MOLYBDENUM PRECURSOR COMPOUND, METHOD FOR PREPARING SAME, AND METHOD FOR DEPOSITING MOLYBDENUM-CONTAINING FILM USING SAME

    公开(公告)号:US20250066405A1

    公开(公告)日:2025-02-27

    申请号:US18722623

    申请日:2022-12-23

    Abstract: The present invention relates to a molybdenum precursor compound, a composition for forming a molybdenum-containing film comprising same, a molybdenum-containing film formed by using same, and a method for depositing the molybdenum-containing film. The molybdenum precursor compound has a single structure and high purity, and thus can form a high-quality molybdenum-containing film, and has excellent thermal stability and low specific resistance, and thus may have various applications in the semiconductor field. In particular, since the molybdenum precursor compound can form a film having excellent coating properties and uniformity even on a substrate having patterns (grooves) on the surface, a porous substrate, a plastic substrate, or a substrate having a complex shape, a high-quality molybdenum-containing film can be easily realized.

    CATALYTIC SYSTEM BASED ON A METALLOCENE AND A DIORGANOMAGNESIUM

    公开(公告)号:US20230357462A1

    公开(公告)日:2023-11-09

    申请号:US17781415

    申请日:2020-12-14

    CPC classification number: C08F210/02 C07F17/00

    Abstract: A catalytic system based on at least one metallocene and on a diorganomagnesium compound of formula RB—Mg—RA is provided, RB being different from RA and comprising a benzene nucleus substituted with a magnesium atom, one of the carbon atoms of the benzene nucleus ortho to the magnesium being substituted with a methyl, an ethyl, an isopropyl or forming a ring with the carbon atom which is its closest neighbour and which is meta to the magnesium, the other carbon atom of the benzene nucleus ortho to the magnesium being substituted with a methyl, an ethyl or an isopropyl, RA being an alkyl, a cycloalkyl or a benzyl, which may be substituted or unsubstituted. The catalytic system makes it possible to increase the functional group content in the synthesis of a functional polymer.

Patent Agency Ranking