Polycrystal diamond thin film and photocathode and electron tube using the same
    1.
    发明申请
    Polycrystal diamond thin film and photocathode and electron tube using the same 有权
    多晶金刚石薄膜和光电阴极和电子管使用相同

    公开(公告)号:US20030001498A1

    公开(公告)日:2003-01-02

    申请号:US10223378

    申请日:2002-08-20

    Abstract: In the polycrystal diamond thin film in accordance with the present invention, the average particle size is at least 1.5 nullm and, in a Raman spectrum obtained by Raman spectroscopy, a peak intensity near a wave number of 1580 cmnull1 has a ratio of 0.2 or less with respect to a peak intensity near a wave number of 1335 cmnull1. The photocathode and electron tube in accordance with the present invention comprise the polycrystal diamond thin film as a light-absorbing layer.

    Abstract translation: 在本发明的多晶金刚石薄膜中,平均粒径为1.5μm以上,通过拉曼光谱法得到的拉曼光谱中,波数为1580cm -1附近的峰强度的比例为0.2 或更小,相对于波数为1335cm -1附近的峰值强度。 根据本发明的光电阴极和电子管包括多晶金刚石薄膜作为光吸收层。

    Photocathode having ultra-thin protective layer
    2.
    发明申请
    Photocathode having ultra-thin protective layer 失效
    光电阴极具有超薄的保护层

    公开(公告)号:US20030048075A1

    公开(公告)日:2003-03-13

    申请号:US10112888

    申请日:2002-04-01

    CPC classification number: H01J1/34 H01J40/06

    Abstract: A photocathode structure having a photoelectric face plate protective layer, in order to prevent a photoelectric effect from being deteriorated sharply due to a high reaction of oxygen with respect to most of existing photoelectric face plate materials when the photoelectric face plate used for generating photoelectrons by a photoelectric effect i s exposed to the atmosphere, is provided. For example, a diamond-like carbon thin layer is used as a photocathode protective layer, to thereby perform a function of protection of the photoelectric face plate through isolation of the photoelectric face plate from the atmosphere and enable electrons generated from the photoelectric face plate to pass through a diamond-like carbon thin layer, which is deposited thinly, by the tunneling effect so that the performance of the photocathode is not affected. By using the protective layer, the processes subsequent to the photoelectric face plate deposition process can be freely performed in the atmosphere, to thereby simplify the whole process. As a result, a production cost is lowered, and manufacturing of a device or apparatus using a large-are photocathode is facilitated.

    Abstract translation: 一种具有光电面板保护层的光电阴极结构,为了防止光电效应由于氧气相对于大多数现有的光电面板材料而产生的高反应,当用于通过光电面板产生光电子的光电面板 提供光电效应暴露在大气中。 例如,使用类金刚石碳薄膜作为光电阴极保护层,由此通过将光电面板与大气隔离来实现保护光电面板的功能,并且能够使从光电面板产生的电子 通过通过隧道效应薄沉积的类金刚石碳薄层,使得光电阴极的性能不受影响。 通过使用保护层,可以在大气中自由进行光电面板沉积处理之后的处理,从而简化整个处理。 结果,降低了制造成本,并且促进了使用大的光电阴极的装置或装置的制造。

    Radiation flux monitor for EUV lithography
    3.
    发明申请
    Radiation flux monitor for EUV lithography 审中-公开
    EUV光刻用辐射通量监测仪

    公开(公告)号:US20020190642A1

    公开(公告)日:2002-12-19

    申请号:US09885813

    申请日:2001-06-19

    CPC classification number: G03F7/70558 G03F7/702 G03F7/70233

    Abstract: A device for monitoring radiation flux from a surface. The flux monitor is based on the photoelectric effect that occurs inherently when a reflective metal optic is exposed to a beam of energetic radiation. The incoming beam of energetic radiation is not totally reflected by the optic surface. That portion of the radiation absorbed by the optic generates photoelectrons producing a signal proportional to the incident radiation flux. By measuring this signal, an accurate determination of the radiation reflected by the optic surface can be made.

    Abstract translation: 用于监测来自表面的辐射通量的装置。 通量监测器基于当反射金属光学元件暴露于高能辐射束时固有地发生的光电效应。 能量辐射的进入光束不被光学表面完全反射。 由光学器件吸收的辐射的该部分产生产生与入射辐射通量成比例的信号的光电子。 通过测量该信号,可以准确地确定由光学表面反射的辐射。

    Cathode for emitting photoelectron or secondary electron, photomultiplier tube, and electron-multiplier tube
    4.
    发明申请
    Cathode for emitting photoelectron or secondary electron, photomultiplier tube, and electron-multiplier tube 失效
    用于发射光电子或二次电子的阴极,光电倍增管和电子倍增管

    公开(公告)号:US20030001497A1

    公开(公告)日:2003-01-02

    申请号:US10181360

    申请日:2002-07-17

    Abstract: A cathode (5) for emitting photoelectrons or secondary electrons comprises a nickel electrode substrate (5c) with an aluminum layer (5b) deposited on it; an intermediate layer (5a) consisting of carbon nanotubes formed on the aluminum layer; and an alkaline metal layer (5d) formed on the intermediate layer (5a) and composed, for example, of particles of an alkali antimony compound that either emits photoelectrons in response to incident light or emits secondary electrons in response to incident electrons. The decrease in defect density of the particles reduces the probability of recombination of electron and hole remarkably, thus increasing quantum efficiency.

    Abstract translation: 用于发射光电子或二次电子的阴极(5)包括沉积有铝层(5b)的镍电极基板(5c) 由形成在所述铝层上的碳纳米管构成的中间层(5a) 以及形成在中间层(5a)上的碱金属层(5d),其由例如响应于入射光发射光电子的碱锑化合物颗粒构成,或者响应入射电子发射二次电子。 颗粒的缺陷密度的降低降低了电子和空穴的显着复合的可能性,从而提高了量子效率。

    Light conversion and detection of visible light
    5.
    发明申请
    Light conversion and detection of visible light 审中-公开
    光转换和可见光的检测

    公开(公告)号:US20020113551A1

    公开(公告)日:2002-08-22

    申请号:US09816322

    申请日:2001-03-26

    CPC classification number: H01J47/062 H01J47/02

    Abstract: The present invention relates to an apparatus (11) for conversion of visible light to UV light, and includes an entrance window (17) transparent to visible light; a photocathode (23) adapted to release photoelectrons in dependence on being irradiated by visible light; an electrode arrangement (27, 29) connectable to a voltage supply; a scintillator (21, 35) adapted to emit UV light in dependence on being struck by electrons; and an exit window (19) transparent to UV light. Visible light is, during conversion, entered through the entrance window and irradiates the photocathode. Photoelectrons released from the photocathode is, by means of an electrical field created by the electrode arrangement, drifted towards the scintillator, where they are converted into scintillating light, which is output through the exit window. The converter is advantageously arranged in front of a gaseous based two-dimensional UV light detector for detection of visible light.

    Abstract translation: 本发明涉及一种用于将可见光转换为紫外光的装置(11),并且包括对可见光透明的入口窗(17); 适于根据被可见光照射而释放光电子的光电阴极(23); 可连接到电压源的电极装置(27,29); 闪烁体(21,35),其适于根据被电子撞击而发射UV光; 和对UV光透明的出射窗(19)。 在转换期间,可见光通过入口窗口进入并照射光电阴极。 从光电阴极释放的光电子通过由电极装置产生的电场向闪烁体漂移,在那里它们被转换成通过出射窗口输出的闪烁光。 转换器有利地布置在用于检测可见光的基于气体的二维UV光检测器的前面。

    Image intensifier tube
    7.
    发明申请

    公开(公告)号:US20020017843A1

    公开(公告)日:2002-02-14

    申请号:US09962660

    申请日:2001-09-25

    Inventor: Michael J. Iosue

    CPC classification number: H01J31/507 H01J2231/50015 H01J2231/50063

    Abstract: An image intensifier tube includes a photocathode (20) with an active layer (52) providing an electrical spectral response to photons of light. The photocathode (20) also includes integral spacer structure (42) which extends toward and physically touches a microchannel plate (22) of the image intensifier tube in order to establish and maintain a desirably precise and fine-dimension spacing distance nullGnull between the photocathode and the microchannel plate. A method of making the photocathode and a method of making the image intensifier tube are described also.

    Current-stabilizing illumination of photocathode electron beam source
    8.
    发明申请
    Current-stabilizing illumination of photocathode electron beam source 失效
    光电阴极电子束源的电流稳定照明

    公开(公告)号:US20040108812A1

    公开(公告)日:2004-06-10

    申请号:US10316970

    申请日:2002-12-10

    CPC classification number: H01J37/073 H01J2237/2817

    Abstract: An electron beam source has a photocathode with a photoemitter material having a work function, and with a beam receiving portion and an electron emitting portion. A first light source directs a first light beam onto the beam receiving portion of the photocathode to generate an electron beam from the electron emitting portion. The first light beam has a wavelength null1 such that hc/null1 is at least about the work function of the photoemitter material, where nullhnull is Planck's constant and nullcnull is the speed of light. A second light source directs a second light beam onto the beam receiving portion of the photocathode, such as onto the beam receiving portion, to stabilize the electron beam. The second light beam having a wavelength null2 such that hc/null2 is less than about the work function of the photoemitter material.

    Abstract translation: 电子束源具有具有功函数的光发射体材料的光电阴极和具有光束接收部分和电子发射部分的光电阴极。 第一光源将第一光束引导到光电阴极的光束接收部分上,以从电子发射部分产生电子束。 第一光束具有波长λ1,使得hc /λ1至少约为光电探测器材料的功函数,其中“h”为普朗克常数,“c”为光速。 第二光源将第二光束引导到光电阴极的光束接收部分,例如到光束接收部分上,以稳定电子束。 第二光束具有波长λ2,使得hc /λ2小于光发射器材料的功函数。

    Semiconductor photocathode
    9.
    发明申请
    Semiconductor photocathode 失效
    半导体光电阴极

    公开(公告)号:US20040021417A1

    公开(公告)日:2004-02-05

    申请号:US10416703

    申请日:2003-05-14

    Abstract: Ultraviolet light incident from the side of a surface layer 5 passes through the surface layer 5 to reach an optical absorption layer 4. Light which reaches the optical absorption layer 4 is absorbed within the optical absorption layer 4, and photoelectrons are generated within the optical absorption layer 4. Photoelectrons diffuse within the optical absorption layer 4, and reach the interface between the optical absorption layer 4 and the surface layer 5. Because the energy band is curved in the vicinity of the interface between the optical absorption layer 4 and surface layer 5, the energy of the photoelectrons is larger than the electron affinity in the surface layer 5, and so photoelectrons are easily ejected to the outside. Here, the optical absorption layer 4 is formed from an Al0.3Ga0.7N layer with an Mg content concentration of not less than 2null1019 cmnull3 but not more than 1null1020 cmnull3, so that a solar-blind type semiconductor photocathode 1 with high quantum efficiency is obtained.

    Abstract translation: 从表面层5侧入射的紫外线通过表层5到达光吸收层4.到达光吸收层4的光被吸收在光吸收层4内,光吸收在光吸收 光电子在光吸收层4内扩散,并到达光吸收层4和表面层5之间的界面。因为能带在光吸收层4和表面层5之间的界面附近弯曲 ,光电子的能量大于表面层5中的电子亲和力,因此光电子容易被排出到外部。 这里,光吸收层4由Mg含量浓度不小于2×10 19 cm -3但不大于1×10 20 cm -3的Al 0.3 Ga 0.7 N层形成,因此 得到具有高量子效率的太阳能型半导体光电阴极1。

    Photocathode and electron tube
    10.
    发明申请
    Photocathode and electron tube 有权
    光电阴极和电子管

    公开(公告)号:US20030146698A1

    公开(公告)日:2003-08-07

    申请号:US10343229

    申请日:2003-01-30

    CPC classification number: H01J43/28 H01J43/08 H01J2231/5016

    Abstract: A photocathode and an electron tube in which the photocathode plate can be securely fixed without using any adhesive. Even under the severe condition that a high vibration resistance is required or thermal stress occurs because of great temperature variation, it can be used widely for an image intensifier, a streak tube, or a photomultiplier. The photocathode plate of the photocathode is sandwiched between a faceplate and a support plate. First pins embedded in the faceplate are joined to the support plate. Therefore, the photocathode plate can be readily fixed securely to the faceplate without using any adhesive.

    Abstract translation: 光电阴极和电子管,其中光电阴极板可以牢固地固定而不使用任何粘合剂。 即使在需要高抗振性或由于温度变化大而产生热应力的严酷条件下,也可以广泛用于图像增强器,条纹管或光电倍增管。 光电阴极的光电阴极板被夹在面板和支撑板之间。 嵌入在面板中的第一个销被连接到支撑板。 因此,光电阴极板可以容易地固定在面板上而不使用任何粘合剂。

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