Imprint apparatus, and product manufacturing method

    公开(公告)号:US11664225B2

    公开(公告)日:2023-05-30

    申请号:US16245124

    申请日:2019-01-10

    发明人: Jun Ota

    摘要: An imprint apparatus forms imprint material using a mold on a substrate. The imprint apparatus includes a movable stage configured to hold the substrate, a supply portion configured to discharge the imprint material, and a control unit configured to cause the supply portion to discharge the imprint material while moving the stage so that the imprint material is supplied onto the substrate. The control unit controls discharge of the imprint material from the supply portion so that a target amount of the imprint material is arranged at a target position on the substrate, based on property information indicating a relation between a discharge amount of imprint material from the supply portion and a position on a target object where the imprint material is to be arranged.

    Bore healing mechanism
    9.
    发明授权
    Bore healing mechanism 有权
    孔修复机制

    公开(公告)号:US09523547B1

    公开(公告)日:2016-12-20

    申请号:US14794556

    申请日:2015-07-08

    申请人: Logan M. Compton

    发明人: Logan M. Compton

    摘要: A device is provided for repairing erosion damage to a bore of a railgun with metal powder. The bore has a surface contour that extends longitudinally of the railgun. The device includes a housing, a profilometer sensor and a nozzle. The housing has a configuration that conforms to the surface contour and an upstream face on a longitudinal end. The profilometer sensor mounts to the upstream face to measure depth of the erosion and indicate a divot in the bore that involves repair to match the surface contour. The nozzle mounts to the upstream face to spray the metal powder from a reservoir within the housing in response to the divot indicated by the profilometer.

    摘要翻译: 提供一种装置,用于修复具有金属粉末的轨道枪孔的侵蚀损坏。 孔具有沿轨道纵向延伸的表面轮廓。 该装置包括壳体,轮廓仪传感器和喷嘴。 壳体具有符合表面轮廓和纵向端部上游面的构造。 轮廓仪传感器安装到上游面以测量侵蚀的深度,并指示孔中的凹陷,涉及修复以匹配表面轮廓。 喷嘴安装到上游面,以响应于由轮廓仪表示的镜头,从壳体内的容器喷射金属粉末。

    Film Deposition System Having a Substrate Carrier and a Cooling Device
    10.
    发明申请
    Film Deposition System Having a Substrate Carrier and a Cooling Device 有权
    具有基板载体和冷却装置的膜沉积系统

    公开(公告)号:US20160318061A1

    公开(公告)日:2016-11-03

    申请号:US14702100

    申请日:2015-05-01

    IPC分类号: B05C9/14 B05C11/10

    摘要: A film deposition system includes a substrate carrier, a film deposition device, a transport device and a cooling device. The substrate carrier includes a carrier body that defines an isolated space therein, and a phase transition material that is filled into the isolated space and that has a melting point ranging between 18° C. and 95° C. The phase transition material is capable of absorbing thermal energy from the carrier body as latent heat to change the phase of the phase transition material from solid to liquid. The cooling device is configured to absorb thermal energy from the substrate carrier so as to change the phase of the phase transition material from liquid to solid.

    摘要翻译: 膜沉积系统包括基板载体,成膜装置,输送装置和冷却装置。 衬底载体包括在其中限定隔离空间的载体主体和填充到隔离空间中且熔点在18℃至95℃之间的相变材料。相变材料能够 从载体吸收热能作为潜热,以将相变材料的相从固体改变为液体。 冷却装置被配置为从衬底载体吸收热能,以便将相变材料的相位从液体改变为固体。