公开(公告)号：US20080305434A1

公开(公告)日：2008-12-11

申请号：US11631514

申请日：2005-07-13

申请人： Takanori Nishi ,  Takahiro Kitano ,  Katsuya Okumura

发明人： Takanori Nishi ,  Takahiro Kitano ,  Katsuya Okumura

IPC分类号： G03F7/20 ,  G03D3/00

CPC分类号： G03F7/3021 ,  G03F7/26 ,  G03F7/38 ,  H01L21/67109 ,  H01L21/6715 ,  H01L21/67178

摘要： A developing apparatus has a substrate holder to hold a substrate, a heater which is provided in a substrate holder, and heats a substrate on a substrate holder for processing a resist film by PEB, a cooler to cool a substrate on a substrate holder, a developing solution nozzle to supply a developing solution to a substrate on a substrate holder, and a controller to control a heater, a cooler and a developing nozzle.

摘要翻译： 显影装置具有用于保持基板的基板保持器，设置在基板保持器中的加热器，并且加热用于通过PEB处理抗蚀剂膜的基板保持器上的基板，冷却器以冷却基板保持器上的基板， 显影溶液喷嘴将显影液供给到基板保持器上的基板，以及控制器，用于控制加热器，冷却器和显影喷嘴。

公开(公告)号：US07740410B2

公开(公告)日：2010-06-22

申请号：US11631514

申请日：2005-07-13

申请人： Takanori Nishi ,  Takahiro Kitano ,  Katsuya Okumura

发明人： Takanori Nishi ,  Takahiro Kitano ,  Katsuya Okumura

IPC分类号： G03B5/00 ,  G03B13/00

CPC分类号： G03F7/3021 ,  G03F7/26 ,  G03F7/38 ,  H01L21/67109 ,  H01L21/6715 ,  H01L21/67178

摘要： A developing apparatus has a substrate holder to hold a substrate, a heater which is provided in a substrate holder, and heats a substrate on a substrate holder for processing a resist film by PEB, a cooler to cool a substrate on a substrate holder, a developing solution nozzle to supply a developing solution to a substrate on a substrate holder, and a controller to control a heater, a cooler and a developing nozzle.

摘要翻译： 显影装置具有用于保持基板的基板保持器，设置在基板保持器中的加热器，并且加热用于通过PEB处理抗蚀剂膜的基板保持器上的基板，冷却器以冷却基板保持器上的基板， 显影溶液喷嘴将显影液供给到基板保持器上的基板，以及控制器，用于控制加热器，冷却器和显影喷嘴。

公开(公告)号：US08021062B2

公开(公告)日：2011-09-20

申请号：US12774006

申请日：2010-05-05

申请人： Takanori Nishi ,  Takahiro Kitano ,  Katsuya Okumura

发明人： Takanori Nishi ,  Takahiro Kitano ,  Katsuya Okumura

IPC分类号： G03B13/00 ,  G03B5/00

CPC分类号： G03F7/3021 ,  G03F7/26 ,  G03F7/38 ,  H01L21/67109 ,  H01L21/6715 ,  H01L21/67178

摘要： A developing apparatus has a substrate holder to hold a substrate, a heater which is provided in a substrate holder, and heats a substrate on a substrate holder for processing a resist film by PEB, a cooler to cool a substrate on a substrate holder, a developing solution nozzle to supply a developing solution to a substrate on a substrate holder, and a controller to control a heater, a cooler and a developing nozzle.

摘要翻译： 显影装置具有用于保持基板的基板保持器，设置在基板保持器中的加热器，并且加热用于通过PEB处理抗蚀剂膜的基板保持器上的基板，冷却器以冷却基板保持器上的基板， 显影溶液喷嘴将显影液供给到基板保持器上的基板，以及控制器，用于控制加热器，冷却器和显影喷嘴。

公开(公告)号：US20070275178A1

公开(公告)日：2007-11-29

申请号：US11630440

申请日：2005-07-13

申请人： Takanori Nishi ,  Takahiro Kitano ,  Katsuya Okumura

发明人： Takanori Nishi ,  Takahiro Kitano ,  Katsuya Okumura

IPC分类号： B05D1/18 ,  B05B5/00

CPC分类号： G03F7/38 ,  H01L21/67109 ,  H01L21/67748

摘要： A substrate heating apparatus for heating a substrate coated with a film of chemically amplified resist within a period after exposure and before development, having a mounting table to mount the substrate substantially horizontal with the resist-coated film faced up, a fluid supply mechanism for supplying glycerin to the substrate, and a heating mechanism for heating the substrate on a mounting table, in a state that glycerin contacts a resist-coated film, wherein the substrate on a mounting table is heated, in a state that glycerin contacts the resist-coated film.

摘要翻译： 一种基板加热装置，用于在曝光和显影之前的一段时间内加热涂覆有化学放大型抗蚀剂膜的基板，该基板加热装置具有安装台，用于将基板保持在水平面上，使抗蚀剂涂覆膜面朝上;流体供应机构，用于供应 甘油与基材的加热机构，以及加热机构，其用于在甘油接触抗蚀剂涂布膜的状态下将载体加热到安装台上，其中，在甘油接触抗蚀剂涂布的状态下，将载置台上的基板加热 电影。

公开(公告)号：US08522712B2

公开(公告)日：2013-09-03

申请号：US12943204

申请日：2010-11-10

申请人： Koukichi Hiroshiro ,  Takanori Nishi ,  Takahiro Kitano ,  Shoichi Terada

发明人： Koukichi Hiroshiro ,  Takanori Nishi ,  Takahiro Kitano ,  Shoichi Terada

IPC分类号： B05C5/02

CPC分类号： H01L21/67173 ,  B82Y10/00 ,  B82Y40/00 ,  G03F7/0002 ,  H01L21/67028 ,  H01L21/67034 ,  H01L21/6715 ,  H01L21/67757

摘要： In a template treatment of forming a film of a release agent on a treatment surface of a template, the treatment surface of the template is first cleaned. Thereafter, in a coating unit, the release agent is applied to the treatment surface of the template. The release agent on the template is then dried. Then, alcohol is applied to the release agent on the template to make the release agent adhere to the treatment surface of the template and to remove an unreacted portion of the release agent. Thereafter, the alcohol on the template is dried and removed. In this manner, a film of the release agent is formed in a predetermined film thickness on the treatment surface of the template.

摘要翻译： 在模板处理面上形成脱模剂的膜的模板处理中，首先对模板的处理面进行清洗。 此后，在涂布单元中，将脱模剂施加到模板的处理表面。 然后将模板上的脱模剂干燥。 然后，将酒精施加到模板上的脱模剂上，使脱模剂粘附在模板的处理表面上，并除去脱模剂的未反应部分。 此后，将模板上的醇干燥并除去。 以这种方式，在模板的处理表面上以预定的膜厚度形成剥离剂的膜。

公开(公告)号：US08468943B2

公开(公告)日：2013-06-25

申请号：US13393250

申请日：2010-08-25

申请人： Koukichi Hiroshiro ,  Takanori Nishi ,  Shoichi Terada ,  Takahiro Kitano

发明人： Koukichi Hiroshiro ,  Takanori Nishi ,  Shoichi Terada ,  Takahiro Kitano

IPC分类号： H01L21/27 ,  B29C59/02 ,  B41F1/00 ,  B41F33/00 ,  B05D1/32 ,  B01D5/00 ,  B01D3/02 ,  G01B17/00

CPC分类号： B29C37/0053 ,  B29C33/20 ,  B29C43/021 ,  B29C59/022 ,  B29C2043/025 ,  B29C2043/3488 ,  B29K2105/0002 ,  B82Y10/00 ,  B82Y40/00 ,  G03F7/0002

摘要： The present invention provides a method for applying an application liquid between a template and a substrate, and transferring the transfer pattern onto the application liquid. The template is inclinedly arranged with respect to the substrate in a manner that a first distance between a first end portion of the template and the substrate is a distance that causes a capillary action of the application liquid to occur, and a second distance between a second end portion of the template that opposes the first end portion and the substrate is a distance that does not cause the capillary action of the application liquid to occur. Thereafter, the application liquid is supplied from an outer side of the first end portion to the first end portion. Thereafter, the second end portion and the substrate are relatively moved so that the second distance becomes equal to the first distance.

摘要翻译： 本发明提供了一种在模板和基板之间施加涂布液并将转印图案转印到涂布液上的方法。 模板相对于基板倾斜地布置，使得模板的第一端部与基板之间的第一距离是引起施加液体的毛细作用的距离，并且第二距离在第二 与第一端部和基板相对的模板的端部是不会引起施加液的毛细作用的距离。 此后，将应用液从第一端部的外侧供给到第一端部。 此后，第二端部和基板相对移动，使得第二距离变得等于第一距离。

公开(公告)号：US20120152136A1

公开(公告)日：2012-06-21

申请号：US13393250

申请日：2010-08-25

申请人： Koukichi Hiroshiro ,  Takanori Nishi ,  Shoichi Terada ,  Takahiro Kitano

发明人： Koukichi Hiroshiro ,  Takanori Nishi ,  Shoichi Terada ,  Takahiro Kitano

IPC分类号： B41F1/04

CPC分类号： B29C37/0053 ,  B29C33/20 ,  B29C43/021 ,  B29C59/022 ,  B29C2043/025 ,  B29C2043/3488 ,  B29K2105/0002 ,  B82Y10/00 ,  B82Y40/00 ,  G03F7/0002

摘要： The present invention provides a method for applying an application liquid between a template and a substrate, and transferring the transfer pattern onto the application liquid. The template is inclinedly arranged with respect to the substrate in a manner that a first distance between a first end portion of the template and the substrate is a distance that causes a capillary action of the application liquid to occur, and a second distance between a second end portion of the template that opposes the first end portion and the substrate is a distance that does not cause the capillary action of the application liquid to occur. Thereafter, the application liquid is supplied from an outer side of the first end portion to the first end portion. Thereafter, the second end portion and the substrate are relatively moved so that the second distance becomes equal to the first distance.

摘要翻译： 本发明提供了一种在模板和基板之间施加涂布液并将转印图案转印到涂布液上的方法。 模板相对于基板倾斜地布置，使得模板的第一端部与基板之间的第一距离是引起施加液体的毛细作用的距离，并且第二距离在第二 与第一端部和基板相对的模板的端部是不会引起施加液的毛细作用的距离。 此后，将应用液从第一端部的外侧供给到第一端部。 此后，第二端部和基板相对移动，使得第二距离变得等于第一距离。

公开(公告)号：US20110117291A1

公开(公告)日：2011-05-19

申请号：US12943204

申请日：2010-11-10

申请人： Koukichi HIROSHIRO ,  Takanori Nishi ,  Takahiro Kitano ,  Shoichi Terada

发明人： Koukichi HIROSHIRO ,  Takanori Nishi ,  Takahiro Kitano ,  Shoichi Terada

IPC分类号： B05D3/06 ,  B05D1/36 ,  B05D3/10 ,  B05C5/00 ,  B05B5/025 ,  B05C11/00 ,  B05C3/00 ,  G05D7/00

CPC分类号： H01L21/67173 ,  B82Y10/00 ,  B82Y40/00 ,  G03F7/0002 ,  H01L21/67028 ,  H01L21/67034 ,  H01L21/6715 ,  H01L21/67757

摘要： In a template treatment of forming a film of a release agent on a treatment surface of a template, the treatment surface of the template is first cleaned. Thereafter, in a coating unit, the release agent is applied to the treatment surface of the template. The release agent on the template is then dried. Then, alcohol is applied to the release agent on the template to make the release agent adhere to the treatment surface of the template and to remove an unreacted portion of the release agent. Thereafter, the alcohol on the template is dried and removed. In this manner, a film of the release agent is formed in a predetermined film thickness on the treatment surface of the template.

摘要翻译： 在模板处理面上形成脱模剂的膜的模板处理中，首先对模板的处理面进行清洗。 此后，在涂布单元中，将脱模剂施加到模板的处理表面。 然后将模板上的脱模剂干燥。 然后，将酒精施加到模板上的脱模剂上，使脱模剂粘附在模板的处理表面上，并除去脱模剂的未反应部分。 此后，将模板上的醇干燥并除去。 以这种方式，在模板的处理表面上以预定的膜厚度形成剥离剂的膜。

公开(公告)号：US20090263698A1

公开(公告)日：2009-10-22

申请号：US12090624

申请日：2006-10-03

申请人： Shouji Sekino ,  Hiroshi Kajitani ,  Takashi Manako ,  Hidekazu Kimura ,  Kenji Kobayashi ,  Suguru Watanabe ,  Takanori Nishi

发明人： Shouji Sekino ,  Hiroshi Kajitani ,  Takashi Manako ,  Hidekazu Kimura ,  Kenji Kobayashi ,  Suguru Watanabe ,  Takanori Nishi

IPC分类号： H01M8/10

CPC分类号： H01M8/2455 ,  H01M8/0265 ,  H01M8/04201 ,  H01M8/04216 ,  H01M8/04291 ,  H01M8/1011 ,  H01M8/1097 ,  H01M2250/30 ,  Y02B90/18 ,  Y02E60/523

摘要： A fuel cell system which allows uniform fuel distribution to respective fuel cells, comprising: a plurality of fuel cells 5 each including an anode 2, a cathode 3 and an electrolyte membrane 4 disposed between the anode 2 and the cathode 3; and a fuel supply flow path 6 branched to supply fuel to each of the fuel cells 5. The sectional area of the fuel supply flow path in the downstream of each branch connection is narrower than that in the upstream. The above-described structure avoids the decrease in the fuel supply pressure due to the reduced sectional area in the downstream of the branch connection. Therefore, the fuel is supplied to the respective fuel cell with uniform pressure.

摘要翻译： 一种燃料电池系统，其允许均匀的燃料分配到各个燃料电池，包括：多个燃料电池5，每个燃料电池包括设置在阳极2和阴极3之间的阳极2，阴极3和电解质膜4; 以及向各燃料电池单元5供给燃料的燃料供给流路6.分支连接部的下游侧的燃料供给流路的截面积比上游窄。 上述结构避免了由于分支连接的下游侧的截面面积减小导致的燃料供给压力的下降。 因此，燃料以均匀的压力供给到各个燃料电池。

公开(公告)号：US20140079984A1

公开(公告)日：2014-03-20

申请号：US14116334

申请日：2012-05-10

申请人： Hiroshi Kajitani ,  Kentaro Nakahara ,  Takanori Nishi ,  Shigeyuki Iwasa ,  Haruyuki Yoshigahara ,  Yoichi Shimizu

发明人： Hiroshi Kajitani ,  Kentaro Nakahara ,  Takanori Nishi ,  Shigeyuki Iwasa ,  Haruyuki Yoshigahara ,  Yoichi Shimizu

IPC分类号： H01M2/02 ,  H01M2/06 ,  H01M4/66

CPC分类号： H01M2/0212 ,  H01M2/021 ,  H01M2/0215 ,  H01M2/026 ,  H01M2/027 ,  H01M2/0277 ,  H01M2/0285 ,  H01M2/0287 ,  H01M2/06 ,  H01M2/08 ,  H01M4/661 ,  H01M4/667 ,  H01M4/668 ,  H01M10/052 ,  H01M10/0585 ,  Y02E60/122 ,  Y02P70/54 ,  Y10T29/49108

摘要： A non-aqueous secondary battery includes: a positive-electrode collector layer; a positive-electrode layer formed on one surface of the positive-electrode collector layer; a negative-electrode collector layer; a negative-electrode layer formed on one surface of the negative-electrode collector layer so as to be opposed to the positive-electrode layer; a separator provided between the positive-electrode layer and the negative-electrode layer; and a positive-electrode-side insulating layer and a negative-electrode-side insulating layer respectively formed on another surface of the positive-electrode collector layer and another surface of the negative-electrode collector layer. Circumferential inner surfaces of peripheral edges of the positive-electrode collector layer and the negative-electrode collector layer are joined with a sealing agent including at least a positive-electrode fusion layer, a gas barrier layer, and a negative-electrode fusion layer. The positive-electrode-side insulating layer and/or the negative-electrode-side insulating layer has a battery-side recess provided on a surface.

摘要翻译： 非水二次电池包括：正极集电体层; 形成在所述正极集电体层的一个面上的正极层; 负极集电体层; 负极层，形成在所述负极集电体层的一个表面上，以与所述正极层相对; 设置在所述正极层和所述负极层之间的隔膜; 以及分别形成在正极集电体层的另一个表面和负极集电体层的另一个表面上的正极侧绝缘层和负极侧绝缘层。 正极集电体层和负极集电体层的周缘的周向内表面与至少包含正极聚合层，阻气层和负极熔融层的密封剂接合。 正极侧绝缘层和/或负极侧绝缘层具有设置在表面上的电池侧凹部。