SEMICONDUCTOR DEVICE AND METHOD OF FABRICATING THE SAME

    公开(公告)号:US20210118886A1

    公开(公告)日:2021-04-22

    申请号:US16887297

    申请日:2020-05-29

    Abstract: A semiconductor device includes a substrate having a cell region, a boundary region, a peripheral region sequentially arranged in a first direction, an active pattern extending in the cell region in a second direction forming a first acute angle with respect to the first direction, and a boundary pattern in the cell region and directly adjacent to the boundary region. The boundary pattern includes a first side surface extending in the second direction and a first boundary surface extending in a third direction, which is perpendicular to the first direction, from the first side surface, and the first boundary surface defines a boundary between the cell region and the boundary region.

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