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公开(公告)号：US5028955A
公开(公告)日：1991-07-02
申请号：US480005
申请日：1990-02-14
申请人： Yasushi Hayashida , Noriyuki Anai , Osamu Hirakawa , Masami Akimoto , Yasuhiro Sakamoto , Keisuke Shigaki , Masashi Moriyama
发明人： Yasushi Hayashida , Noriyuki Anai , Osamu Hirakawa , Masami Akimoto , Yasuhiro Sakamoto , Keisuke Shigaki , Masashi Moriyama
IPC分类号： G03F7/20
CPC分类号： G03F7/70725 , G03F7/2051
摘要： An exposure apparatus of this invention is used in an exposure process of semiconductor and LCD devices. The exposure apparatus includes a stage on which a semiconductor wafer is placed, a rotating mechanism for rotating the stage, a radiation unit arranged to oppose a support surface of the stage, a slider mechanism for reciprocating the radiation unit along a straight line passing through the center of the support surface of the stage, an exposure range input unit for inputting a desired exposure range of the wafer, an exposure range memory unit for storing the input exposure range, a CCD image sensor for detecting a reference position of the wafer, a relative position detector for detecting a relative position between the detected reference position and the radiation unit, a controller for controlling the sliding mechanism in correspondence with the relative position and the exposure range, and a light amount control mechanism for controlling an amount of light radiated from the irradiation mechanism to the wafer in correspondence with the relative position and the exposure range.
摘要翻译： 本发明的曝光装置用于半导体和LCD装置的曝光处理。 曝光装置包括其上放置有半导体晶片的台，用于旋转台的旋转机构，布置成与舞台的支撑表面相对的辐射单元，用于使辐射单元沿着穿过 舞台的支撑表面的中心，用于输入晶片的期望曝光范围的曝光范围输入单元，用于存储输入曝光范围的曝光范围存储单元，用于检测晶片的参考位置的CCD图像传感器， 相对位置检测器，用于检测检测到的基准位置和辐射单元之间的相对位置，控制器，用于根据相对位置和曝光范围来控制滑动机构;以及光量控制机构，用于控制从 对应于相对位置和曝光范围的到晶片的照射机构。
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公开(公告)号：US06620517B2
公开(公告)日：2003-09-16
申请号：US09980812
申请日：2001-12-07
IPC分类号： B32B2508
CPC分类号： B29C45/14778 , B29C45/0005 , B29C45/14811 , B29C45/1657 , B29C45/1676 , B29C2045/1692 , B29K2621/00 , B29K2715/006 , Y10T428/31663 , Y10T428/31667 , Y10T428/31917
摘要： A method of producing a rubber-resin composite whose vulcanized rubber and thermoplastic resin moldings are bonded together by high adhesive strength at low cost, satisfying both moldability and mechanical strength. It comprises: (1) making the vulcanized rubber molding by vulcanization molding, (2) forming an adhesive layer, whose principal ingredient is chlorosulfonated polyethylene, on a surface of the rubber molding to be bonded to the resin, and (3) while arranging the rubber molding in a mold, pouring the thermoplastic resin containing 30˜60 wt. % of glass fiber in a molten state into the mold to form the resin molding.
摘要翻译： 制造橡胶树脂复合体的方法，其中硫化橡胶和热塑性树脂模制品以低成本粘合强度高粘合在一起，同时满足成型性和机械强度。 其特征在于：（1）通过硫化成型制造硫化橡胶成型体，（2）将主要成分为氯磺化聚乙烯的粘合层形成在与树脂接合的橡胶成型体的表面上，（3） 在模具中的橡胶成型，浇注含有30〜60重量％的热塑性树脂。 ％的玻璃纤维在熔融状态下进入模具以形成树脂成型体。
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3.发明授权
公开(公告)号：US5135212A
公开(公告)日：1992-08-04
申请号：US478634
申请日：1990-02-12
CPC分类号： G07D11/0057 , G07D11/0051
摘要： In a method of and an apparatus for transferring supplementary paper money in an automatic teller machine that includes a paper-money processing mechanism that has a plurality of transport routes formed among the paper-money that provide a path between a plurality of paper-money containers, a cassette storing a supplementary money supply and a paper-money discriminator part for transporting paper money. A plurality of changeover gates are provided at the forks of the transport routes for changing the destination of paper money, and a control part for controlling the transportation routes and the changeover gates. The method and apparatus optimize the transfer of supplementary paper-money, and a control part for controlling the transport routes and the changeover gates. The method and apparatus optimize the transfer of supplementary paper-money by checking for times in which the paper-money processing mechanism, especially the transport routes, are not in use.
摘要翻译： 一种用于在自动提款机中传送补充纸币的方法和装置，该自动提款机包括一个纸币处理机构，该纸币处理机构具有在纸币之间形成的多条运输路线，该纸币提供多个纸币容器之间的路径 ，存储补充货币供应的盒子和用于运送纸币的纸币鉴别器部件。 在用于改变纸币的目的地的运输路线的叉子处设置有多个转换门，以及用于控制运输路线和转换门的控制部分。 该方法和装置优化补充纸币的转移，以及用于控制运输路线和转换门的控制部分。 该方法和装置通过检查纸币处理机制，特别是运输路线未被使用的时间来优化补充纸币的转移。
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公开(公告)号：US5035200A
公开(公告)日：1991-07-30
申请号：US579251
申请日：1990-09-05
IPC分类号： B01J4/00 , B01J19/00 , H01L21/304
CPC分类号： B01J19/0006
摘要： A processing liquid supply unit comprises a storage tank for storing a processing liquid, a sensor for sensing the amount of processing liquid stored in the storage tank, a refilling mechanism for automatically refilling the processing liquid into the storage tank when the sensor senses that the amount of processing liquid in the storage tank drops below the specified value and a processing liquid delivery mechanism for delivering the processing liquid from the storage tank to an object being processed.
摘要翻译： 处理液体供应单元包括用于存储处理液体的储存罐，用于感测存储在储存罐中的处理液体的量的传感器，当传感器感测到该量时，自动将处理液体重新填充到储存罐中的再填充机构 储存罐中的处理液的液滴低于规定值，以及处理液输送机构，用于将处理液从储罐输送到被处理物。
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公开(公告)号：US4982694A
公开(公告)日：1991-01-08
申请号：US307060
申请日：1989-02-07
申请人： Masashi Moriyama
发明人： Masashi Moriyama
CPC分类号： H01L21/6715 , B05C11/08 , B05C11/1015 , B05C11/1021 , H01L21/67023
摘要： An automatic coating system includes a coating apparatus for coating a coating material on an object to be coated in accordance with a coating operation including a plurality of steps, a memory for storing operation programs of a series of steps, a step updating key for inputting a signal for operating the series of steps of the coating apparatus one by one, and a CPU for starting one step of the coating apparatus on the basis of the program when the signal is input. After the one step of the coating apparatus is finished, the next step is not started until the step updating key is operated.
摘要翻译： 一种自动涂布系统，包括：涂布装置，用于根据包括多个步骤的涂布操作在待涂覆物体上涂布涂料;存储器，用于存储一系列步骤的操作程序;步骤更新键，用于输入 信号，用于一个接一个地操作涂布装置的一系列步骤;以及CPU，用于在输入信号时基于程序开始涂布装置的一个步骤。 在涂布装置的一个步骤完成之后，直到步骤更新键被操作才开始下一步骤。
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