公开(公告)号：US11903302B2

公开(公告)日：2024-02-13

申请号：US17549066

申请日：2021-12-13

Applicant: Universal Display Corporation

Inventor： Kent Khuong Nguyen ,  Sriram Krishnaswami ,  Daniel Toet ,  Jeff Hawthorne ,  William E. Quinn

IPC: H10K71/16 ,  H10K71/13 ,  C23C14/50 ,  C23C14/04 ,  C23C14/22 ,  H10K71/10

CPC classification number: H10K71/135 ,  C23C14/04 ,  C23C14/228 ,  C23C14/50 ,  H10K71/164 ,  H10K71/191

Abstract: Systems and methods for depositing materials on a substrate via OVJP are provided. A float table and grippers are used to move and position the substrate relative to one or more OVJP print bars to reduce the chance of damaging or compromising the substrate or prior depositions.

公开(公告)号：US20230255098A1

公开(公告)日：2023-08-10

申请号：US18100820

申请日：2023-01-24

Applicant: UNIVERSAL DISPLAY CORPORATION

Inventor： Jeff Hawthorne ,  Sriram Krishnaswami ,  Kent Khuong Nguyen

IPC: H10K71/60 ,  C23C14/12 ,  C23C14/22 ,  C23C14/50

CPC classification number: H10K71/611 ,  C23C14/12 ,  C23C14/50 ,  C23C14/228

Abstract: A chuck for holding a workpiece in a deposition system is provided, which includes a base having a base surface with a flatness tolerance of not greater than 30 µm and a clamp having a surface configured to be attached to a substrate, which has a flatness tolerance of not greater than 30 µm. The clamp also includes a substrate holder configured to hold a substrate above the second clamp surface.

公开(公告)号：US12274155B2

公开(公告)日：2025-04-08

申请号：US18402792

申请日：2024-01-03

Applicant: Universal Display Corporation

Inventor： Kent Khuong Nguyen ,  Sriram Krishnaswami ,  Daniel Toet ,  Jeff Hawthorne ,  William E. Quinn

IPC: H10K71/16 ,  C23C14/04 ,  C23C14/22 ,  C23C14/50 ,  H10K71/10 ,  H10K71/13

Abstract: Systems and methods for depositing materials on a substrate via OVJP are provided. A float table and grippers are used to move and position the substrate relative to one or more OVJP print bars to reduce the chance of damaging or compromising the substrate or prior depositions.