公开(公告)号：US20220216073A1

公开(公告)日：2022-07-07

申请号：US17646571

申请日：2021-12-30

申请人： Tokyo Electron Limited

发明人： Kiyoshi Mori ,  Takayuki Yamagishi

IPC分类号： H01L21/67 ,  H01L21/677 ,  H01L21/687

摘要： A processing module includes: a processing container including therein processing spaces in which stages are disposed, respectively, wherein a center of each of the processing spaces is located on a same circumference; a rotation arm including holders configured to hold wafers, which are placed on the stages of the processing spaces, respectively, wherein the rotation arm is rotatable around a center of the circumference as a rotation axis; and a sensor located between adjacent processing spaces and configured to detect positions of the wafers held by the rotation arm during rotational operation of the rotation arm.

公开(公告)号：US12080523B2

公开(公告)日：2024-09-03

申请号：US17444680

申请日：2021-08-09

申请人： Tokyo Electron Limited

发明人： Kiyoshi Mori

IPC分类号： H01J37/32 ,  H01J37/244

CPC分类号： H01J37/32513 ,  H01J37/244 ,  H01J37/32715 ,  H01J2237/2006 ,  H01J2237/20285 ,  H01J2237/3321 ,  H01J2237/334

摘要： The present disclosure relates to a vacuum processing apparatus. The vacuum processing apparatus includes a processing container capable of maintaining an inside thereof in a vacuum atmosphere, a stage provided in the processing container and on which a substrate is placed, a support member passing through an opening formed at a bottom of the processing container to support the stage from below, a holder part located outside the processing container, a flange part arranged around the opening on the outside of the processing container, and a sealing part configured to be expandable and contractible and provided inside the spherical bearing along the circumferential direction of the opening so as to airtightly seal at least a space between the flange part and the holder part.

公开(公告)号：US11244810B2

公开(公告)日：2022-02-08

申请号：US16872778

申请日：2020-05-12

申请人： TOKYO ELECTRON LIMITED

发明人： Kiyoshi Mori ,  Yuki Osada ,  Jun Nakagomi ,  Yoshiyuki Harima

IPC分类号： H01J37/32 ,  H05H1/46

摘要： An electric field sensor includes a probe, a cylindrical probe guide, an insulating member, a preload spring and a connector. The probe serves as an inner conductor of a coaxial transmission path and has a portion forming a monopole antenna at a tip end to be in constant contact with a microwave transmission window by a pressing force of a built-in spring thereof. The probe guide is disposed at an outer side of the probe and serves as an outer conductor of the coaxial transmission path. The insulating member is disposed between the probe and the probe guide. The preload spring preloads the probe guide downward and presses the probe guide so that the tip end of the probe guide comes in constant contact with the planar slot antenna. The connector is connected to the probe and the probe guide to connect coaxial signal cables for extracting signals.

公开(公告)号：US12068662B2

公开(公告)日：2024-08-20

申请号：US17447221

申请日：2021-09-09

申请人： Tokyo Electron Limited

发明人： Kiyoshi Mori

IPC分类号： H02K7/14 ,  C23C16/458 ,  C23C16/50

CPC分类号： H02K7/14 ,  C23C16/4584 ,  C23C16/50

摘要： A rotary mechanism connects a first rotary part and a second rotary part, without using a coupling and while allowing an installation error between the first rotary part and the second rotary part. A rotation body includes a first rotary part and a first fixed part. A flat plate is fixed to the first fixed part of the rotation body and has rigidity in a rotating direction of the first rotary part and flexibility in an axial direction for the rotating direction. A motor includes a second rotary part coaxially fixed to the first rotary part of the rotation body and a second fixed part fixed to the flat plate.