公开(公告)号：US20070295095A1

公开(公告)日：2007-12-27

申请号：US11512469

申请日：2006-08-30

Applicant: Anthony D. Kurtz ,  Joseph Van DeWeert

Inventor： Anthony D. Kurtz ,  Joseph Van DeWeert

IPC: G01L7/00

CPC classification number: G01M3/3236 ,  G01L7/00 ,  G01L9/065

Abstract: A circuit produces an output that is proportional to the molar density of gas in a chamber. The circuit employs an operational amplifier which measures the temperature using a RTD or other element that changes resistance with temperature. The RTD is placed such that it produces a decreasing current draw at the inverting input of the operational amplifier as the temperature increases. This decreasing current draw in turn produces a decreasing voltage at the output of the operational amplifier. By changing the ratio of resistors connected to the non-inverting terminal of the operational amplifier one changes the offset of the output voltage. By changing the feedback resistor connected from the output of the operational amplifier to the inverting terminal and connecting the output of the inverting terminal to a voltage divider including the RTD device, one can change the gain with temperature. Thus the output voltage of the operational amplifier is carefully controlled to be proportional to 1/T for many different temperature scales and ranges. The output of the amplifier serves as the biasing voltage for a pressure transducer to provide a first output proportional to P/T. A second pressure transducer provides a second output proportional to P only.

Abstract translation: 电路产生与腔室中气体的摩尔密度成比例的输出。 该电路采用运算放大器，其使用RTD或其他随温度变化的元件来测量温度。 放置RTD使得它在温度升高时在运算放大器的反相输入端产生降低的电流消耗。 这种减小的电流消耗又在运算放大器的输出端产生降低的电压。 通过改变连接到运算放大器的同相端的电阻的比例，可以改变输出电压的偏移。 通过将从运算放大器的输出端连接的反馈电阻改变为反相端子，并将反相端子的输出端连接到包括RTD器件的分压器，可以随温度改变增益。 因此，对于许多不同的温度范围和范围，运算放大器的输出电压被小心地控制成与1 / T成比例。 放大器的输出用作压力传感器的偏置电压，以提供与P / T成比例的第一输出。 第二压力传感器提供与P成比例的第二输出。

公开(公告)号：US07231828B2

公开(公告)日：2007-06-19

申请号：US11234724

申请日：2005-09-23

Applicant: Anthony D. Kurtz ,  Wolf S. Landmann ,  Alexander A. Ned

Inventor： Anthony D. Kurtz ,  Wolf S. Landmann ,  Alexander A. Ned

IPC: G01L9/06

CPC classification number: G01L9/065

Abstract: A high temperature pressure sensing system (transducer) including: a pressure sensing piezoresistive sensor formed by a silicon-on-insulator (SOI) process; a SOI amplifier circuit operatively coupled to the piezoresistive sensor; a SOI gain controller circuit including a plurality of resistances that when selectively coupled to the amplifier adjust a gain of the amplifier; a plurality of off-chip contacts corresponding to the resistances, respectively, for electrically activating the corresponding resistances and using a metallization layer for the SOI sensor and SOI ASIC suitable for high temperature interconnections (bonding); wherein the piezoresistive sensor, amplifier circuit and gain control circuit are suitable for use in environments having a temperature greater than 175 degrees C. and reaching between 250° C. and 300° C., and wherein the entire transducer has a high immunity to nuclear radiation.

公开(公告)号：US07178403B2

公开(公告)日：2007-02-20

申请号：US11004327

申请日：2004-12-03

Applicant: Anthony D. Kurtz

Inventor： Anthony D. Kurtz

IPC: G01L9/00

CPC classification number: G01L19/0092 ,  G01H11/08 ,  G01L9/0054 ,  G01L9/0055 ,  G01L19/02 ,  G01L19/04 ,  G01P15/123

Abstract: A pressure sensing device produces an output proportional to applied pressure irrespective of vibration/acceleration of the device, which device also provides an output proportional only to vibration/acceleration of the device irrespective of the pressure.

Abstract translation: 压力感测装置产生与施加的压力成比例的输出，而与装置的振动/加速度无关，该装置还提供与装置的振动/加速度成正比的输出，而与压力无关。

公开(公告)号：US07107853B2

公开(公告)日：2006-09-19

申请号：US10830796

申请日：2004-04-23

Applicant: Anthony D. Kurtz

Inventor： Anthony D. Kurtz

IPC: G01L7/08

CPC classification number: G01L19/0609 ,  G01L13/025

Abstract: A sensor is described, which basically consists of a leadless high sensitivity differential transducer chip which responds to both static and dynamic pressure. Located on the transducer are two sensors. One sensor has a thicker diaphragm and responds to both static and dynamic pressure to produce an output indicative of essentially static pressure, the static pressure being of a much higher magnitude than dynamic pressure. The other sensor has a thinner diaphragm and has one side or surface responsive to both static and dynamic pressure. The other side of the differential sensor or transducer structure has a long serpentine reference tube coupled to the underneath of the diaphragm. The tube only allows static pressure to be applied on the underside of the diaphragm and because of the natural resonance frequency of the tube, the dynamic pressure is suppressed and does not, in any manner, interface with the sensor or transducer having a thinned diaphragm. Thus, the thinned diaphragm differential unit provides an output which is indicative of the dynamic pressure, as the static pressure applied to both the top and bottom surfaces of the transducer sensor is cancelled.

Abstract translation: 描述了一种传感器，其基本上由无级高灵敏度差分换能器芯片组成，其响应静态和动态压力。 位于传感器上的是两个传感器。 一个传感器具有较厚的隔膜并响应静态和动态压力以产生指示基本静态压力的输出，静压力比动态压力大得多的量级。 另一个传感器具有更薄的隔膜，并且具有响应静态和动态压力的一侧或表面。 差分传感器或换能器结构的另一侧具有耦合到隔膜下方的长蛇形参考管。 该管仅允许静压力施加在隔膜的下侧，并且由于管的固有谐振频率，动压被抑制，并且不以任何方式与具有变薄隔膜的传感器或换能器相接合。 因此，由于施加到换能器传感器的顶表面和底表面的静压力被消除，所以薄化隔膜差分单元提供表示动态压力的输出。

公开(公告)号：US06891711B1

公开(公告)日：2005-05-10

申请号：US10820357

申请日：2004-04-08

Applicant: Anthony D. Kurtz

Inventor： Anthony D. Kurtz

IPC: G01L9/00 ,  H01G5/16 ,  H01G7/00

CPC classification number: H01G5/16 ,  G01L9/0073

Abstract: An ultra miniature high temperature capacitive inductive pressure transducer is fabricated by MEMS techniques. The transducer consists of two separated pieces of silicon which form the plates of the capacitor, one of which plate is micromachined in such a way to allow a controlled deflection with pressure. The gap between the two capacitive plates is determined by an extending rim on one of the two plates. The two pieces of silicon are subsequently fusion bonded, leading a very small gap between the two plates. An inductor is formed on the top surface of one of the pieces of silicon by sputtering metal in a spiral like fashion on the back side of the non-micromachined plate.

Abstract translation: 超微型高温电容式感应压力传感器由MEMS技术制造。 换能器由形成电容器板的两个分开的硅组成，其中一个板以微加工方式以允许受压力的受控偏转。 两个电容板之间的间隙由两个板之一上的延伸边缘决定。 随后将两块硅熔合，导致两块板之间的间隙非常小。 通过在非微加工板的背面上以螺旋状溅射金属，在一块硅片的顶表面上形成电感器。

公开(公告)号：US06877379B2

公开(公告)日：2005-04-12

申请号：US10236279

申请日：2002-09-06

Applicant: Anthony D. Kurtz ,  Joseph R. Van DeWeert

Inventor： Anthony D. Kurtz ,  Joseph R. Van DeWeert

IPC: G01L1/22 ,  G01L9/04 ,  G01L19/04

CPC classification number: G01L1/2281 ,  G01L9/065

Abstract: The present invention relates to a compensated pressure transducer having a pressure transducer connected to a coarse temperature adjustment compensator and to a fine temperature adjustment compensator. The coarse temperature adjustment compensator includes an analog circuit and the fine temperature adjustment compensator includes a digital circuit. A pre-amplifier is connected between the pressure transducer and the fine temperature adjustment compensator.

Abstract translation: 本发明涉及一种补偿压力传感器，其具有连接到粗调温补偿器的压力传感器和精细温度调节补偿器。 粗调温补偿器包括模拟电路，微调温补偿器包括数字电路。 前置放大器连接在压力传感器和精细温度调节补偿器之间。

公开(公告)号：US06811912B2

公开(公告)日：2004-11-02

申请号：US10085387

申请日：2002-02-28

Applicant: Anthony D. Kurtz

Inventor： Anthony D. Kurtz

IPC: H01M810

CPC classification number: H01M4/92 ,  H01M4/8605 ,  H01M4/921 ,  H01M8/0293 ,  H01M8/08 ,  H01M8/1004 ,  H01M8/1016

Abstract: A solid state fuel cell is fabricated from three substructures. There is a porous anode made from n+ silicon which is surrounded by a non-porous ring. The pore size of the anode material is sufficiently large to allow hydrogen gas to flow through and is of a sufficiently high conductivity to easily permit current flow of electrons. One side of the anode has enlarged pores and a layer of titanium and platinum is sputtered or otherwise deposited on the surface with the enlarged pores to produce a coated surface. A cathode is made in a similar manner and is fabricated as the anode. There is a center electrolytic section made from a low conductivity silicon or silicon carbide. The center electrolytic section has the coated side of the anode secured to one side and has the coated side of the cathode secured to the other side. The other or un-coated face of both the anode and the cathode has an electrical contact secured thereto to permit electrons to leave the anode and to reenter the cathode. The electrolytic center structure is filled with an ionic conductor. In this manner, hydrogen is broken into ions and electrons. The electrons cause a current flow, while the ions react with oxygen and produce water which is discharged from the fuel cell as steam or vapor.

Abstract translation: 固态燃料电池由三个子结构制成。 存在由n +硅制成的由无孔环包围的多孔阳极。 阳极材料的孔径足够大以允许氢气流过并且具有足够高的导电性以容易地允许电流的电流流动。 阳极的一侧具有扩大的孔，并且钛和铂层被溅射或以其它方式沉积在具有扩大的孔的表面上以产生涂覆表面。 以类似的方式制造阴极并制造为阳极。 存在由低导电性硅或碳化硅制成的中心电解部分。 中心电解部分具有固定到一侧的阳极的涂覆侧，并且阴极的涂覆侧固定到另一侧。 阳极和阴极的另一个或未涂覆的面具有固定到其上的电接触，以允许电子离开阳极并重新进入阴极。 电解中心结构填充有离子导体。 以这种方式，氢被分解成离子和电子。 电子引起电流，而离子与氧反应并产生作为蒸气或蒸汽从燃料电池排出的水。

公开(公告)号：US06612180B1

公开(公告)日：2003-09-02

申请号：US09526617

申请日：2000-03-16

Applicant: Anthony D. Kurtz

Inventor： Anthony D. Kurtz

IPC: G01L900

CPC classification number: G01L9/0054 ,  A61B5/03 ,  A61B2562/0247 ,  A61B2562/043 ,  G01L19/143 ,  G01L19/147

Abstract: A pressure sensing device suitable for medical use including: a dielectrically isolated sensor chip including a first wafer having first and second surfaces, a deflectable diaphragm formed therein and defining an active area of the sensor chip surrounded by an inactive area of the sensor chip, an electronic circuit formed on the first surface in the active area and being adapted to provide a signal indicative of an amount of deflection of the diaphragm, and a non-conductive coating on at least a portion of the second side; and, a plastic header including first and second ends, a recess in the first end and a plurality of electrically conductive pins extending from the recess through the header and out the second end; wherein, the sensor chip is secured within the recess of the plastic header such that the electronic circuit is in electrical contact with at least one of the pins.

Abstract translation: 一种适用于医疗用途的压力感测装置，包括：介电隔离的传感器芯片，包括具有第一和第二表面的第一晶片，形成在其中的可偏转光阑，并且限定由传感器芯片的无效区域包围的传感器芯片的有效区域， 电子电路形成在有源区域中的第一表面上，并且适于提供指示隔膜的偏转量的信号，以及在第二侧的至少一部分上的非导电涂层; 以及塑料集管，其包括第一端和第二端，在所述第一端部具有凹部，以及多个导电销，其从所述凹部延伸穿过所述集管并从所述第二端延伸; 其中，所述传感器芯片固定在所述塑料集管的凹槽内，使得所述电子电路与所述销中的至少一个电接触。

公开(公告)号：US06601455B2

公开(公告)日：2003-08-05

申请号：US09814903

申请日：2001-03-22

Applicant: Anthony D. Kurtz ,  Robert Gardner

Inventor： Anthony D. Kurtz ,  Robert Gardner

IPC: G01B716

CPC classification number: G01L1/26 ,  G01L1/2218

Abstract: A force transducer comprises a housing having a front and rear portions joined together by a platform, which platform is thinner than the housing portions. The platform contains at least one sensor which is operative to provide an output according to the extent of compression or expansion of the platform when a force is applied to the transducer housing. A compliant tubular member is secured at one end to the front portion of the housing and at the other end to the rear portion of the housing. The compliant tubular member surrounds the sensor to protect the sensor from the surrounding environment. The tubular member expands and contracts compliantly with the applied force so that the sensor which is mounted on the platform is substantially unimpeded by the tubular member and provides an output directly proportional to the force applied to the housing.

公开(公告)号：US06591686B1

公开(公告)日：2003-07-15

申请号：US10082012

申请日：2002-02-20

Applicant: Anthony D. Kurtz

Inventor： Anthony D. Kurtz

IPC: G01L906

CPC classification number: G01L9/0054

Abstract: An oil filled pressure transducer utilizes a leadless sensor which is secured to a header comprising a glass pre-form and a header shell. The glass pre-form contains holes which accept header pins and another aperture or hole which accepts the oil fill tube. The diameter of the sensor is chosen to be almost as large as the inner diameter of the shell. In this manner, there is a small cut out over the portion of the sensor that would otherwise cover the oil fill tube. The sensor is mounted to the header using glass bonds. There is a very small space between the outer diameter of the sensor and the inner diameter header housing, which is filled with glass used to mount the sensor. Since there are no ball bonds or gold wires in the area between the surface of the sensor and the diaphragm, the distance between the sensor and metal diaphragm is drastically reduced, thereby substantially reducing the backpressure problem.

Abstract translation: 充油压力传感器使用无引线传感器，该无引线传感器固定到包括玻璃预成型件和集管壳体的集管。 玻璃预制件包含接收插头插头的孔和接收充油管的另一个孔或孔。 传感器的直径被选择为几乎与外壳的内径一样大。 以这种方式，在传感器的部分上有一个很小的切口，否则这些部分将覆盖加油管。 传感器使用玻璃粘合装置安装在集管上。 在传感器的外径和内径头部外壳之间有一个非常小的空间，其内部装有用于安装传感器的玻璃。 由于在传感器表面和隔膜之间的区域内没有球接合或金线，所以传感器和金属隔膜之间的距离大大降低，从而大大降低了背压问题。