公开(公告)号：US20230256463A1

公开(公告)日：2023-08-17

申请号：US18168508

申请日：2023-02-13

Applicant: SCREEN Holdings Co., Ltd.

Inventor： Shinji SHIMIZU ,  Akihiro MINOGUCHI

IPC: B05B12/12 ,  B05D1/00 ,  B05B13/02

CPC classification number: B05B12/122 ,  B05D1/002 ,  B05B13/0228

Abstract: Disclosed is a substrate treating apparatus for performing a predetermined treatment on a substrate. The apparatus includes a design information memory unit configured to store three-dimensional design information, an imaging unit configured to capture a real image containing the target components, a matching processing unit configured to determine which of the target components matches a real image shape as a two-dimensional shape in the real image captured by the imaging unit in accordance with a degree of coincidence of feature points between the real image shape and a two-dimensional design shape based on three-dimensional design information about the target components, and an abnormality detecting unit configured to detect an abnormality of the target component through comparison between the reality information about the matched target component based on the real image and the normal information based on the three-dimensional design information when the target component is normal.

公开(公告)号：US20230249475A1

公开(公告)日：2023-08-10

申请号：US18160425

申请日：2023-01-27

Applicant: SCREEN HOLDINGS CO., LTD

Inventor： Yoshihiro Nishida ,  Shiro KITAWAKI

IPC: B41J11/00 ,  B41J29/02 ,  B41J2/145

CPC classification number: B41J11/002 ,  B41J11/007 ,  B41J29/02 ,  B41J2/145

Abstract: A dryer includes a plurality of transport rollers, turn bars, and a heater. Some of the transport rollers support the continuous base material transported in the +Y direction in a first position in the Z direction. Some of the transport rollers support the continuous base material transported in the −Y direction in a second position in the Z direction. The turn bars support the continuous base material in a third position in the Z direction while bending the continuous base material so that the continuous base material is transported in the −X direction. The heater is capable of heating part of the continuous base material in a position on the transport path TR between the transport rollers and the turn bars. The transport rollers and the turn bars are located on the second surface side of the continuous base material.

公开(公告)号：US11707931B2

公开(公告)日：2023-07-25

申请号：US17587391

申请日：2022-01-28

Applicant: SCREEN HOLDINGS CO., LTD.

Inventor： Takahiro Uda ,  Mitsuru Tanemoto ,  Yuki Tsutsui ,  Masaki Era

IPC: B41J2/145 ,  B41J13/00

CPC classification number: B41J2/145 ,  B41J13/0009

Abstract: An inkjet printing apparatus for printing on a printing medium by dispensing inks thereto. The apparatus includes a transport device; print heads for performing printing by dispensing the inks to the printing medium; and a drying section including a heat source for generating heat for drying the inks dispensed to the printing medium, and a shutter switchable between an open state and a closed state. In the open state, a drying amount of heat is applied for drying the inks dispensed to the printing medium, and in the closed state, the heat from the heat source is applied in a minute amount of heat smaller than the drying amount of heat. A controller switches the shutter to the open state when a transporting speed of the printing medium is faster than a predetermined threshold, and switches the shutter to the closed state when the transporting speed of the printing medium becomes equal to or less than the predetermined threshold.

公开(公告)号：US11706526B2

公开(公告)日：2023-07-18

申请号：US17554701

申请日：2021-12-17

Applicant: SCREEN HOLDINGS CO., LTD.

Inventor： Takuya Yasuda

IPC: H04N23/67

CPC classification number: H04N23/67

Abstract: In a focusing position detection method, a plurality of object images are acquired by imaging an imaging object by an imager while changing a focal position in M stages along an optical axis. A saturation consecutive region is acquired. The saturation consecutive region is included in all N (where N is a natural number equal to or more than three and equal to and less M) object images acquired while successively changing the focal position in N stages along the optical axis. A focusing degree decrease as the focal position approaches focusing position in the saturation consecutive region. Based on this property, the focusing position is detected.

公开(公告)号：US11699601B2

公开(公告)日：2023-07-11

申请号：US17359629

申请日：2021-06-27

Applicant: SCREEN Holdings Co., Ltd.

Inventor： Tomohiro Takahashi ,  Kei Takechi ,  Mitsutoshi Sasaki ,  Takashi Akiyama

IPC: H01L21/67 ,  H01L21/02 ,  H01L21/677 ,  H01L21/302

CPC classification number: H01L21/67086 ,  H01L21/02052 ,  H01L21/02343 ,  H01L21/302 ,  H01L21/6708 ,  H01L21/6715 ,  H01L21/67017 ,  H01L21/67253 ,  H01L21/67259 ,  H01L21/67757

Abstract: A substrate processing device includes a processing tank, a substrate holding unit, a fluid supply unit, and a control unit. The processing tank stores a processing liquid for processing a substrate. The substrate holding unit holds the substrate in the processing liquid in the processing tank. The fluid supply unit supplies a fluid to the processing tank. The control unit controls the fluid supply unit. The control unit controls the fluid supply unit such that the fluid supply unit changes supply of the fluid during a period from a start of supply of the fluid to the processing tank storing the processing liquid in which the substrate is immersed to an end of supply of the fluid to the processing tank storing the processing liquid in which the substrate is immersed.

公开(公告)号：US11697293B2

公开(公告)日：2023-07-11

申请号：US17387262

申请日：2021-07-28

Applicant: SCREEN HOLDINGS CO., LTD.

Inventor： Yuki Tsutsui ,  Mitsuru Tanemoto ,  Takahiro Uda ,  Masaki Era

IPC: B41J11/00

CPC classification number: B41J11/0024 ,  B41J11/0022 ,  B41J11/00216

Abstract: Disclosed is a printing apparatus in which web paper is transported to a printing face contact roller in a swirling form while a direction thereof is turned by first to fourth turning rollers. Heating units are arranged so as to face a printing face of the web paper between the two first and second turning rollers, between the two third and fourth turning rollers, and between the fourth turning roller and the printing face contact roller individually. Such arrangement can achieve a compact drying mechanism. The heating units each directly heat inks on the printing face, and thus do not overheat the web paper. Moreover, the heating units are not directed upward. This avoids contact of the web paper to a front side face of each of the heating units when the web paper slackens.

公开(公告)号：US20230207348A1

公开(公告)日：2023-06-29

申请号：US17926642

申请日：2021-05-25

Applicant: SCREEN Holdings Co., Ltd.

Inventor： Yukio ONO ,  Takahiro YAMADA ,  Makoto ABE

IPC: H01L21/67 ,  H01L21/687

CPC classification number: H01L21/67115 ,  H01L21/6875 ,  H01L21/67248 ,  H01L21/68742 ,  H01L21/68785

Abstract: A plurality of substrate support pins are erected on a susceptor that holds a semiconductor wafer that is an object being treated. The plurality of substrate support pins are set in a ring shape at equal intervals. A flash lamp irradiates the semiconductor wafer supported by the plurality of substrate support pins with flash light to heat the semiconductor wafer. The radius of a setting circle in which the plurality of substrate support pins are set is made larger as the pulse width of flash light emitted from the flash lamp decreases. To irradiate the semiconductor wafer with flash light while having the semiconductor wafer supported by the plurality of substrate support pins can prevent cracking of the semiconductor wafer despite possible abrupt deformation of the semiconductor wafer due to the flash-light irradiation.

公开(公告)号：US11680911B2

公开(公告)日：2023-06-20

申请号：US17261791

申请日：2019-05-22

Applicant: SCREEN HOLDINGS CO., LTD.

Inventor： Shun Naito

IPC: G01N21/95 ,  G01N21/88 ,  G06V30/14 ,  G06V30/19 ,  G06V30/10

CPC classification number: G01N21/9515 ,  G01N21/88 ,  G06V30/1448 ,  G06V30/19013 ,  G06V30/10 ,  G06V30/141

Abstract: A marking region image is obtained by cutting out the part corresponding to a marking region from an article image obtained by imaging an article to be inspected. Then, whether or not the marking is properly provided is determined by performing a character recognition of a marking part for a marking region image. Further, an image of an article having no marking and no defect is stored as a reference image, whereas a marking periphery image obtained by removing the image of the marking part from the marking region image is compared to the reference image. By that comparison, whether or not any defect is included in the marking peripheral part of the marking region except the marking part is determined.

公开(公告)号：US11679608B2

公开(公告)日：2023-06-20

申请号：US17469074

申请日：2021-09-08

Applicant: SCREEN HOLDINGS CO., LTD.

Inventor： Kazuhiko Asada ,  Keisuke Hirai

IPC: B41J25/00

CPC classification number: B41J25/001

Abstract: Both end parts of a cord are fixed to a maintenance mounting frame, and an intermediate part of the cord is laid on a first body-side rotating member, a head-side rotating member and a second body-side rotating member. Here, when a motor is driven, the movement restriction of the cord is released and a movement of a head mounting frame is restricted, whereby only the maintenance mounting frame moves together with a maintenance part while the movement of the head mounting frame is restricted. Further, when the motor is driven, a movement of the cord is restricted and the movement restriction of the head mounting frame is released, whereby only the head mounting frame moves together with a discharge head while a movement of the maintenance part is restricted.

公开(公告)号：US11676842B2

公开(公告)日：2023-06-13

申请号：US16695260

申请日：2019-11-26

Applicant: SCREEN Holdings Co., Ltd.

Inventor： Joji Kuwahara

IPC: H01L21/677 ,  H01L21/67 ,  H01L21/673

CPC classification number: H01L21/6773 ,  H01L21/6732 ,  H01L21/67109 ,  H01L21/67769 ,  H01L21/67781

Abstract: A substrate treating apparatus includes a transporting space, transport mechanisms, and heat-treating sections. The transport mechanisms are provided in the transporting space. The heat-treating section, transporting space, and heat-treating section are aligned in the stated order in a transverse direction. One heat-treating section includes a plurality of heat-treating units. The heat-treating units are arranged in a longitudinal direction. The other heat-treating section includes a plurality of heat-treating units. These heat-treating units are also arranged in the longitudinal direction. One transport mechanism transports substrates to the heat-treating units. The other transport mechanism also transports substrates to the heat-treating units.