公开(公告)号：US20050146768A1

公开(公告)日：2005-07-07

申请号：US10962055

申请日：2004-10-08

申请人： Jen-Shiang Wang ,  Il Jung ,  Olav Solgaard

发明人： Jen-Shiang Wang ,  Il Jung ,  Olav Solgaard

IPC分类号： G02B5/08 ,  G02B26/08 ,  G02F1/03 ,  G02F1/07 ,  G21K1/06

CPC分类号： G02B5/0891 ,  G02B26/0825 ,  G21K1/06 ,  G21K2201/067

摘要： A new design and fabrication process of an elastomer spatial light modulator (eSLM). The present invention resolves many known challenges and enables the eSLM to operate as programmable masks for the EUV lithography systems. Bottom electrodes are deposited and patterned on an insulation layer. A sacrificial layer is then deposited, patterned and polished on top of the bottom electrodes. A nitride shell forms a protection layer that prevents out-gassing and degradations of elastomer during operations. The sacrificial layer is removed, forming a cavity. An elastomer is injected at one end of the cavity and pulled into it by capillary forces. In an embodiment, the eSLM comprises a 2-D array of elastomer pillars, each containing a capacitive actuator with an elastomer as the supporting and dielectric structure. A stack of Mo/Si multilayer mirror is deposited on the surface to achieve a high reflectivity about 70% or more in EUV.

摘要翻译： 弹性体空间光调制器（eSLM）的新设计和制造工艺。 本发明解决了许多已知的挑战，使eSLM能够作为EUV光刻系统的可编程掩模来操作。 在绝缘层上沉积和图案化底电极。 然后在底部电极的顶部上沉积，图案化和抛光牺牲层。 氮化物壳形成保护层，其在操作期间防止弹性体的排气和降解。 去除牺牲层，形成空腔。 在空腔的一端注入弹性体，并通过毛细管力将其拉入。 在一个实施例中，eSLM包括弹性体柱的2-D阵列，每个阵列包含具有弹性体作为支撑和电介质结构的电容性致动器。 一层Mo / Si多层反射镜沉积在表面上，以实现在EUV中约70％或更高的高反射率。

公开(公告)号：US20050018541A1

公开(公告)日：2005-01-27

申请号：US10495224

申请日：2002-11-13

申请人： Ib-Rune Johansen ,  Olav Solgaard ,  Odd Lovhaugen ,  Hakon Sagberg ,  Henrik Rogne ,  Dag Wang

发明人： Ib-Rune Johansen ,  Olav Solgaard ,  Odd Lovhaugen ,  Hakon Sagberg ,  Henrik Rogne ,  Dag Wang

IPC分类号： G01L9/00 ,  H04R23/00 ,  H04R1/00

CPC分类号： G01L9/0077 ,  H04R23/008

摘要： The invention relates an optical displacement sensor element comprising two essentially flat surfaces (1,2) being separated by a cavity defined by a spacer (5) and the surfaces (1,2), the distance between the surfaces being variable, wherein a first of said surfaces (1) is positioned on an at least partially transparent carrier (3) and being provided with a reflective pattern, the pattern constituting a pattern being shaped as a diffractive lens, and said second surface (2) being a reflective surface.

摘要翻译： 本发明涉及一种光学位移传感器元件，其包括两个基本平坦的表面（1,2），该表面由间隔件（5）和表面（1,2）限定的空腔分开，表面之间的距离是可变的，其中第一 的所述表面（1）位于至少部分透明的载体（3）上并且设置有反射图案，所述图案构成成形为衍射透镜的图案，并且所述第二表面（2）是反射表面。

公开(公告)号：US06713367B2

公开(公告)日：2004-03-30

申请号：US10229578

申请日：2002-08-27

申请人： Olav Solgaard ,  Uma Krishnamoorthy

发明人： Olav Solgaard ,  Uma Krishnamoorthy

IPC分类号： H01L2130

CPC分类号： B81C3/002 ,  B81B2201/042 ,  B81B2203/0136 ,  G02B6/122 ,  G02B6/3518 ,  G02B6/357 ,  G02B6/3584 ,  G02B2006/12104 ,  G02B2006/12145

摘要： A method of fabricating a self-aligned vertical combdrive is described. The method includes the steps of etching in a semiconductor wafer a first comb with a coarse set of teeth. A second semiconductor wafer is bonded to the first set of teeth. A set of accurately positioned teeth is etched in the second wafer with teeth overlapping the teeth in the first comb. The lower teeth are etched using the overlapping teeth as a mask to assure proper alignment. One variation in this fabrication method whereby the first coarse comb teeth are etched on semiconductor-on-insulator instead, allows creation of double-sided comb actuators with increased torsional deflection range. Another variation to this fabrication method that keeps the electrically isolated upper masking teeth allows creation of dual-mode vertical comb actuators after an initial assembly step.

摘要翻译： 描述了制造自对准垂直梳齿驱动器的方法。 该方法包括以下步骤：在半导体晶片中蚀刻具有粗齿组的第一梳。 第二半导体晶片被结合到第一组齿。 在第二晶片中蚀刻一组精确定位的齿，其中齿与第一梳中的齿重叠。 使用重叠的牙齿作为掩模蚀刻下齿，以确保正确对准。 这种制造方法中的第一粗梳齿在绝缘体上半导体上被蚀刻的制造方法中的一个变型允许创建具有增加的扭转偏转范围的双面梳状致动器。 保持电隔离的上掩蔽齿的这种制造方法的另一变型允许在初始组装步骤之后创建双模垂直梳状致动器。

公开(公告)号：US06374008B1

公开(公告)日：2002-04-16

申请号：US09780122

申请日：2001-02-08

申请人： Olav Solgaard ,  Jonathan P. Heritage ,  Amal R. Bhattarai

发明人： Olav Solgaard ,  Jonathan P. Heritage ,  Amal R. Bhattarai

IPC分类号： G02B635

摘要： A cross-connect switch for fiber-optic communication networks employing a wavelength dispersive element, such as a grating, and a stack of regular (non-wavelength selective) cross bar switches using two-dimensional arrays of micromachined, electrically actuated, individually-tiltable, controlled deflection micro-mirrors for providing multiport switching capability for a plurality of wavelengths. Using a one-dimensional micromirror array, a fiber-optic based MEMS switched spectrometer that does not require mechanical motion of bulk components or large diode arrays can be constructed with readout capability for WDM network diagnosis or for general purpose spectroscopic applications.

公开(公告)号：US06327398B1

公开(公告)日：2001-12-04

申请号：US09748025

申请日：2000-12-21

申请人： Olav Solgaard ,  Jonathan P. Heritage ,  Amal R. Bhattarai

发明人： Olav Solgaard ,  Jonathan P. Heritage ,  Amal R. Bhattarai

IPC分类号： G02B635

CPC分类号： H04Q11/0005 ,  G01J3/28 ,  G02B6/32 ,  G02B6/35 ,  G02B6/3512 ,  G02B6/3516 ,  G02B6/3518 ,  G02B6/3534 ,  G02B6/3542 ,  G02B6/3546 ,  G02B6/3556 ,  G02B6/356 ,  G02B6/3566 ,  G02B6/357 ,  G02B6/3582 ,  G02B6/3584 ,  G02B6/3592 ,  H04Q2011/0024 ,  H04Q2011/0026 ,  H04Q2011/0083

摘要： A cross-connect switch for fiber-optic communication networks employing a wavelength dispersive element, such as a grating, and a stack of regular (non-wavelength selective) cross bar switches using two-dimensional arrays of micromachined, electrically actuated, individually-tiltable, controlled deflection micro-mirrors for providing multiport switching capability for a plurality of wavelengths. Using a one-dimensional micromirror array, a fiber-optic based MEMS switched spectrometer that does not require mechanical motion of bulk components or large diode arrays can be constructed with readout capability for WDM network diagnosis or for general purpose spectroscopic applications.