公开(公告)号：US20160225649A1

公开(公告)日：2016-08-04

申请号：US14609038

申请日：2015-01-29

Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.

Inventor： Chien-Fa LEE ,  Hsu-Shui LIU ,  Jiun-Rong PAI ,  Shou-Wen KUO

IPC: H01L21/677 ,  B65G1/137 ,  B65G1/10

CPC classification number: H01L21/67775 ,  B65G1/137 ,  H01L21/67769

Abstract: A load port for a processing tool includes a carrier, a carrier actuator, an input table, an input table actuator, and a controller. The carrier has a plurality of cassette buffering spaces. The carrier is movable relative to the processing tool. The carrier actuator is operably connected to the carrier. The input table is configured to receive at least one cassette. The input table is movable relative to the carrier. The input table actuator is operably connected to the input table. The controller is configured to control the carrier actuator to move the carrier, such that one of the cassette buffering spaces is aligned with the input table, configured to control the input table actuator to move the input table with the cassette into the aligned cassette buffering space, and configured to control the input table to load the cassette into the aligned cassette buffering space.

Abstract translation: 用于加工工具的装载端口包括载体，载体致动器，输入工作台，输入工作台致动器和控制器。 载体具有多个盒缓冲空间。 承载件相对于处理工具是可移动的。 载体致动器可操作地连接到载体。 输入表被配置为接收至少一个盒。 输入表相对于载体是可移动的。 输入表致动器可操作地连接到输入表。 所述控制器被配置成控制所述载体致动器以移动所述载体，使得所述盒缓冲空间中的一个与所述输入台对准，所述输入台配置成控制所述输入台致动器以使所述输入台与所述盒移动到所述对准的盒缓冲空间 并且被配置为控制输入表以将盒装载到对准的盒缓冲空间中。

公开(公告)号：US20190135156A1

公开(公告)日：2019-05-09

申请号：US15873061

申请日：2018-01-17

Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.

Inventor： Yi-Tang HUANG ,  Yuan-Yu FENG ,  Chia-Han LIN ,  Chien-Fa LEE

IPC: B60P1/64 ,  B65D90/00 ,  B66C1/66 ,  H01L21/677 ,  G06T7/00

Abstract: A method for transferring a container for holding one or more articles is provided. The method includes transferring the container using a transferring mechanism to a position which is adjacent to a destination space. The method further includes recording an image of the destination space before the container is deposited to the destination space. The method also includes performing an image analysis of the image and determining if the container is able to be sent to the destination space according to a result of the image analysis of the image.

公开(公告)号：US20190121245A1

公开(公告)日：2019-04-25

申请号：US16166993

申请日：2018-10-22

Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.

Inventor： Chun-Jung HUANG ,  Chien-Fa LEE ,  Yiang-Luen LIN ,  Sam CHIN

IPC: G03F7/20 ,  G06K7/10 ,  G06K7/14

Abstract: An automated photomask storage and retrieval system includes a plurality of mobile storage units aligned in a first direction. Each mobile storage unit is movable in the first direction and includes a plurality of storage cells. A gantry is disposed over the plurality of mobile storage units. The gantry includes a supporting frame movable in the first direction. The plurality of mobile storage units interpose a pair of supporting members of the supporting frame. A beam connects the pair of supporting members and is movable along the pair of supporting members in a second direction perpendicular to the first direction. The beam includes a plurality of buffer cells. A robotic arm is disposed adjacent to the plurality of buffer cells and movable along the beam. The robotic arm is configured to transfer a container containing a photomask between a storage cell and a buffer cell.

公开(公告)号：US20250062153A1

公开(公告)日：2025-02-20

申请号：US18936869

申请日：2024-11-04

Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.

Inventor： Chien-Fa LEE ,  Hsu-Shui LIU ,  Jiun-Rong PAI ,  Shou-Wen KUO ,  Jian-Hung CHEN ,  M.C. LIN ,  C.C. CHIEN ,  Hsuan LEE ,  Boris HUANG

IPC: H01L21/683 ,  H01L21/02 ,  H01L21/304 ,  H01L21/66

Abstract: A system and method for cleaning ring frames is disclosed. In one embodiment, a ring frame processing system includes: a plurality of blades for mechanically removing tapes and tape residues from surfaces of a ring frame; a plurality of wheel brushes for conditioning the surfaces of the ring frame; and a transport mechanism for transporting the ring frame.

公开(公告)号：US20210257247A1

公开(公告)日：2021-08-19

申请号：US17308786

申请日：2021-05-05

Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.

Inventor： Chien-Fa LEE ,  Hsu-Shui LIU ,  Jiun-Rong PAI ,  Shou-Wen KUO ,  Jian-Hung CHENG ,  M.C. LIN ,  C.C. CHIEN ,  Hsuan LEE ,  Boris HUANG

IPC: H01L21/683 ,  H01L21/304 ,  H01L21/66 ,  H01L21/02

Abstract: A system and method for cleaning and inspecting ring frames is disclosed here. In one embodiment, a ring frame processing system includes: a cleaning station configured to remove a first tape on a first surface of a ring frame using a first blade, clean first adhesive residues from the first tape on the first surface of the ring frame using a first wheel brush, and remove second adhesive residues from a second tape on a second surface of the ring frame using a second blade; and an inspection station, wherein the inspection station comprises an automated optical inspection system configured to determine the cleanness of the first and second surfaces of the ring frame after cleaning.

公开(公告)号：US20250112081A1

公开(公告)日：2025-04-03

申请号：US18981155

申请日：2024-12-13

Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.

Inventor： Chien-Fa LEE ,  Chin-Lin CHOU ,  Shang-Ying TSAI ,  Shou-Wen KUO ,  Kuei-Sung CHANG ,  Jiun-Rong PAI ,  Hsu-Shui LIU ,  Chun-wen CHENG

IPC: H01L21/683 ,  B25B11/00

Abstract: Disclosed is a vacuum chuck and a method for securing a warped semiconductor substrate during a semiconductor manufacturing process so as to improve its flatness during a semiconductor manufacturing process. For example, a semiconductor manufacturing system includes: a vacuum chuck configured to hold a substrate, wherein the vacuum chuck comprises, a plurality of vacuum grooves located on a top surface of the vacuum chuck, wherein the top surface is configured to face the substrate; and a plurality of flexible seal rings disposed on the vacuum chuck and extending outwardly from the top surface, wherein the plurality of flexible seal rings are configured to directly contact a bottom surface of the substrate and in adjacent to the plurality of vacuum grooves so as to form a vacuum seal between the substrate and the vacuum chuck, and wherein each of the plurality of flexible seal rings has a zigzag cross section.

公开(公告)号：US20220059393A1

公开(公告)日：2022-02-24

申请号：US16998461

申请日：2020-08-20

Applicant: Taiwan Semiconductor Manufacturing Co, Ltd.

Inventor： Chien-Fa LEE ,  Chin-Lin CHOU ,  Shang-Ying TSAI ,  Shou-Wen KUO ,  Kuei-Sung CHANG ,  Jiun-Rong PAI ,  Hsu-Shui LIU ,  Chun-wen CHENG

IPC: H01L21/683 ,  B25B11/00

Abstract: Disclosed is a vacuum chuck and a method for securing a warped semiconductor substrate during a semiconductor manufacturing process so as to improve its flatness during a semiconductor manufacturing process. For example, a semiconductor manufacturing system includes: a vacuum chuck configured to hold a substrate, wherein the vacuum chuck comprises, a plurality of vacuum grooves located on a top surface of the vacuum chuck, wherein the top surface is configured to face the substrate; and a plurality of flexible seal rings disposed on the vacuum chuck and extending outwardly from the top surface, wherein the plurality of flexible seal rings are configured to directly contact a bottom surface of the substrate and in adjacent to the plurality of vacuum grooves so as to form a vacuum seal between the substrate and the vacuum chuck, and wherein each of the plurality of flexible seal rings has a zigzag cross section.

公开(公告)号：US20170343906A1

公开(公告)日：2017-11-30

申请号：US15168424

申请日：2016-05-31

Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.

Inventor： Chun-Jung HUANG ,  Chien-Fa LEE ,  Yiang-Luen LIN ,  Sam CHIN

IPC: G03F7/20 ,  G06K7/14 ,  G06K7/10

CPC classification number: G03F7/70741

Abstract: An automated photomask storage and retrieval system includes a plurality of mobile storage units aligned in a first direction. Each mobile storage unit is movable in the first direction and includes a plurality of storage cells. A gantry is disposed over the plurality of mobile storage units. The gantry includes a supporting frame movable in the first direction. The plurality of mobile storage units interpose a pair of supporting members of the supporting frame. A beam connects the pair of supporting members and is movable along the pair of supporting members in a second direction perpendicular to the first direction. The beam includes a plurality of buffer cells. A robotic arm is disposed adjacent to the plurality of buffer cells and movable along the beam. The robotic arm is configured to transfer a container containing a photomask between a storage cell and a buffer cell.

公开(公告)号：US20160111311A1

公开(公告)日：2016-04-21

申请号：US14518373

申请日：2014-10-20

Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.

Inventor： Chien-Fa LEE ,  Hsu-Shui LIU ,  Jiun-Rong PAI ,  Shou-Wen KUO

IPC: H01L21/68 ,  H01L21/683 ,  H01L21/677 ,  H01L21/673

CPC classification number: H01L21/67259 ,  H01L21/67265 ,  H01L21/67778 ,  H01L21/68

Abstract: A wafer transfer method includes the following steps. An initial position of a first wafer in a wafer cassette is detected. A picking entry position in the wafer cassette is determined based on the initial position of the first wafer, in which the picking entry position is spaced apart from the initial position of the first wafer. A wafer transfer blade is moved to the picking entry position.

Abstract translation: 晶片转印方法包括以下步骤。 检测晶片盒中的第一晶片的初始位置。 基于第一晶片的初始位置来确定晶片盒中的拾取进入位置，其中拾取进入位置与第一晶片的初始位置间隔开。 晶片转印刀片移动到拾取进入位置。