-
公开(公告)号:US12274155B2
公开(公告)日:2025-04-08
申请号:US18402792
申请日:2024-01-03
Applicant: Universal Display Corporation
Inventor: Kent Khuong Nguyen , Sriram Krishnaswami , Daniel Toet , Jeff Hawthorne , William E. Quinn
Abstract: Systems and methods for depositing materials on a substrate via OVJP are provided. A float table and grippers are used to move and position the substrate relative to one or more OVJP print bars to reduce the chance of damaging or compromising the substrate or prior depositions.
-
公开(公告)号:US11903302B2
公开(公告)日:2024-02-13
申请号:US17549066
申请日:2021-12-13
Applicant: Universal Display Corporation
Inventor: Kent Khuong Nguyen , Sriram Krishnaswami , Daniel Toet , Jeff Hawthorne , William E. Quinn
CPC classification number: H10K71/135 , C23C14/04 , C23C14/228 , C23C14/50 , H10K71/164 , H10K71/191
Abstract: Systems and methods for depositing materials on a substrate via OVJP are provided. A float table and grippers are used to move and position the substrate relative to one or more OVJP print bars to reduce the chance of damaging or compromising the substrate or prior depositions.
-
公开(公告)号:US20230255098A1
公开(公告)日:2023-08-10
申请号:US18100820
申请日:2023-01-24
Applicant: UNIVERSAL DISPLAY CORPORATION
Inventor: Jeff Hawthorne , Sriram Krishnaswami , Kent Khuong Nguyen
CPC classification number: H10K71/611 , C23C14/12 , C23C14/50 , C23C14/228
Abstract: A chuck for holding a workpiece in a deposition system is provided, which includes a base having a base surface with a flatness tolerance of not greater than 30 µm and a clamp having a surface configured to be attached to a substrate, which has a flatness tolerance of not greater than 30 µm. The clamp also includes a substrate holder configured to hold a substrate above the second clamp surface.
-
公开(公告)号:US20230011198A1
公开(公告)日:2023-01-12
申请号:US17848674
申请日:2022-06-24
Applicant: Universal Display Corporation
Inventor: William E. QUINN , Craig Anthony Outten , Kent Khuong Nguyen , Steven Shigeki Aochi , Neil D. NGUYEN
Abstract: Embodiments of the disclosed subject matter provide a system having at least one carrier gas source, at least one heated container that includes organic material, and a jet array print head that includes a plurality of apertures to print lines on a substrate, and that is connected to a vacuum source. The system includes a pair of gas bearing plates, with a top gas bearing plate and a bottom gas bearing plate, each having a plurality of pressure apertures and vacuum apertures. The top gas bearing plate applies a uniform force to a top surface of the substrate, and the bottom gas bearing plate applies a uniform force to a bottom surface of the substrate. The top gas bearing plate includes a slot configured for the print head to fit within. The vacuum apertures are arranged perpendicular to a direction of travel of the substrate.
-
-
-