公开(公告)号：US06198533B1

公开(公告)日：2001-03-06

申请号：US09376711

申请日：1999-08-17

申请人： Steven W. Meeks ,  Rusmin Kudinar ,  Ronny Soetarman

发明人： Steven W. Meeks ,  Rusmin Kudinar ,  Ronny Soetarman

IPC分类号： G01B2117

CPC分类号： G01B11/065 ,  G01B11/303

摘要： A system and method for measuring lubricant thickness and degradation, carbon wear and carbon thickness, and surface roughness and debris on thin film magnetic disks at angles that are not substantially Brewster's angle of the thin film (carbon) protective overcoat in a high temperature environment. A focused optical light whose polarization can be switched between P or S polarization is incident at an angle to the surface of the thin film magnetic disk. The polarization switch can be accomplished using a temperature compensated quartz half plate. The range of angles can be from zero degrees from normal to near Brewster's angle and from an angle greater than Brewster's angle to 90 degrees. This range of angles allows the easy measurement of the change in lubricant thickness due to the interaction of the thin film head, the absolute lubricant thickness and degradation of the lubricant. It also allows the measurement of changes in carbon thickness and the absolute carbon thickness. The surface roughness can also be measured at any of the angles specified above.

摘要翻译： 用于测量薄膜磁盘上的润滑剂厚度和降解，碳磨损和碳厚度的表面粗糙度和碎屑的系统和方法，其在高温环境中基本上不是薄膜（碳）保护涂层的布鲁斯特角。 其偏振可以在P或S偏振之间切换的聚焦光学光以与薄膜磁盘的表面成一定角度入射。 偏光开关可以使用温度补偿的石英半板完成。 角度范围可以从普通到布鲁斯特角附近的零度以及从布鲁斯特角度大到90度的角度。 这种角度范围可以容易地测量润滑剂厚度的变化，这是由于薄膜头的相互作用，绝对润滑剂厚度和润滑剂的劣化。 它还允许测量碳厚度和绝对碳厚度的变化。 表面粗糙度也可以在上述任何角度测量。

公开(公告)号：US06229610B1

公开(公告)日：2001-05-08

申请号：US09376705

申请日：1999-08-17

申请人： Steven W. Meeks ,  Rusmin Kudinar ,  Ronny Soetarman

发明人： Steven W. Meeks ,  Rusmin Kudinar ,  Ronny Soetarman

IPC分类号： G01B2117

CPC分类号： G01B11/065 ,  G01B11/303

摘要： A system and method for measuring lubricant thickness and degradation, carbon wear and carbon thickness, and surface roughness of thin film magnetic disks at angles that are not substantially Brewster's angle of the thin film (carbon) protective overcoat. A focused optical light whose polarization can be switched between P or S polarization is incident at an angle to the surface of the thin film magnetic disk. The range of angles can be from zero degrees from normal to near Brewster's angle and from an angle greater than Brewster's angle to 90 degrees. This range of angles allows the easy measurement of the change in lubricant thickness due to the interaction of the thin film head, the absolute lubricant thickness and degradation of the lubricant. It also allows the measurement of changes in carbon thickness and the absolute carbon thickness. The surface roughness can also be measured at any of the angles specified above. The present invention utilizes a first and second histogram representing disk properties (1) at two different time periods, (2) at two different locations on the disk, or (3) on two different disks.

摘要翻译： 用于测量薄膜（碳）保护外涂层基本上布鲁斯特角角度的薄膜磁盘的润滑剂厚度和降解，碳磨损和碳厚度以及表面粗糙度的系统和方法。 其偏振可以在P或S偏振之间切换的聚焦光学光以与薄膜磁盘的表面成一定角度入射。 角度范围可以从普通到布鲁斯特角附近的零度以及从布鲁斯特角度大到90度的角度。 这种角度范围可以容易地测量润滑剂厚度的变化，这是由于薄膜头的相互作用，绝对润滑剂厚度和润滑剂的劣化。 它还允许测量碳厚度和绝对碳厚度的变化。 表面粗糙度也可以在上述任何角度测量。 本发明利用在两个不同时间段（2）在盘上的两个不同位置或（3）在两个不同盘上的表示盘属性（1）的第一和第二直方图。

公开(公告)号：US07532318B2

公开(公告)日：2009-05-12

申请号：US11560477

申请日：2006-11-16

申请人： Steven W. Meeks ,  Rusmin Kudinar ,  William R. Wheeler ,  Hung Phi Nguyen ,  Vamsi Velidandla ,  Anoop Somanchi ,  Ronny Soetarman

发明人： Steven W. Meeks ,  Rusmin Kudinar ,  William R. Wheeler ,  Hung Phi Nguyen ,  Vamsi Velidandla ,  Anoop Somanchi ,  Ronny Soetarman

IPC分类号： G01N21/00

CPC分类号： G01N21/94 ,  G01B11/303 ,  G01B11/306 ,  G01N21/21 ,  G01N21/211 ,  G01N21/55 ,  G01N21/9501 ,  G01N21/9503 ,  G01N2021/556 ,  H01L22/12

摘要： In one embodiment, a system to measure defects on a surface of a wafer and an edge of the wafer using a single tool comprises a radial motor to move an optical head in a radial direction to detect defects at locations displaced from the edge of the wafer, and a rotational motor to rotate the optical head around the edge of the wafer to detect defects on the edge of the wafer.

摘要翻译： 在一个实施例中，使用单个工具测量晶片表面和晶片边缘上的缺陷的系统包括径向马达以沿径向方向移动光学头以检测从晶片边缘移位的位置处的缺陷 以及旋转电动机，用于围绕晶片的边缘旋转光学头以检测晶片边缘上的缺陷。

公开(公告)号：US06268919B1

公开(公告)日：2001-07-31

申请号：US09376151

申请日：1999-08-17

申请人： Steven W. Meeks ,  Rusmin Kudinar ,  Ronny Soetarman

发明人： Steven W. Meeks ,  Rusmin Kudinar ,  Ronny Soetarman

IPC分类号： G01B2117

CPC分类号： G01B11/065 ,  G01B11/303

摘要： A system and method for measuring lubricant thickness and degradation, carbon wear and carbon thickness, and surface roughness of thin film magnetic disks at angles that are not substantially Brewster's angle of the thin film (carbon) protective overcoat. A focused optical light whose polarization can be switched between P or S polarization is incident at an angle to the surface of the thin film magnetic disk. The range of angles can be from zero degrees from normal to near Brewster's angle and from an angle greater than Brewster's angle to 90 degrees. This range of angles allows the easy measurement of the change in lubricant thickness due to the interaction of the thin film head, the absolute lubricant thickness and degradation of the lubricant. It also allows the measurement of changes in carbon thickness and the absolute carbon thickness. The surface roughness can also be measured at any of the angles specified above. The present invention utilizes a first and second histogram representing disk properties (1) at two different time periods, (2) at two different locations on the disk, or (3) on two different disks.

摘要翻译： 用于测量薄膜（碳）保护外涂层基本上布鲁斯特角角度的薄膜磁盘的润滑剂厚度和降解，碳磨损和碳厚度以及表面粗糙度的系统和方法。 其偏振可以在P或S偏振之间切换的聚焦光学光以与薄膜磁盘的表面成一定角度入射。 角度范围可以从普通到布鲁斯特角附近的零度以及从布鲁斯特角度大到90度的角度。 这种角度范围可以容易地测量润滑剂厚度的变化，这是由于薄膜头的相互作用，绝对润滑剂厚度和润滑剂的劣化。 它还允许测量碳厚度和绝对碳厚度的变化。 表面粗糙度也可以在上述任何角度测量。 本发明利用在两个不同时间段（2）在盘上的两个不同位置或（3）在两个不同盘上的表示盘属性（1）的第一和第二直方图。

公开(公告)号：US6130749A

公开(公告)日：2000-10-10

申请号：US376152

申请日：1999-08-17

申请人： Steven W. Meeks ,  Rusmin Kudinar ,  Ronny Soetarman

发明人： Steven W. Meeks ,  Rusmin Kudinar ,  Ronny Soetarman

IPC分类号： G01B11/06 ,  G01B11/30 ,  G01Q60/00

CPC分类号： G01B11/065 ,  G01B11/303

摘要： A system and method for measuring lubricant thickness and degradation, carbon wear and carbon thickness, and surface roughness of thin film magnetic disks at angles that are not substantially Brewster's angle of the thin film (carbon) protective overcoat. A focused optical light whose polarization can be switched between P or S polarization is incident at an angle to the surface of the thin film magnetic disk. The range of angles can be from zero degrees from normal to near Brewster's angle and from an angle greater than Brewster's angle to 90 degrees. This range of angles allows the easy measurement of the change in lubricant thickness due to the interaction of the thin film head, the absolute lubricant thickness and degradation of the lubricant. It also allows the measurement of changes in carbon thickness and the absolute carbon thickness. The surface roughness can also be measured at any of the angles specified above. The present invention generates a histogram from the specular and scattered components of the reflected light, generates a centroid of the histogram and performs a symmetry operation to identify the characteristics of the thin film.

摘要翻译： 用于测量薄膜（碳）保护外涂层基本上布鲁斯特角角度的薄膜磁盘的润滑剂厚度和降解，碳磨损和碳厚度以及表面粗糙度的系统和方法。 其偏振可以在P或S偏振之间切换的聚焦光学光以与薄膜磁盘的表面成一定角度入射。 角度范围可以从普通到布鲁斯特角附近的零度以及从布鲁斯特角度大到90度的角度。 这种角度范围可以容易地测量润滑剂厚度的变化，这是由于薄膜头的相互作用，绝对润滑剂厚度和润滑剂的劣化。 它还允许测量碳厚度和绝对碳厚度的变化。 表面粗糙度也可以在上述任何角度测量。 本发明根据反射光的镜面和散射分量产生直方图，产生直方图的质心，并执行对称操作以识别薄膜的特性。

公开(公告)号：US6031615A

公开(公告)日：2000-02-29

申请号：US136897

申请日：1998-08-19

申请人： Steven W. Meeks ,  Rusmin Kudinar ,  Ronny Soetarman

发明人： Steven W. Meeks ,  Rusmin Kudinar ,  Ronny Soetarman

IPC分类号： G01B11/06 ,  G01B11/30 ,  G01Q60/00 ,  G01B21/17

CPC分类号： G01B11/065 ,  G01B11/303

摘要： A system and method for measuring lubricant thickness and degradation, carbon wear and carbon thickness, and surface roughness of thin film magnetic disks at angles that are not substantially Brewster's angle of the thin film (carbon) protective overcoat. A focused optical light whose polarization can be switched between P or S polarization is incident at an angle to the surface of the thin film magnetic disk. The range of angles can be from zero degrees from normal to near Brewster's angle and from an angle greater than Brewster's angle to 90 degrees. This range of angles allows the easy measurement of the change in lubricant thickness due to the interaction of the thin film head, the absolute lubricant thickness and degradation of the lubricant. It also allows the measurement of changes in carbon thickness and the absolute carbon thickness. The surface roughness can also be measured at any of the angles specified above.

摘要翻译： 用于测量薄膜（碳）保护外涂层基本上布鲁斯特角角度的薄膜磁盘的润滑剂厚度和降解，碳磨损和碳厚度以及表面粗糙度的系统和方法。 其偏振可以在P或S偏振之间切换的聚焦光学光以与薄膜磁盘的表面成一定角度入射。 角度范围可以从普通到布鲁斯特角附近的零度以及从布鲁斯特角度大到90度的角度。 这种角度范围可以容易地测量润滑剂厚度的变化，这是由于薄膜头的相互作用，绝对润滑剂厚度和润滑剂的劣化。 它还允许测量碳厚度和绝对碳厚度的变化。 表面粗糙度也可以在上述任何角度测量。

公开(公告)号：US07110097B2

公开(公告)日：2006-09-19

申请号：US11268214

申请日：2005-11-07

申请人： Steven W. Meeks ,  Rusmin Kudinar

发明人： Steven W. Meeks ,  Rusmin Kudinar

IPC分类号： G01N21/00

CPC分类号： G01B11/0616 ,  G01N21/211 ,  G01N21/94 ,  G01N21/9501 ,  H01L22/12

摘要： A system and method for measuring defects, film thickness, contamination, particles and height of a thin film disk or a silicon wafer.

公开(公告)号：US06956658B2

公开(公告)日：2005-10-18

申请号：US10660984

申请日：2003-09-12

申请人： Steven W. Meeks ,  Rusmin Kudinar

发明人： Steven W. Meeks ,  Rusmin Kudinar

IPC分类号： G01B11/06 ,  G01B11/30 ,  G01N21/21 ,  G01N21/47 ,  G01N21/95 ,  G11B5/84

CPC分类号： G01B11/303 ,  G01B11/065 ,  G01N21/211

摘要： A system and method for performing a magnetic imaging, optical profiling, and measuring lubricant thickness and degradation, carbon wear, carbon thickness, and surface roughness of thin film magnetic disks and silicon wafers at angles that are not substantially Brewster's angle of the thin film (carbon) protective overcoat is provided. The system and method involve a focused optical light whose polarization can be switched between P or S polarization is incident at an angle to the surface of the thin film magnetic disk. This generates both reflected and scattered light that may be measured to determine various values and properties related to the surface of the disk, including identifying the Kerr-effect in reflected light for determination of point magnetic properties. In addition, the present invention can mark the position of an identified defect.

摘要翻译： 用于以基本上不是薄膜的布鲁斯特角的角度执行磁性成像，光学轮廓和测量润滑剂厚度和降解，碳磨损，碳厚度和薄膜磁盘和硅晶片的表面粗糙度的系统和方法（ 碳）保护罩。 该系统和方法涉及一种聚焦的光，其偏振可以在P或S之间切换，偏振以一定角度入射到薄膜磁盘的表面。 这产生可以测量的反射和散射光，以确定与盘的表面相关的各种值和性质，包括识别用于确定点磁性的反射光中的克尔效应。 此外，本发明可以标识所识别的缺陷的位置。

公开(公告)号：US08848181B1

公开(公告)日：2014-09-30

申请号：US13861383

申请日：2013-04-12

申请人： Steven W. Meeks ,  Rusmin Kudinar ,  Hung P. Nguyen

发明人： Steven W. Meeks ,  Rusmin Kudinar ,  Hung P. Nguyen

IPC分类号： G01N21/00 ,  G01N21/958

CPC分类号： G01N21/958 ,  G01N21/896 ,  G01N2021/8967

摘要： An optical inspector includes a radiating source, a time varying beam reflector, a telecentric scan lens, a first and second waveplate, a polarizing beam splitter, a first detector, a focusing lens, a blocker, and a second detector. The radiating source irradiates the first waveplate generating circularly polarized source beam that irradiates a first position of on the time varying beam reflector with a source beam. The time varying beam reflector directs the source beam to the telecentric scan lens, which in turn directs the source beam to a sample. Reflected radiation from a sample is directed to the second waveplate generating linearly polarized beam that irradiates the polarizing beam splitter which directs a portion of the reflected radiation to the first detector. Scattered radiation from the sample is directed by the focusing lens to the second detector. Contemporaneous measurements by the first and second detectors are compared to differentiate.

摘要翻译： 光学检查器包括辐射源，时变光束反射器，远心扫描透镜，第一和第二波片，偏振分束器，第一检测器，聚焦透镜，阻挡器和第二检测器。 辐射源照射产生圆偏振源光束的第一波片，其用源光束照射时变光束反射器上的第一位置。 时变光束反射器将源光束引导到远心扫描透镜，然后将远光扫描透镜引导到源样品。 来自样品的反射辐射被引导到产生线偏振光束的第二波片，该线偏振光束照射偏振分束器，其将一部分反射辐射引导到第一检测器。 来自样品的散射辐射由聚焦透镜引导到第二检测器。 将第一和第二检测器的同期测量值进行比较。

公开(公告)号：US08836935B1

公开(公告)日：2014-09-16

申请号：US13861382

申请日：2013-04-12

申请人： Steven W. Meeks ,  Rusmin Kudinar ,  Hung P. Nguyen

发明人： Steven W. Meeks ,  Rusmin Kudinar ,  Hung P. Nguyen

IPC分类号： G01N21/00 ,  G01N21/958

CPC分类号： G01N21/958 ,  G01N2021/8967

摘要： An optical inspector includes a radiating source, a time varying beam reflector, a telecentric scan lens, a blocker, a focusing lens, an aperture, and a detector. The radiating source irradiates a first position of on the time varying beam reflector with a source beam. The time varying beam reflector directs the source beam to the telecentric scan lens, which in turn directs the source beam to a transparent sample. A portion of the source beam travels through the transparent sample to another surface. The blocker blocks scattered radiation originating at the other surface. Scattered radiation originating from the transparent sample is not redirected by the blocker and is focused by the focusing lens to a first focal plane. The focused scattered radiation passes through the aperture before irradiating the detector. The detector output an intensity measurement of the scattered radiation that irradiates the detector.

摘要翻译： 光学检查器包括辐射源，时变光束反射器，远心扫描透镜，阻挡器，聚焦透镜，孔径和检测器。 辐射源用源光束照射时变光束反射器上的第一位置。 时变光束反射器将源光束引导到远心扫描透镜，然后再将源光束引导到透明样品。 源光束的一部分穿过透明样品到另一表面。 阻断剂阻止源于另一个表面的散射辐射。 来自透明样品的散射辐射不被阻断剂重新导向，并被聚焦透镜聚焦到第一焦平面。 聚焦的散射辐射在照射检测器之前穿过孔。 检测器输出照射检测器的散射辐射的强度测量值。