公开(公告)号：US07081992B2

公开(公告)日：2006-07-25

申请号：US10760118

申请日：2004-01-16

Applicant: Daniel A. Tichenor ,  Glenn D. Kubiak ,  Sang Hun Lee

Inventor： Daniel A. Tichenor ,  Glenn D. Kubiak ,  Sang Hun Lee

IPC: F21V9/04 ,  F21V9/06 ,  G02B5/08 ,  G02B5/20

CPC classification number: G03F7/70958 ,  G03F7/70175 ,  Y10S359/90

Abstract: Employing collector optics that have a sacrificial reflective surface can significantly prolong the useful life of the collector optics and the overall performance of the condenser in which the collector optics are incorporated. The collector optics are normally subject to erosion by debris from laser plasma source of radiation. The presence of an upper sacrificial reflective surface over the underlying reflective surface effectively increases the life of the optics while relaxing the constraints on the radiation source. Spatial and temporally varying reflectivity that results from the use of the sacrificial reflective surface can be accommodated by proper condenser design.

Abstract translation: 使用具有牺牲反射表面的收集​​器光学器件可以显着延长收集器光学器件的使用寿命以及其中结合有集光器的冷凝器的整体性能。 收集器光学器件通常受到来自激光等离子体辐射源的碎片的侵蚀。 在下面的反射表面上存在上牺牲反射表面有效地增加了光学元件的寿命，同时放松了对辐射源的约束。 通过使用牺牲反射表面产生的空间和时间变化的反射率可以通过适当的冷凝器设计来适应。

公开(公告)号：US06841322B1

公开(公告)日：2005-01-11

申请号：US10611069

申请日：2003-06-30

Applicant: Sang Hun Lee

Inventor： Sang Hun Lee

IPC: G01N27/00 ,  G01R27/08 ,  G03C5/00 ,  G03F7/20 ,  G06F19/00

CPC classification number: G03F7/70975 ,  G03F7/70958

Abstract: An embodiment of the present invention includes a technique to detect erosion in an extreme ultra violet (EUV) source collector system. An initial impedance and a coating impedance of a multi-layer (ML) coating of the collector in one of an extreme ultra violet lithography (EUVL) stepper and an optical system are obtained at first and second time instants. A relation between the coating and initial impedances is generated. An erosion rate of the ML coating is determined based on the relation.

Abstract translation: 本发明的实施例包括一种检测极紫外（EUV）源收集器系统中的腐蚀的技术。 在第一和第二时刻获得了在极紫外光刻（EUVL）步进器和光学系统之一中集电器的多层（ML）涂层的初始阻抗和涂层阻抗。 产生涂层和初始阻抗之间的关系。 基于该关系确定ML涂层的侵蚀速率。

公开(公告)号：US06633513B1

公开(公告)日：2003-10-14

申请号：US09599500

申请日：2000-06-23

Applicant: Woon-bae Kim ,  Byoung-chan Lee ,  Hyung-gae Shin ,  Cheol-sung Yeon ,  Sang-hun Lee ,  Jong-woo Shin

Inventor： Woon-bae Kim ,  Byoung-chan Lee ,  Hyung-gae Shin ,  Cheol-sung Yeon ,  Sang-hun Lee ,  Jong-woo Shin

IPC: G11B1100

CPC classification number: G11B7/1387 ,  G11B5/17 ,  G11B5/313 ,  G11B11/10534 ,  G11B11/10554 ,  G11B11/1058 ,  G11B2007/13725

Abstract: A magneto-optical head for magneto-optical writing and reading systems having an improved construction for a field modulating coil and a miniature objective lens, and a method of manufacturing the magneto-optical head. The magneto-optical head is mounted at the end of a slide-arm movable over a magneto-optical recording medium by hydrodynamics and includes: a lens mounted at the end of the slide-arm, for focusing incident light to form a light spot on the magneto-optical recording medium; a coil member including at least two stacked coil layers, and an insulating layer interposed between adjacent coil layers for electrically insulating the adjacent coil layers from one another, the stacked coil layers being planar coils with a spiral structure and having electrical contacts for electrical connection therebetween; and a connection member interposed between the lens and the coil member, for connecting the coil member to one side of the lens, facing the magneto-optical recording medium, and for electrically connecting the coil layers to an external power supply. The coil member is manufactured using a semiconductor fabrication process.

Abstract translation: 一种用于磁光写入和读取系统的磁光头，其具有用于场调制线圈和微型物镜的改进的结构，以及制造磁光头的方法。 磁光头安装在滑动臂的端部，通过流体动力学在磁光记录介质上移动，并且包括：安装在滑臂的端部的透镜，用于聚焦入射光以形成光点 磁光记录介质; 包括至少两个堆叠的线圈层的线圈构件和插入相邻线圈层之间的用于将相邻线圈层彼此电绝缘的绝缘层，所述堆叠线圈层是具有螺旋结构的平面线圈，并且具有用于电连接的电触点 ; 以及插入在透镜和线圈构件之间的连接构件，用于将线圈构件连接到透镜的一侧，面对磁光记录介质，并将线圈层电连接到外部电源。 线圈构件使用半导体制造工艺制造

公开(公告)号：US6150185A

公开(公告)日：2000-11-21

申请号：US67195

申请日：1998-04-27

Applicant: Sang-hun Lee ,  Yong-ju Kim ,  Sang-kyu Hahm ,  Sang-kil Lee

Inventor： Sang-hun Lee ,  Yong-ju Kim ,  Sang-kyu Hahm ,  Sang-kil Lee

IPC: H01L21/28 ,  H01L21/336 ,  H01L21/66 ,  H01L29/78 ,  H01L21/00

CPC classification number: B24B37/013 ,  H01L22/26 ,  H01L22/12

Abstract: Scanning Electron Microscope (SEM) analysis is used to detect undesired conductive material on the gate sidewall spacers. The undesired conductive material is then etched from the sidewall spacers if the undesired material is detected by the SEM analysis. More specifically, integrated circuit field effect transistors may be manufactured by forming on an integrated circuit substrate, a plurality of field effect transistors, each comprising spaced apart source and drain regions, a gate therebetween including a sidewall, a sidewall spacer on the sidewall and contacts comprising conductive material on the source and drain regions. At least one of the field effect transistors may include undesired conductive material on the sidewall spacer thereof. The integrated circuit field effect transistors are tested by performing SEM analysis on the integrated circuit substrate to detect the undesired conductive material on the sidewall spacer. The undesired conductive material is then etched from the sidewall spacer if the undesired material is detected by the SEM analysis.

Abstract translation: 扫描电子显微镜（SEM）分析用于检测栅极侧壁间隔物上的不期望的导电材料。 如果通过SEM分析检测到不需要的材料，则从侧壁间隔物蚀刻不需要的导电材料。 更具体地，可以通过在集成电路基板上形成多个场效应晶体管来制造集成电路场效应晶体管，多个场效应晶体管每个包括间隔开的源极和漏极区，其间的栅极包括侧壁，侧壁上的侧壁间隔物和接触 在源极和漏极区域上包括导电材料。 至少一个场效应晶体管可以在其侧壁间隔物上包括不期望的导电材料。 通过在集成电路基板上进行SEM分析来测试集成电路场效应晶体管，以检测侧壁间隔物上的不期望的导电材料。 如果通过SEM分析检测到不需要的材料，则从侧壁间隔物中蚀刻出不期望的导电材料。

公开(公告)号：US12024447B2

公开(公告)日：2024-07-02

申请号：US17606095

申请日：2020-05-13

Applicant: POSEION CO., LTD. ,  Sang Hun Lee

Inventor： Sang Hun Lee

IPC: C02F1/48 ,  B03C1/28 ,  B05B1/18 ,  B05B15/40

CPC classification number: C02F1/48 ,  B03C1/286 ,  B05B1/18 ,  B05B15/40 ,  C02F1/481 ,  C02F2303/04 ,  C02F2303/22 ,  C02F2307/06

Abstract: A magnetized water generator, includes: a housing portion having a cylindrical structure; a first magnetized water generating unit located on an upper side in the housing portion and rotating in a forward or counterclockwise direction by water flowing into the housing portion; and, a second magnetized water generating unit 300 located on an intermediate position in the housing portion, wherein the second magnetized water generating unit is separated from the first magnetized water generating unit by a barrier and wherein the second magnetized water generating unit rotates in a reverse or clockwise direction.

公开(公告)号：US20220194825A1

公开(公告)日：2022-06-23

申请号：US17606095

申请日：2020-05-13

Applicant: Sang Hun LEE ,  POSEION CO., LTD.

Inventor： Sang Hun LEE

IPC: C02F1/48

Abstract: According to the present invention, a magnetized water generator is provided, comprising: a housing portion having a cylindrical structure; a first magnetized water generating unit located on an upper side in the housing portion and rotating in a forward or counterclockwise direction by water flowing into the housing portion so as to magnetize water; and, a second magnetized water generating unit located on an intermediate position in the housing portion, wherein the second magnetized water generating unit is separated from the first magnetized water generating unit by a barrier and wherein the second magnetized water generating unit rotates in a reverse or clockwise direction so as to magnetize the water that has been magnetized by the first magnetized water generating unit and has passed through said barrier

公开(公告)号：US09418794B2

公开(公告)日：2016-08-16

申请号：US13700613

申请日：2011-06-01

Applicant: Chang Wook Kim ,  Dong Chan Park ,  Ju Young Song ,  Sang Hun Lee ,  Sung Bae Cho ,  Hyun Ho Yang ,  Jun Bo Yoon ,  Dong Hun Choi ,  Chang Hun Han

Inventor： Chang Wook Kim ,  Dong Chan Park ,  Ju Young Song ,  Sang Hun Lee ,  Sung Bae Cho ,  Hyun Ho Yang ,  Jun Bo Yoon ,  Dong Hun Choi ,  Chang Hun Han

IPC: H01G5/01 ,  H01G7/00 ,  H01G7/06 ,  H01G5/16

CPC classification number: H01G7/00 ,  H01G5/16

Abstract: Disclosed is a MEMS variable capacitor, the capacitor including a first electrode, a second electrode that is floated on an upper surface of the first electrode, and a third electrode capable of variably-adjusting a capacitance value by adjusting a gap between the first electrode and the second electrode.

Abstract translation: 公开了一种MEMS可变电容器，电容器包括第一电极，漂浮在第一电极的上表面上的第二电极和能够通过调节第一电极和第二电极之间的间隙来可变地调整电容值的第三电极 第二电极。

公开(公告)号：US09237639B2

公开(公告)日：2016-01-12

申请号：US14125038

申请日：2012-06-21

Applicant: Sang Hun Lee

Inventor： Sang Hun Lee

IPC: H01J27/16 ,  H01J27/18 ,  H05H7/02 ,  H01J37/32 ,  H01P5/12 ,  H05H1/46

CPC classification number: H05H7/02 ,  H01J37/32247 ,  H01P5/12 ,  H05H1/46 ,  H05H2001/4622

Abstract: A microwave resonant cavity is provided. The microwave resonant cavity includes: a sidewall having a generally cylindrical hollow shape; a gas flow tube disposed inside the sidewall and having a longitudinal axis substantially parallel to a longitudinal axis of the sidewall; a plurality of microwave waveguides, each microwave waveguide having a longitudinal axis substantially perpendicular to the longitudinal axis of the sidewall and having a distal end secured to the sidewall and aligned with a corresponding one of a plurality of holes formed on the sidewall; a top plate secured to one end of the sidewall; and a sliding short circuit having: a disk slidably mounted between the sidewall and the gas flow tube; and at least one bar disposed inside the sidewall and arranged parallel to the longitudinal axis of the sidewall.

Abstract translation: 提供微波谐振腔。 微波谐振腔包括：具有大致圆柱形中空形状的侧壁; 设置在所述侧壁内侧并具有基本上平行于所述侧壁的纵向轴线的纵轴的气流管; 多个微波波导，每个微波波导具有基本上垂直于所述侧壁的纵向轴线的纵向轴线，并且具有固定到所述侧壁的远端并与形成在所述侧壁上的多个孔中的对应的一个孔对准; 顶板固定在侧壁的一端; 滑动短路具有：可滑动地安装在侧壁和气体流动管之间的盘; 以及设置在侧壁内并且平行于侧壁的纵向轴线布置的至少一个杆。

公开(公告)号：US09124241B2

公开(公告)日：2015-09-01

申请号：US14238065

申请日：2012-08-03

Applicant: Sang Hun Lee

Inventor： Sang Hun Lee

IPC: H03H7/38 ,  H03H7/40 ,  H04B1/04 ,  H04B1/18

CPC classification number: H03H7/38 ,  H03H7/40 ,  H04B1/0458 ,  H04B1/18

Abstract: Disclosed is an impedance matching apparatus performing impedance matching between a front-end module and an antenna. The impedance matching apparatus includes an RF front end providing a multi-band RF signal, a reflected power measuring module measuring a reflection coefficient for the RF input signal, a matching unit adjusting impedance so that the reflection coefficient is minimized, a first switch module provided in the RF front end to selectively switch the RF signal onto a bypass path, and a controller allowing the RF signal to be switched onto the bypass path if a specific frequency range is detected from the reflection coefficient.

Abstract translation: 公开了一种在前端模块和天线之间进行阻抗匹配的阻抗匹配装置。 阻抗匹配装置包括提供多频带RF信号的RF前端，测量RF输入信号的反射系数的反射功率测量模块，匹配单元调整阻抗以使反射系数最小化，提供第一开关模块 在RF前端中，如果从反射系数检测到特定频率范围，则将RF信号选择性地切换到旁路路径上，以及允许RF信号切换到旁路路径的控制器。

公开(公告)号：US09049522B2

公开(公告)日：2015-06-02

申请号：US13169408

申请日：2011-06-27

Applicant: Joo-Ho Lee ,  Dong-Kyun Kim ,  Sang-Hun Lee ,  Seok-Whan Chung

Inventor： Joo-Ho Lee ,  Dong-Kyun Kim ,  Sang-Hun Lee ,  Seok-Whan Chung

IPC: H04R25/00 ,  H04R17/00

CPC classification number: H04R17/005 ,  H04R2201/003

Abstract: A piezoelectric microspeaker and a method of fabricating the same are provided. The piezoelectric microspeaker includes a substrate having a through hole therein; a diaphragm disposed on the substrate and covering the through hole; and a plurality of piezoelectric actuators including a piezoelectric member, a first electrode, and a second electrode, wherein the first and second electrodes are configured to induce an electric field in the piezoelectric member. The piezoelectric actuators include a central actuator, which is disposed on a central portion of the diaphragm and a plurality of edge actuators, which are disposed a predetermined distance apart from the central actuator and are formed on a plurality of edge portions of the diaphragm.

Abstract translation: 提供一种压电微型扬声器及其制造方法。 压电式微型扬声器包括其中具有通孔的基板; 设置在所述基板上并覆盖所述通孔的隔膜; 以及包括压电元件，第一电极和第二电极的多个压电致动器，其中第一和第二电极构造成在压电元件中感应电场。 压电致动器包括设置在隔膜的中心部分上的中央致动器和多个边缘致动器，它们与中心致动器隔开预定距离设置并形成在隔膜的多个边缘部分上。