公开(公告)号：US20210033965A1

公开(公告)日：2021-02-04

申请号：US16901466

申请日：2020-06-15

Applicant: Samsung Electronics Co., Ltd.

Inventor： Ginam PARK ,  Sangmin KIM ,  Jongsam KIM ,  Hongjin KIM ,  Chuljun PARK ,  Yongjun AHN ,  Sangkyung LEE ,  Junyong LEE ,  Taijo JEON ,  Kyubum CHO

IPC: G03F1/66 ,  B01D46/44 ,  B01D46/00 ,  B01D46/42 ,  F24F3/14 ,  H05B1/02 ,  F24H3/04 ,  F25B21/02

Abstract: An apparatus for storing a mask includes a main body comprising a first region and a second region, the first region having a plurality of mask containers, a gas supply pipe having an outer portion outside of the main body, a fan in the first region to propel the gas from the second region to the first region, a filter disposed at a front end and/or a rear end of the fan, a heat exchanger in the second region and configured to exchange heat with the flowing gas, a Peltier element at the outer portion of the gas supply pipe, a first sensor installed in the gas supply pipe upstream of the Peltier element, a second sensor installed in the second region in a lower position to the heat exchanger, and a controller connected to the first and second sensors and the Peltier element.

公开(公告)号：US20160202290A1

公开(公告)日：2016-07-14

申请号：US14959641

申请日：2015-12-04

Applicant: Samsung Electronics Co., Ltd.

Inventor： Youngin KIM ,  Jungho KIM ,  Jongsam KIM ,  Byung-Soo PARK ,  Sookil PARK ,  Byungkook YOO ,  Seong Sil JEONG ,  Wooseong CHOI

IPC: G01R1/04 ,  G01R1/073

CPC classification number: G01R31/2893

Abstract: Probe card transfer units and probe card management apparatuses including the same may be provided. The transfer unit includes a hand part including grippers holding a package and a moving part moving the hand part. Each of the grippers includes at least one locking pin protruding from a holding bar, which extends in a direction perpendicular to the holding bar, to securely hold the package.

Abstract translation: 可以提供包括其的探针卡传送单元和探针卡管理装置。 转印单元包括手部，其包括保持包装的夹持器和移动手部的移动部。 每个夹持器包括从保持杆突出的至少一个锁定销，其沿垂直于保持杆的方向延伸，以牢固地保持包装。

公开(公告)号：US20200176293A1

公开(公告)日：2020-06-04

申请号：US16529082

申请日：2019-08-01

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Sangkyung LEE ,  Yong-Jun AHN ,  Taijo JEON ,  Kyubum CHO ,  Jongsam KIM ,  Gi-Nam PARK ,  Chul-Jun PARK ,  Junyong LEE

IPC: H01L21/673 ,  B05B1/30 ,  H01L21/67

Abstract: A semiconductor wafer storage system includes a container that provides a space in which a semiconductor wafer is to be stored, a fluid supply that provides a fluid to the container, a connection part that receives the fluid from the fluid supply and transfers the fluid to the container, and a nozzle part that connects the connection part to the container. The container may include a coupling plate to which the nozzle part is coupled, and the nozzle part may include a first nozzle and a second nozzle.

公开(公告)号：US20160185535A1

公开(公告)日：2016-06-30

申请号：US14955432

申请日：2015-12-01

Applicant: Samsung Electronics Co., Ltd.

Inventor： Youngin KIM ,  Jongsam KIM ,  Byung-Soo PARK ,  Sookil PARK ,  Byungkook YOO ,  Younghyen LEE ,  Seong Sil JEONG ,  Wooseong CHOI

IPC: B65G47/90 ,  G01R31/26 ,  G01R1/04

CPC classification number: G01R31/2601 ,  G01R31/2889 ,  G01R31/2893

Abstract: A loading apparatus is provided which includes a package jig, a transfer unit, and a load port. The package jig is fixed to a package. The transfer unit includes a hand for holding the package jig and transferring the package. The package transferred by the transfer unit is loaded on the load port. The load port and the hand include first alignment pins and first alignment sockets for aligning the package to the load port.

Abstract translation: 提供一种装载装置，其包括封装夹具，转印单元和装载端口。 包装夹具固定在包装上。 传送单元包括用于保持包装夹具并传送包装的手。 由传送单元传送的包裹装载在装载端口上。 装载端口和手包括第一对准销和用于使包装与装载端口对准的第一对准插座。