the first support rail, the second support rail, and the first driving rail; a transfer vehicle movably coupled to the second driving rail and configured to move along the second driving rail; and a connection device that connects the first driving rail and the second driving rail to each other, where the connection device and the second driving rail are rotatable around a first axis that is parallel to the first direction.
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公开(公告)号:US12068185B2
公开(公告)日:2024-08-20
申请号:US17854681
申请日:2022-06-30
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: Young Wook Kim , Sang Min Kim , Chul-Jun Park , Jae Sung Byun , Yong-Jun Ahn , Sang Kyung Lee , Hyun Woo Lee , Jeong Hun Lim , Jun Hyuk Chang , Kyu Bum Cho
IPC: H01L21/677 , B65G1/06
CPC classification number: H01L21/67712 , B65G1/06 , H01L21/67736 , B65G2201/0297
Abstract: An article transfer system includes a plurality of stage modules respectively provided at a plurality of layers, an interlayer transfer apparatus configured to transfer an article to each of the plurality of stage modules, and a plurality of loading and unloading apparatus respectively provided on each stage module of the plurality of stage modules, the plurality of loading and unloading apparatus configured to load an article onto respective stage modules of the plurality of stage modules. The interlayer transfer apparatus includes a mast frame extending so as to intersect each stage module of the plurality of stage modules, and a plurality of carriage units configured to move along a length direction of the mast frame, transfer articles, and move in a parallel manner with each other.
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公开(公告)号:US20230099726A1
公开(公告)日:2023-03-30
申请号:US17854681
申请日:2022-06-30
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: Young Wook Kim , Sang Min Kim , Chul-Jun Park , Jae Sung Byun , Yong-Jun Ahn , Sang Kyung Lee , Hyun Woo Lee , Jeong Hun Lim , Jun Hyuk Chang , Kyu Bum Cho
IPC: H01L21/677 , B65G1/06
Abstract: An article transfer system includes a plurality of stage modules respectively provided at a plurality of layers, an interlayer transfer apparatus configured to transfer an article to each of the plurality of stage modules, and a plurality of loading and unloading apparatus respectively provided on each stage module of the plurality of stage modules, the plurality of loading and unloading apparatus configured to load an article onto respective stage modules of the plurality of stage modules. The interlayer transfer apparatus includes a mast frame extending so as to intersect each stage module of the plurality of stage modules, and a plurality of carriage units configured to move along a length direction of the mast frame, transfer articles, and move in a parallel manner with each other.
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