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公开(公告)号：US20190074233A1
公开(公告)日：2019-03-07
申请号：US15697505
申请日：2017-09-07
Applicant: TEXAS INSTRUMENTS INCORPORATED
Inventor： Adam Joseph FRUEHLING , Juan Alejandro HERBSOMMER , Simon Joshua JACOBS , Benjamin Stassen COOK
IPC: H01L23/08 , B81C1/00 , H01L21/768
CPC classification number: H01L23/08 , B81B2203/0315 , B81C1/00047 , B81C1/00333 , B81C2203/0136 , B81C2203/0145 , G04F5/14 , H01L21/76898
Abstract: A method for forming a sealed cavity includes bonding a non-conductive structure to a first substrate to form a non-conductive aperture into the first substrate. On a surface of the non-conductive structure opposite the first substrate, the method includes depositing a first metal layer. The method further includes patterning a first iris in the first metal layer, depositing a first dielectric layer on a surface of the first metal layer opposite the non-conductive structure, and patterning an antenna on a surface of the first dielectric layer opposite the first metal layer. The method also includes creating a cavity in the first substrate, depositing a second metal layer on a surface of the cavity, patterning a second iris in the second metal layer, and bonding a second substrate to a surface of the first substrate opposite the non-conductive structure to thereby seal the cavity.
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公开(公告)号：US20200207611A1
公开(公告)日：2020-07-02
申请号：US16813967
申请日：2020-03-10
Applicant: TEXAS INSTRUMENTS INCORPORATED
Inventor： Adam Joseph FRUEHLING , Juan Alejandro HERBSOMMER , Simon Joshua JACOBS , Benjamin Stassen Cook , James F. HALLAS , Randy LONG
Abstract: An electronic device includes a package substrate, a circuit assembly, and a housing. The circuit assembly is mounted on the package substrate. The circuit assembly includes a first sealed cavity formed in a device substrate. The housing is mounted on the package substrate to form a second sealed cavity about the circuit assembly.
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公开(公告)号：US20230246320A1
公开(公告)日：2023-08-03
申请号：US17587373
申请日：2022-01-28
Applicant: TEXAS INSTRUMENTS INCORPORATED
CPC classification number: H01P5/02 , H01P11/001 , H01L23/66 , H01L2223/6627
Abstract: In a described example, an apparatus includes a first substrate having a first side, a second side, and a coupling interface across a portion of the first side. The coupling interface including an arrangement of subwavelength periodic structures formed in the first substrate. A second substrate is coupled to a portion of the second side of the first substrate to form a sealed cavity aligned with the coupling interface.
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公开(公告)号：US20190072595A1
公开(公告)日：2019-03-07
申请号：US15695651
申请日：2017-09-05
Applicant: TEXAS INSTRUMENTS INCORPORATED
Inventor： Adam Joseph FRUEHLING , Juan Alejandro HERBSOMMER , Benjamin Stassen COOK , Swaminathan SANKARAN
IPC: G01R23/16
Abstract: A device includes a substrate that includes a resonant cavity. The resonant cavity includes a plurality of dipolar molecules that have an absorption frequency. The resonant cavity resonates at a frequency that is equal to the absorption frequency of the dipolar molecules. The device further includes a first port on the resonant cavity configured to receive a radio frequency (RF) signal.
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公开(公告)号：US20190072448A1
公开(公告)日：2019-03-07
申请号：US15698528
申请日：2017-09-07
Applicant: TEXAS INSTRUMENTS INCORPORATED
Inventor： Juan Alejandro HERBSOMMER , Adam Joseph FRUEHLING , Swaminathan SANKARAN , Benjamin Stassen COOK
IPC: G01L11/00
CPC classification number: G01L11/00
Abstract: A pressure transducer includes a cavity, dipolar molecules disposed within the cavity, and pressure measurement circuitry. The pressure measurement circuitry is configured to measure a width of an absorption peak of the dipolar molecules, and to determine a value of pressure in the cavity based on the width of the absorption peak.
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Patent Agency Ranking
公开(公告)号：US20190072447A1
公开(公告)日：2019-03-07
申请号：US15698445
申请日：2017-09-07
Applicant: TEXAS INSTRUMENTS INCORPORATED
Inventor： Benjamin Stassen COOK , Django TROMBLEY , Adam Joseph FRUEHLING , Juan Alejandro HERBSOMMER
IPC: G01L11/00
Abstract: A pressure transducer includes a cavity, a first dipolar molecule disposed within the cavity, and a second dipolar molecule disposed within the cavity. The first dipolar molecule exhibits a quantum rotational state transition at a fixed frequency with respect to cavity pressure. The second dipolar molecule exhibits a quantum rotation state transition at a frequency that varies with cavity pressure.
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公开(公告)号：US20200257250A1
公开(公告)日：2020-08-13
申请号：US16589176
申请日：2019-10-01
Applicant: TEXAS INSTRUMENTS INCORPORATED
Inventor： Bichoy BAHR , Argyrios DELLIS , Adam FRUEHLING , Juan Alejandro HERBSOMMER
IPC: G04F5/00
Abstract: A clock generator includes a hermetically sealed cavity and clock generation circuitry. A dipolar molecule in the hermetically sealed cavity has a quantum rotational state transition at a fixed frequency. The clock generation circuitry generates an output clock signal based on the fixed frequency of the dipolar molecule. The clock generation circuitry includes a detection circuit, a reference oscillator, and control circuitry. The detection circuit generates a first detection signal and a second detection signal representative of amplitude of signal at an output of the hermetically sealed cavity responsive to a first sweep signal and a second sweep signal input to the hermetically sealed cavity. The control circuitry sets a frequency of the reference oscillator based on a difference in time of identification of the fixed frequency of the dipolar molecule in the first detection signal and the second detection signal.
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公开(公告)号：US20190077656A1
公开(公告)日：2019-03-14
申请号：US15698706
申请日：2017-09-08
Applicant: TEXAS INSTRUMENTS INCORPORATED
Inventor： Benjamin Stassen COOK , Kurt WACHTLER , Adam Joseph FRUEHLING , Juan Alejandro HERBSOMMER , Simon Joshua JACOBS
CPC classification number: B81C1/00793 , B81B3/0089 , B81B7/0038 , B81B2201/058 , B81B2203/0315 , G04F5/14 , H01L21/00
Abstract: Methods for depositing a measured amount of a species in a sealed cavity. In one example, a method for depositing molecules in a sealed cavity includes depositing a selected number of microcapsules in a cavity. Each of the microcapsules contains a predetermined amount of a first fluid. The cavity is sealed after the microcapsules are deposited. After the cavity is sealed the microcapsules are ruptured to release molecules of the first fluid into the cavity.
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公开(公告)号：US20190071306A1
公开(公告)日：2019-03-07
申请号：US15697525
申请日：2017-09-07
Applicant: TEXAS INSTRUMENTS INCORPORATED
Inventor： Juan Alejandro HERBSOMMER , Simon Joshua JACOBS , Benjamin Stassen COOK , Adam Joseph FRUEHLING
IPC: B81C1/00 , H01L23/08 , H01L21/768
CPC classification number: B81C1/00047 , B81B2203/0315 , B81C1/00539 , G04F5/14 , H01L21/76898 , H01L23/08
Abstract: An illustrate method (and device) includes etching a cavity in a first substrate (e.g., a semiconductor wafer), forming a first metal layer on a first surface of the first substrate and in the cavity, and forming a second metal layer on a non-conductive structure (e.g., glass). The method also may include removing a portion of the second metal layer to form an iris to expose a portion of the non-conductive structure, forming a bond between the first metal layer and the second metal layer to thereby attach the non-conductive structure to the first substrate, sealing an interface between the non-conductive structure and the first substrate, and patterning an antenna on a surface of the non-conductive structure.
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公开(公告)号：US20190071304A1
公开(公告)日：2019-03-07
申请号：US15696245
申请日：2017-09-06
Applicant: TEXAS INSTRUMENTS INCORPORATED
Inventor： Adam Joseph FRUEHLING , Juan Alejandro HERBSOMMER , Simon Joshua JACOBS , Benjamin Stassen COOK , James F. HALLAS , Randy LONG
Abstract: An electronic device includes a package substrate, a circuit assembly, and a housing. The circuit assembly is mounted on the package substrate. The circuit assembly includes a first sealed cavity formed in a device substrate. The housing is mounted on the package substrate to form a second sealed cavity about the circuit assembly.
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