Semiconductor Devices and Methods of Manufacturing the Same
    2.
    发明申请
    Semiconductor Devices and Methods of Manufacturing the Same 有权
    半导体器件及其制造方法

    公开(公告)号:US20150028430A1

    公开(公告)日:2015-01-29

    申请号:US14317289

    申请日:2014-06-27

    Abstract: Semiconductor devices and methods of manufacturing the same are disclosed. The semiconductor device a gate dielectric pattern on a substrate and a gate electrode on the gate dielectric pattern opposite the substrate. The gate electrode includes a first conductive pattern disposed on the gate dielectric pattern and including aluminum, and a second conductive pattern disposed between the first conductive pattern and the gate dielectric pattern. The second conductive pattern has an aluminum concentration that is higher than an aluminum concentration of the first conductive pattern. The second conductive pattern may be thicker than the first conductive pattern.

    Abstract translation: 公开了半导体器件及其制造方法。 半导体器件在衬底上的栅极电介质图案和与衬底相对的栅极电介质图案上的栅极电极。 栅电极包括设置在栅极电介质图案上并包括铝的第一导电图案,以及设置在第一导电图案和栅极电介质图案之间的第二导电图案。 第二导电图案的铝浓度高于第一导电图案的铝浓度。 第二导电图案可以比第一导电图案更厚。

    Semiconductor devices and methods of manufacturing the same
    4.
    发明授权
    Semiconductor devices and methods of manufacturing the same 有权
    半导体器件及其制造方法

    公开(公告)号:US09337295B2

    公开(公告)日:2016-05-10

    申请号:US14317289

    申请日:2014-06-27

    Abstract: Semiconductor devices and methods of manufacturing the same are disclosed. The semiconductor device a gate dielectric pattern on a substrate and a gate electrode on the gate dielectric pattern opposite the substrate. The gate electrode includes a first conductive pattern disposed on the gate dielectric pattern and including aluminum, and a second conductive pattern disposed between the first conductive pattern and the gate dielectric pattern. The second conductive pattern has an aluminum concentration that is higher than an aluminum concentration of the first conductive pattern. The second conductive pattern may be thicker than the first conductive pattern.

    Abstract translation: 公开了半导体器件及其制造方法。 半导体器件在衬底上的栅极电介质图案和与衬底相对的栅极电介质图案上的栅极电极。 栅电极包括设置在栅极电介质图案上并包括铝的第一导电图案,以及设置在第一导电图案和栅极电介质图案之间的第二导电图案。 第二导电图案的铝浓度高于第一导电图案的铝浓度。 第二导电图案可以比第一导电图案更厚。

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