公开(公告)号：US06930765B2

公开(公告)日：2005-08-16

申请号：US10126154

申请日：2002-04-19

申请人： Steven W. Meeks ,  Hung P. Nguyen

发明人： Steven W. Meeks ,  Hung P. Nguyen

IPC分类号： G01B11/06 ,  H01L21/66 ,  G01N21/88

CPC分类号： G01B11/0616 ,  G01B11/306 ,  H01L22/12

摘要： A combined optical profiler, ellipsometer, reflectometer and scatterometer is described which is configured to have user selectable spot sizes. An attached computer allows the user to select via software the desired spot size on the substrate.

摘要翻译： 描述了组合的光学轮廓仪，椭偏仪，反射计和散射仪，其被配置为具有用户可选择的光斑尺寸。 连接的计算机允许用户通过软件选择基板上所需的光斑尺寸。

公开(公告)号：US5046555A

公开(公告)日：1991-09-10

申请号：US578119

申请日：1990-09-06

申请人： Hung P. Nguyen

发明人： Hung P. Nguyen

IPC分类号： F28F9/18

CPC分类号： F28F9/182 ,  Y10S165/479 ,  Y10T29/49373

摘要： A heat exchanger suitable for use as a condenser in an automotive air conditioning system has a pair of header tanks connected by flat extruded tubes. Air centers are sandwiched between the tubes for extracting heat from refrigerant directed through the flat extruded tubes. Each of the flat extruded tubes are located in spaced parallelism and each of the tubes have an end portion with a tapered outer surface for piloting the tube into contact with a mating tapered surface in a header opening and wherein the axial length of the end portion and the tapered surfaces are selected to define a brazed joint having maximized contact surface and strength. Each of the flat extruded tubes has a peripheral shoulder engageable either with the outboard surface of the header or with a countersunk surface portion thereof to precisely locate the end surface of each of the tube end portions with respect to avoid excessive tube stickout within the header tank volume.

摘要翻译： 适合用作汽车空调系统中的冷凝器的热交换器具有通过扁平挤出管连接的一对集管箱。 空气中心夹在管之间，用于从通过扁平挤出管引导的制冷剂中提取热量。 每个平坦的挤压管均以间隔的平行度定位，并且每个管具有端部，其具有锥形的外表面，用于引导管与集管开口中的配合锥形表面接触，并且其中端部的轴向长度和 选择锥形表面以限定具有最大接触表面和强度的钎焊接头。 每个扁平挤出管具有可与集管的外侧表面接合的周边肩部或者具有埋头孔表面部分，以精确地定位每个管端部的端面，以避免在集水箱内过度的管道堵塞 卷。

公开(公告)号：US08848181B1

公开(公告)日：2014-09-30

申请号：US13861383

申请日：2013-04-12

申请人： Steven W. Meeks ,  Rusmin Kudinar ,  Hung P. Nguyen

发明人： Steven W. Meeks ,  Rusmin Kudinar ,  Hung P. Nguyen

IPC分类号： G01N21/00 ,  G01N21/958

CPC分类号： G01N21/958 ,  G01N21/896 ,  G01N2021/8967

摘要： An optical inspector includes a radiating source, a time varying beam reflector, a telecentric scan lens, a first and second waveplate, a polarizing beam splitter, a first detector, a focusing lens, a blocker, and a second detector. The radiating source irradiates the first waveplate generating circularly polarized source beam that irradiates a first position of on the time varying beam reflector with a source beam. The time varying beam reflector directs the source beam to the telecentric scan lens, which in turn directs the source beam to a sample. Reflected radiation from a sample is directed to the second waveplate generating linearly polarized beam that irradiates the polarizing beam splitter which directs a portion of the reflected radiation to the first detector. Scattered radiation from the sample is directed by the focusing lens to the second detector. Contemporaneous measurements by the first and second detectors are compared to differentiate.

摘要翻译： 光学检查器包括辐射源，时变光束反射器，远心扫描透镜，第一和第二波片，偏振分束器，第一检测器，聚焦透镜，阻挡器和第二检测器。 辐射源照射产生圆偏振源光束的第一波片，其用源光束照射时变光束反射器上的第一位置。 时变光束反射器将源光束引导到远心扫描透镜，然后将远光扫描透镜引导到源样品。 来自样品的反射辐射被引导到产生线偏振光束的第二波片，该线偏振光束照射偏振分束器，其将一部分反射辐射引导到第一检测器。 来自样品的散射辐射由聚焦透镜引导到第二检测器。 将第一和第二检测器的同期测量值进行比较。

公开(公告)号：US08836935B1

公开(公告)日：2014-09-16

申请号：US13861382

申请日：2013-04-12

申请人： Steven W. Meeks ,  Rusmin Kudinar ,  Hung P. Nguyen

发明人： Steven W. Meeks ,  Rusmin Kudinar ,  Hung P. Nguyen

IPC分类号： G01N21/00 ,  G01N21/958

CPC分类号： G01N21/958 ,  G01N2021/8967

摘要： An optical inspector includes a radiating source, a time varying beam reflector, a telecentric scan lens, a blocker, a focusing lens, an aperture, and a detector. The radiating source irradiates a first position of on the time varying beam reflector with a source beam. The time varying beam reflector directs the source beam to the telecentric scan lens, which in turn directs the source beam to a transparent sample. A portion of the source beam travels through the transparent sample to another surface. The blocker blocks scattered radiation originating at the other surface. Scattered radiation originating from the transparent sample is not redirected by the blocker and is focused by the focusing lens to a first focal plane. The focused scattered radiation passes through the aperture before irradiating the detector. The detector output an intensity measurement of the scattered radiation that irradiates the detector.

摘要翻译： 光学检查器包括辐射源，时变光束反射器，远心扫描透镜，阻挡器，聚焦透镜，孔径和检测器。 辐射源用源光束照射时变光束反射器上的第一位置。 时变光束反射器将源光束引导到远心扫描透镜，然后再将源光束引导到透明样品。 源光束的一部分穿过透明样品到另一表面。 阻断剂阻止源于另一个表面的散射辐射。 来自透明样品的散射辐射不被阻断剂重新导向，并被聚焦透镜聚焦到第一焦平面。 聚焦的散射辐射在照射检测器之前穿过孔。 检测器输出照射检测器的散射辐射的强度测量值。

公开(公告)号：US08325334B2

公开(公告)日：2012-12-04

申请号：US12858669

申请日：2010-08-18

申请人： Mahendra P. Ramachandran ,  Steven W. Meeks ,  Alireza S. Moghadam ,  Hung P. Nguyen

发明人： Mahendra P. Ramachandran ,  Steven W. Meeks ,  Alireza S. Moghadam ,  Hung P. Nguyen

IPC分类号： G01N21/00 ,  G01N21/55

CPC分类号： G01N21/9503

摘要： An apparatus for inspecting an edge of a substrate. A light source produces a light beam, and a two-dimensional beam deflector receives the light beam and creates a semi-annular scanning beam. A first flared parabolic surface receives the semi-annular scanning beam and directs the semi-annular scanning beam onto the edge of the substrate, thereby creating specularly reflected light from the edge of the substrate. A second flared parabolic surface receives and directs the specularly reflected light to a detector. The detector receives the directed specularly reflected light and produces signals. An analyzer analyzes the signals and detects defects at the edge of the substrate.

摘要翻译： 一种用于检查基板边缘的装置。 光源产生光束，二维光束偏转器接收光束并产生半环形扫描光束。 第一扩张抛物面接收半环形扫描光束并将半环形扫描光束引导到衬底的边缘上，从而从衬底的边缘产生镜面反射的光。 第二个扩张的抛物线表面接收并将镜面反射光引导到检测器。 检测器接收定向镜面反射光并产生信号。 分析仪分析信号并检测基板边缘的缺陷。

公开(公告)号：US20110058174A1

公开(公告)日：2011-03-10

申请号：US12858669

申请日：2010-08-18

申请人： Mahendra P. Ramachandran ,  Steven W. Meeks ,  Alireza S. Moghadam ,  Hung P. Nguyen

发明人： Mahendra P. Ramachandran ,  Steven W. Meeks ,  Alireza S. Moghadam ,  Hung P. Nguyen

IPC分类号： G01N21/55

CPC分类号： G01N21/9503

摘要： An apparatus for inspecting an edge of a substrate. A light source produces a light beam, and a two-dimensional beam deflector receives the light beam and creates a semi-annular scanning beam. A first flared parabolic surface receives the semi-annular scanning beam and directs the semi-annular scanning beam onto the edge of the substrate, thereby creating specularly reflected light from the edge of the substrate. A second flared parabolic surface receives and directs the specularly reflected light to a detector. The detector receives the directed specularly reflected light and produces signals. An analyzer analyzes the signals and detects defects at the edge of the substrate.

摘要翻译： 一种用于检查基板边缘的装置。 光源产生光束，二维光束偏转器接收光束并产生半环形扫描光束。 第一扩张抛物面接收半环形扫描光束并将半环形扫描光束引导到衬底的边缘上，从而从衬底的边缘产生镜面反射的光。 第二个扩张的抛物线表面接收并将镜面反射光引导到检测器。 检测器接收定向镜面反射光并产生信号。 分析仪分析信号并检测基板边缘的缺陷。

公开(公告)号：US5716322A

公开(公告)日：1998-02-10

申请号：US614706

申请日：1996-03-13

申请人： Henry Hui ,  Leslie A. Feldman ,  Hung P. Nguyen ,  Debra Timm ,  Ron Albers

发明人： Henry Hui ,  Leslie A. Feldman ,  Hung P. Nguyen ,  Debra Timm ,  Ron Albers

IPC分类号： A61L2/16 ,  A61B1/00 ,  A61F2/00 ,  A61L2/20 ,  A61L27/30 ,  A61L27/34 ,  A61L27/50 ,  A61B1/04

CPC分类号： A61L27/50 ,  A61L2/20 ,  A61L27/303 ,  A61L27/306 ,  A61L27/34 ,  A61F2310/00574

摘要： Medical instruments incorporating solid lubricants are shown to survive an oxidizing sterilization process if they employ solid lubricants free from disulfide and diselenide compounds such as molybdenum disulfide and the instrument is kept free from such compounds. PTFE, powdered graphite and boron nitride are preferred solid lubricants. Of particular importance are flexible endoscope employing solid lubricants on fiber optic bundles encased in elastomeric coverings.

摘要翻译： 结合固体润滑剂的医疗仪器如果使用不含二硫化碳的固体润滑剂和二硫化碳化合物如二硫化钼，并且仪器不含此类化合物，则可在氧化灭菌过程中继续存活。 PTFE，粉状石墨和氮化硼是优选的固体润滑剂。 特别重要的是在包裹在弹性体覆盖层中的光纤束上采用固体润滑剂的柔性内窥镜。

公开(公告)号：US5058662A

公开(公告)日：1991-10-22

申请号：US588393

申请日：1990-09-26

申请人： Hung P. Nguyen

发明人： Hung P. Nguyen

IPC分类号： F28D1/03

CPC分类号： F28D1/0341

摘要： The tubes of a heat exchanger core are interlocked and spaced from are another prior to brazing in a furnace. Each of the separate plates of each tube is formed with discrete laterally spaced tabs which project transversely to the plane of the plate for spacing and for locking adjacent tubes with one another. These tabs are an integral part of stamped plate and are bent so that they are generally perpendicular to the plane of the plate. The locking tabs have a flat, upturned locking end that is resilient to closely fit over the end of an adjacent plate of an adjacent tube to interlock adjacent tubes together. Straight spacer tabs are used to spaced separate tubes from one another. These spacer tabs are similar to the locking tabs but have straight abutment ends instead of the flattened locking end portions to provide column support. With the locking and spacing tabs in place, the tubes are arrayed in a core which is securely interlocked and accurately spaced.

摘要翻译： 在炉中钎焊之前，热交换器芯的管是互锁的和间隔开的。 每个管的每个分开的板形成有离散的横向间隔开的突片，其横向于板的平面突出，用于间隔并且用于相互锁定相邻的管。 这些凸片是冲压板的组成部分，并被弯曲，使得它们大致垂直于板的平面。 锁定突片具有平坦的向上翻转的锁定端，其具有弹性以紧密地配合在相邻管的相邻板的端部上，以将相邻的管连接在一起。 使用直的间隔片用于将彼此分开的管彼此间隔开。 这些间隔片与锁定片相似，但是具有直的邻接端而不是扁平的锁定端部以提供柱支撑。 通过将锁定和间隔接头固定在适当的位置，管子被排列成牢固地互锁且准确间隔的芯部。

公开(公告)号：US08830456B2

公开(公告)日：2014-09-09

申请号：US13757099

申请日：2013-02-01

申请人： Steven W. Meeks ,  Rusmin Kudinar ,  Hung P. Nguyen

发明人： Steven W. Meeks ,  Rusmin Kudinar ,  Hung P. Nguyen

IPC分类号： G01N21/00 ,  G01N21/95 ,  G01N21/94

CPC分类号： G01N21/9501 ,  G01N21/94 ,  G01N21/9505 ,  G01N21/956 ,  G01N21/958

摘要： An optical inspector includes a radiating source, a time varying beam reflector, a telecentric scan lens, a separating mirror, and a first and second detector. The radiating source is configured to irradiate a first position on the time varying beam reflector with a source beam. The time varying beam reflector directs the source beam to the telecentric scan lens, which in turn directs the source beam to a sample. The telecentric scan lens directs specular reflection and near specular scattered radiation to the time varying beam reflector. The specular reflection is directed by the separating mirror to the first detector. The near specular scattered radiation is not reflected by the separating mirror and propagates to the second detector. In response, the optical inspector determines the total reflectivity, the surface slope, or the near specular scattered radiation intensity of the sample.

摘要翻译： 光学检查器包括辐射源，时变光束反射器，远心扫描透镜，分离镜以及第一和第二检测器。 辐射源被配置成用源光束照射时变光束反射器上的第一位置。 时变光束反射器将源光束引导到远心扫描透镜，然后将远光扫描透镜引导到源样品。 远心扫描透镜将镜面反射和近镜面散射辐射引导到时变光束反射器。 镜面反射由分离镜引导到第一检测器。 近镜面散射辐射不会被分离镜反射并传播到第二检测器。 作为响应，光学检查器确定样品的总反射率，表面斜率或近镜面散射辐射强度。

公开(公告)号：US08823935B1

公开(公告)日：2014-09-02

申请号：US12556596

申请日：2009-09-10

申请人： Steven W. Meeks ,  Xiaoqian Xu ,  Hung P. Nguyen ,  Alireza Shahdoost Moghadam ,  Mahendra Prabhu Ramachandran

发明人： Steven W. Meeks ,  Xiaoqian Xu ,  Hung P. Nguyen ,  Alireza Shahdoost Moghadam ,  Mahendra Prabhu Ramachandran

IPC分类号： G01N21/00

CPC分类号： G01N21/8806 ,  G01N2021/8845 ,  G01N2021/8848 ,  G01N2021/8854

摘要： A system to detect and classify defects on a surface of a substrate. A first targeting assembly directs radiation in a first beam onto the substrate. A first collecting assembly collects first radiation specularly reflected from the substrate and produces first signals, a second collecting assembly collects first radiation scattered from the surface of the substrate by defects and not micro-roughness and produces second signals, and a third collecting assembly collects first radiation scattered from the surface of the substrate by defects and micro-roughness and produces third signals. A second targeting assembly directs radiation in a second beam onto the substrate. A fourth collecting assembly collects second radiation scattered from the substrate and produces fourth signals. A processor receives the first, second, third, and fourth signals. A module coupled to the processor has logic instructions stored in a computer-readable medium, which configure the processor to analyze the signals to detect and classify the defects on the substrate.

摘要翻译： 用于检测和分类衬底表面上的缺陷的系统。 第一瞄准组件将第一光束中的辐射引导到衬底上。 第一收集组件收集从衬底反射的第一辐射并产生第一信号，第二收集组件通过缺陷而不是微粗糙度收集从衬底的表面散射的第一辐射，并产生第二信号，并且第三收集组件首先收集 通过缺陷和微粗糙度从基板的表面散射的辐射产生第三信号。 第二瞄准组件将第二射束中的辐射引导到衬底上。 第四收集组件收集从衬底散射的第二辐射并产生第四信号。 处理器接收第一，第二，第三和第四信号。 耦合到处理器的模块具有存储在计算机可读介质中的逻辑指令，其配置处理器来分析信号以检测和分类衬底上的缺陷。