公开(公告)号：US20190077656A1

公开(公告)日：2019-03-14

申请号：US15698706

申请日：2017-09-08

Applicant: TEXAS INSTRUMENTS INCORPORATED

Inventor： Benjamin Stassen COOK ,  Kurt WACHTLER ,  Adam Joseph FRUEHLING ,  Juan Alejandro HERBSOMMER ,  Simon Joshua JACOBS

IPC: B81C1/00 ,  G04F5/14

CPC classification number: B81C1/00793 ,  B81B3/0089 ,  B81B7/0038 ,  B81B2201/058 ,  B81B2203/0315 ,  G04F5/14 ,  H01L21/00

Abstract: Methods for depositing a measured amount of a species in a sealed cavity. In one example, a method for depositing molecules in a sealed cavity includes depositing a selected number of microcapsules in a cavity. Each of the microcapsules contains a predetermined amount of a first fluid. The cavity is sealed after the microcapsules are deposited. After the cavity is sealed the microcapsules are ruptured to release molecules of the first fluid into the cavity.